Chip-based prober for high frequency measurements and methods of measuring

Abstract

A chip-based prober for measuring a device-under-test is provided. The prober includes a probe tip, a voltage and control connector, a chip carrier, and a programmable termination chip. The probe tip is configured to contact the device-under-test. The voltage and control connector is in electrical communication with the probe tip. The programmable termination chip has a plurality of terminations interconnected with the voltage and control connector and the chip carrier through controlled collapsed chip connections.

1 . A circuit to reduce parasitics of programmable termination in a chip-based prober, comprising at least two biploar transistors in parallel. 
     
     
         2 . The circuit as in  claim 1 , wherein the circuit is configured to measure up to mmWave frequencies. 
     
     
         3 . The circuit as in  claim 1 , further comprising a resistor. 
     
     
         4 . The circuit as in  claim 1 , wherein one of said at least two bipolar transistors is scaled in size to provide a different on-resistance as compared to another of said at least two bipolar transistors. 
     
     
         5 . The circuit as in  claim 1 , further comprising a programmable termination chip. 
     
     
         6 . The circuit as in  claim 5 , wherein said programmable termination chip comprises a plurality of controlled collapsed chip connections. 
     
     
         7 . The circuit as in  claim 6 , further comprising a voltage and control connector interconnected with said plurality of controlled collapsed chip connections. 
     
     
         8 . The circuit as in  claim 6 , wherein said plurality of calibration standards are digitally selectable via said voltage and control connector. 
     
     
         9 . The circuit as in  claim 5 , wherein said plurality of calibration standards are configured to calibrate and measure up to frequencies of about 110 GHz. 
     
     
         10 . The circuit as in  claim 1 , wherein said plurality of calibration standards are configured to calibrate and measure up to millimeter-wave frequencies.