Valve Assemblies Including Electrically Actuated Valves

Abstract

A valve chip may include a substrate having first and second faces and openings between the first and second faces, and a plurality of flexible valve flaps on one of the faces of the substrate with each flexible valve flap being associated with at least one of the openings. The valve chip may be packaged by forming a frame having an opening therein, and securing the valve chip in the opening of the frame. More particularly, the valve chip may be secured in the opening so that central portions of the first and second faces of the substrate are exposed through the opening in the frame and so that a fluid seal is provided between the frame and edges of the substrate. Related valves, valve assemblies, and methods are also discussed.

1 - 23 . (canceled) 
     
     
         24 . A valve assembly comprising:
 a main housing defining first, second, and third chambers, the main housing further defining a first valve enclosure between the first and second chambers and a second valve enclosure between the second and third chambers;   first, second, third, and fourth electrical housing leads in the main housing with portions of each of the first and second electrical housing leads being exposed in the first valve enclosure and with portions of the third and fourth electrical housing leads being exposed in the second valve enclosure;   a first valve in the first valve enclosure electrically coupled with the first and second electrical housing leads wherein the first valve is configured to allow or substantially block fluid communication between the first and second chambers responsive to electrical signals provided on the first and second electrical housing leads;   a second valve in the second valve enclosure electrically coupled with the third and fourth electrical housing leads wherein the second valve is configured to allow or substantially block fluid communication between the second and third chambers responsive to electrical signals provided on the third and fourth electrical housing leads; and   a controller electrically coupled to the first, second, third, and fourth electrical housing leads wherein the controller is configured to generate the electrical signals to allow or substantially block fluid communication between the first and second chambers and between the second and third chambers.   
     
     
         25 . A valve assembly according to  claim 24  wherein the first valve comprises a first planar substrate having a plurality of holes through the first planar substrate, wherein the second valve comprises a second planar substrate having a plurality of holes through the second planar substrate. 
     
     
         26 . A valve assembly according to  claim 25  wherein the first and second planar substrates are substantially parallel with respect to each other. 
     
     
         27 . A valve assembly according to  claim 25  wherein the first valve comprises a plurality of flexible valve flaps on a surface thereof with the flexible valve flaps being configured to open or substantially block respective holes responsive to the electrical signals applied to the first and second electrical housing leads. 
     
     
         28 . A valve assembly according to  claim 24  further comprising a filter in at least one of the first, second, and/or third chambers. 
     
     
         29 . A valve assembly according to  claim 24  wherein the first valve comprises a planar substrate having a plurality of holes through the substrate, and a frame surrounding and supporting the planar substrate at edge portions thereof so that central portions of the planar substrate are exposed through an opening in the frame and so that a fluid seal is provided between the frame and edges of the substrate. 
     
     
         30 . A valve assembly according to  claim 29  wherein the first valve further comprises a baffle on the frame so that the baffle, the frame, and the planar substrate define an enclosure, and wherein the baffle includes at least one opening therein. 
     
     
         31 . A valve assembly according to  claim 29  wherein the first valve has a wedge shaped profile. 
     
     
         32 . A valve assembly according to  claim 24 , wherein the main housing further defines a fourth chamber and a third valve enclosure between the third and fourth chambers, the valve assembly further comprising:
 a fifth electrical housing lead in the main housing with portions of each of the second and fifth electrical housing leads being exposed in the third valve enclosure; and   a third valve in the third valve enclosure electrically coupled with the fifth and second electrical housing leads wherein the third valve is configured to allow or substantially block fluid communication between the third and fourth chambers responsive to electrical signals provided on the fifth and second electrical housing leads;   wherein the controller is electrically coupled to the fifth electrical housing lead and wherein the controller is configured to generate the electrical signals to allow or substantially block fluid communication between the third and fourth chambers.   
     
     
         33 . A valve assembly according to  claim 24  further comprising:
 a first flexible gasket providing a fluid seal between the first valve and the first valve enclosure; and 
 a second flexible gasket providing a fluid seal between the second valve and the second valve enclosure. 
 
     
     
         34 . A valve assembly comprising:
 a valve housing defining first and second chambers;   a valve in the housing between the first and second chambers wherein the valve includes a planar substrate having a hole therethrough and a moveable valve member adjacent to the hole, and wherein the valve is configured to allow or substantially block fluid communication between the first and second chambers; and   a filter in the second chamber of the housing.   
     
     
         35 . A valve assembly according to  claim 34  wherein the moveable valve member comprises a flexible valve flap. 
     
     
         36 . A valve assembly according to  claim 34  wherein the valve housing further defines a third chamber, the valve assembly further comprising:
 a second valve in the housing between the second and third chambers wherein the second valve is configured to allow or substantially block fluid communication between the second and third chambers. 
 
     
     
         37 . A valve assembly according to  claim 36  further comprising:
 a second filter in the third chamber of the housing. 
 
     
     
         38 . A valve assembly according to  claim 36  wherein the valve housing further defines a fourth chamber, the valve assembly further comprising:
 a third valve in the housing between the third and fourth chambers wherein the third valve is configured to allow or substantially block fluid communication between the third and fourth chambers. 
 
     
     
         39 - 63 . (canceled) 
     
     
         64 . A valve assembly comprising:
 a valve housing defining first, second, and third chambers;   a first valve between the first and second chambers, the first valve comprising a first valve substrate, wherein the first valve is configured to allow or substantially block fluid communication between the first and second chambers; and   a second valve between the second and third chambers, the second valve comprising a second valve substrate, wherein the second valve is configured to allow or substantially block fluid communication between the second and third chambers and wherein the first and second substrates are separate.   
     
     
         65 . A valve assembly according to  claim 64  wherein the first and second substrates are non-parallel. 
     
     
         66 . A valve assembly according to  claim 64  wherein the first and second valves comprises first and second electro-statically actuated valves. 
     
     
         67 . A valve assembly according to  claim 64  wherein the first substrate comprises a first hole therethrough and a first valve member adjacent the first hole with the first valve member being configured to open and close the first hole responsive to first electrical signals applied thereto, and wherein the second substrate comprises a second hole therethrough and a second valve member adjacent the second hole with the second valve member being configured to open and close the second hole responsive to second electrical signals applied thereto. 
     
     
         68 . A valve assembly according to  claim 67  wherein the first and second valve members comprise respective first and second flexible valve flaps. 
     
     
         69 - 88 . (canceled)