Method for forming imprinting roller
Abstract
The invention relates to a forming method for imprinting roller. A photoresist layer is coated on an aluminum roller with cylindrical surface. After a pattern is transferred on the photoresist layer, the photoresist layer with the pattern is formed on the aluminum roller. Then the anodic oxidization treatment conducted for the photoresist layer with the pattern on the aluminum roller. Repeat the above-mentioned steps to obtain the roller with nanopore structure. When the roll-to-roll process is applied, the motherboard of roller with arbitrary size can be formed to facilitate the transfer printing of large area.
Claims
exact text as granted — not AI-modified1 . A method for forming imprinting roller, comprising:
providing a conductive roller having a cylindrical surface; forming a patterned photoresist layer on the cylindrical surface; and carrying out an anodic oxidization treatment for the conductive roller having the patterned photoresist layer to form the imprinting roller.
2 . The method according to claim 1 , wherein the forming the patterned photoresist layer on the cylindrical surface, comprising:
coating a photoresist agent on a cylindrical surface; transferring a pattern onto the photoresist agent; and removing a part of photoresist agent from the transferred pattern.
3 . The method according to claim 2 , wherein transferring the pattern onto the photoresist agent comprises kept in a self-rotating motion at a constant speed upon the transfer treatment of pattern.
4 . The method according to claim 1 , wherein carrying out an anodic oxidization treatment comprises placing the conductive roller having the patterned photoresist layer in a reaction equipment, in which the conductive roller being set on an anode of a power supply and a cathode being a graphite electrode.
5 . The method according to claim 4 , wherein the conductive roller having the patterned photoresist layer comprises kept in a self-rotating motion at a constant speed.
6 . The method according to claim 4 , wherein the graphite electrode moves up and down at a constant linear speed relative to the conductive roller, and a constant distance being kept between the conductive roller and the graphite electrode.
7 . A method for forming a nanoimprinting roller, comprising:
providing an aluminum roller having a cylindrical surface; coating an photoresist layer on a surface of the aluminum roller; transferring a pattern onto the photoresist layer; removing a part of the photoresist layer from the transferred pattern to form the photoresist layer with pattern on the cylindrical surface; and carrying out an anodic oxidization treatment for the aluminum roller having the patterned photoresist layer.
8 . The method according to claim 7 , wherein transferring the pattern onto the photoresist agent comprises kept in a self-rotating motion at a constant speed upon the transfer treatment of pattern.
9 . The method according to claim 1 , wherein carrying out an anodic oxidization treatment comprises placing the conductive roller having the patterned photoresist layer in a reaction equipment, in which the conductive roller being set on an anode of a power supply and a cathode being a graphite electrode.
10 . The method according to claim 9 , wherein the aluminum roller having the patterned photoresist layer comprises kept in a self-rotating motion at constant speed.
11 . The method according to claim 10 , wherein the graphite electrode moves up and down at a constant linear speed relative to the aluminum roller, and a constant distance is kept between the aluminum roller and the graphite electrode.Join the waitlist — get patent alerts
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