Variable seal pressure slit valve doors for semiconductor manufacturing equipment

Abstract

Techniques for a door system for sealing an opening between two chambers in a semiconductor processing system are described. A sealing member seals the opening when a door is in a closed position. To selectively open and close the opening, an actuator moves the door. A valve actuator switch provides a first or second pressure to the actuator depending on the pressure inside a first chamber. In one embodiment, a sensor monitors the pressure inside the first chamber.

1 . A door system for sealing an opening between two chambers in a semiconductor processing system, the door system comprising:
 a door;   a sealing member to seal the opening when the door is in a closed position;   an actuator to move the door to selectively open and close the opening;   a valve actuator switch configured to provide a first pressure and a second pressure to the actuator; and   wherein a pressure provided by the valve actuator to the actuator depends on a pressure inside a first chamber of the two chambers.   
     
     
         2 . The system of  claim 1  wherein the door is moveable generally parallel to a plane of the opening. 
     
     
         3 . The system of  claim 1  further comprising a sensor coupled to the valve actuator to measure the pressure inside the first chamber. 
     
     
         4 . The system of  claim 1  wherein the sealing member comprises an o-ring. 
     
     
         5 . The system of  claim 4  wherein the o-ring comprises a perfluoro elastomer. 
     
     
         6 . The system of  claim 4  wherein the o-ring is mounted along edges of the door. 
     
     
         7 . The system of  claim 1  wherein the first pressure is in a range of about 5 psi to about 20 psi. 
     
     
         8 . The system of  claim 7  wherein the first pressure is provided to the actuator when the pressure inside the first chamber is in the range of about 0.3 torr to about 10 torr. 
     
     
         9 . The system of  claim 7  wherein the second pressure is in the range of about 45 psi to about 90 psi. 
     
     
         10 . The system of  claim 9  wherein the second pressure is provided to the actuator when the pressure inside the first chamber is in the range of about 600 torr to about 760 torr. 
     
     
         11 . The system of  claim 1  wherein the door is a slit door. 
     
     
         12 . The system of  claim 1  wherein a pressure in a second chamber of the two chambers is in about the range of 0.3 torr to 10 torr.