Actuators and microlithography projection exposure systems and methods using the same

Abstract

An actuator includes a housing and a rotor that can be moved in relation to the housing in the effective direction of the actuator, wherein the actuator includes an advancing unit that is connected to the rotor at least part of the time. The advancing unit includes at least one deformation unit and at least one deformer for deforming the deformation unit. The at least one deformer is suited to deform the deformation unit perpendicular to the effective direction of the actuator such that the total length of the deformation unit changes in the effective direction as a result of the deformation. The actuator can be used in a projection exposure system for semiconductor lithography.

1 . An actuator having an effective direction, the actuator comprising:
 a housing; and   a movable part moveable in relation to the housing in the effective direction of the actuator,   wherein the actuator comprises an advancing unit that is at least temporarily connected to the movable part, the advancing unit having at least one deformation unit and at least one deformer for deforming the deformation unit, the at least one deformer being configured to deform the deformation unit with a vector component perpendicular to the effective direction of the actuator in such a way that a total length of the deformation unit changes in the effective direction as a result of the deformation.   
     
     
         2 . The actuator of  claim 1 , wherein the housing comprises at least two housing parts configured to be interconnected via the deformation unit. 
     
     
         3 . The actuator of  claim 2 , wherein the at least two housing parts respectively have at least one locking unit configured to be locked on the respective housing part with the aid of the moveable part. 
     
     
         4 . The actuator of  claim 3 , wherein the deformation unit comprises at least one leaf spring. 
     
     
         5 . The actuator of  claim 3 , wherein the deformation unit comprises a pair of springs composed of two opposing leaf springs, and the at least two deformers are arranged on the pair of springs and configured to bend the leaf springs toward one another from outside. 
     
     
         6 . The actuator of  claim 1 , wherein the movable part comprises a first and a second partial movable part connected via the deformation unit designed as part of the movable part. 
     
     
         7 . The actuator of  claim 6 , further comprising at least two locking units configured to respectively lock one of the partial movable parts in relation to the housing. 
     
     
         8 . The actuator of  claim 1 , wherein the actuator comprises damping elements configured to inhibit the movement of the movable part in the effective direction of the actuator. 
     
     
         9 . The actuator of  claim 1 , wherein the deformation unit comprises at least one pressurizable tube. 
     
     
         10 . The actuator of  claim 1 , wherein the deformation unit comprises at least one temperature-controllable bimetal. 
     
     
         11 . The actuator of  claim 1 , wherein the deformation unit comprises at least one magnetic spiral spring. 
     
     
         12 . The actuator of  claim 1 , wherein the deformation unit comprises at least one wire spring. 
     
     
         13 . The actuator of  claim 1 , wherein the deformation unit comprises a combination of different spiral springs of different cross section and/or different length. 
     
     
         14 . The actuator of  claim 1 , wherein the deformation unit comprises at least two sections with different elastic properties in the effective direction of the actuator. 
     
     
         15 . The actuator of  claim 1 , wherein the deformer comprises a piezo element. 
     
     
         16 . The actuator of  claim 1 , wherein the deformer comprises an electromagnetic coil. 
     
     
         17 . The actuator of  claim 1 , wherein the deformer comprises a hydraulic cylinder or pneumatic cylinder. 
     
     
         18 . The actuator of  claim 1 , wherein the deformer comprises a pneumatic bellows. 
     
     
         19 . The actuator of  claim 1 , wherein the deformer comprises a capacitor with capacitor plates whose electric field leads to a deformation of bending elements arranged between the capacitor plates. 
     
     
         20 . A projection exposure system for semiconductor lithography, the projection exposure system having an optical axis and comprising:
 an optical element; and   an actuator as claimed in  claim 1 ,   wherein the actuator is configured to move the optical element in the direction of the optical axis.   
     
     
         21 . The projection exposure system of  claim 20 , wherein the optical element is connected to further components of the projection exposure system exclusively via the actuator and one or more additional actuators. 
     
     
         22 . A method for operating an actuator, the actuator having an effective direction and comprising a housing, a movable part that can be moved in relation to the housing in the effective direction of the actuator, the movable part having a deformation unit, the method comprising:
 fixing the movable part by a first locking unit, the first locking unit being located upstream of the deformation unit with respect to the direction of movement of the movable part;   releasing a second locking unit of the movable part, the second locking unit being located downstream of the deformation unit with respect to the direction of movement of the movable part;   deforming the deformation unit by a deformer;   fixing the movable part by the second locking unit;   releasing the first locking unit; and   releasing the deformer from the deformation unit.