US2011122398A1PendingUtilityA1

Integrated Visible Pilot Beam for Non-Visible Optical Waveguide Devices

Assignee: KLA TENCOR CORPPriority: Feb 19, 2007Filed: Feb 3, 2011Published: May 26, 2011
Est. expiryFeb 19, 2027(~0.6 yrs left)· nominal 20-yr term from priority
Inventors:David R. Peale
G02B 6/29355G01J 5/07G01J 1/0266G02B 27/1006G02B 6/12007G01B 9/02072
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Claims

Abstract

In one embodiment, a radiation based analysis system comprises a first radiation source to generate first radiation having a wavelength outside the visible spectrum, a second radiation source to generate second radiation having a wavelength within the visible spectrum, and a waveguide coupler to couple a portion of the first radiation and a portion of the second radiation into a combined radiation beam such that the first radiation and the second radiation follow a path that is substantially coaxial.

Claims

exact text as granted — not AI-modified
1 . An interferometer configured to emit a first radiation having a first wavelength outside the visible spectrum, and a second radiation having a second wavelength within the visible spectrum wherein the first and second radiations follow substantially the same path through the space in which unaided human vision is used to align the interferometer. 
     
     
         2 . The interferometer of  claim 1  wherein: the interferometer is a waveguide-based interferometer system configured to emit from a common waveguide the first radiation having a first wavelength outside the visible spectrum, and the second radiation having a second wavelength within the visible spectrum. 
     
     
         3 . A radiation-based analysis system, comprising:
 a wavelength combining coupler comprising:
 a waveguide A configured to receive a first radiation having a first wavelength longer than any wavelength within the visible spectrum; 
 a waveguide B configured to receive a second radiation having a second wavelength within the visible spectrum; 
 an interaction region where the first and second radiations are at least partially combined; 
 at least one output waveguide selected from the group consisting of waveguides (A′ and B′) carrying the combined radiations, and 
 an interferometer configured to receive the first and second radiations selected from the group consisting of waveguides (A′ and B′) and configured to direct at least a portion of the first and second radiations onto a measurement beam of the interferometer. 
   
     
     
         4 . The radiation-based analysis system of  claim 3 , wherein the first wavelength is selected from the range seven hundred eighty nanometers to fourteen thousand nanometers. 
     
     
         5 . The radiation-based analysis system of  claim 3 , wherein the second wavelength is selected from the range four hundred nanometers to seven hundred fifty nanometers. 
     
     
         6 . The radiation-based analysis system of  claim 3 , wherein the termination of the waveguide not connected to the interferometer function block is configured to prevent significant amounts of remaining first and second radiations from propagating back in the directions from which they came. 
     
     
         7 . The radiation-based analysis system of  claim 3 , wherein the interaction region is configured to produce evanescent coupling. 
     
     
         8 - 12 . (canceled) 
     
     
         13 . A method of operating an interferometer assembly, comprising:
 receiving, in a first waveguide, a first radiation having a wavelength outside the visible spectrum;   receiving, in a second waveguide, a second radiation having a wavelength within the visible spectrum;   directing radiation from the first waveguide to an interferometer, wherein the interferometer is adapted to generate two measurement beams from the first radiation; and   coupling a portion of the second radiation to at least one of the measurement beams of the interferometer.   
     
     
         14 . The method of  claim 13 , wherein coupling a portion of the second radiation to at least one of the two measurement beams comprises directing the first radiation and the second radiation through an evanescent interaction region. 
     
     
         15 . The method of  claim 13 , further comprising directing a portion of the first radiation and the second radiation onto at least one of the two measurement beams. 
     
     
         16 . The method of  claim 13 , further comprising:
 directing the first radiation on the first waveguide to an interferometer; and   coupling a portion of the second radiation to the first radiation which exits the interferometer as at least one of the two measurement beams.

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