Shield case and mems microphone having it

Abstract

To provide a shield case and an MEMS microphone having the shield case which can secure on a top plate the minimum distance for adhering with a gasket in a view point of airtightness. The shield case according to the invention is a shield case for shielding an MEMS chip mounted on a board from the outside, which includes a top plate and a plurality of side plates and the thickness of each of the plurality of side plates is larger than that of the top plate. According to this configuration, the area of the top plate can be made larger as compared with a conventional shield case having a uniform thickness. Thus, the area for adhering the gasket to the top plate can be secured without changing the position, size and range etc. of the chucking area from those of the conventional shield case.

1 - 6 . (canceled) 
     
     
         7 . A MEMS microphone, comprising:
 a board;   a MEMS chip mounted on the board; and   a shield case formed over the mounted MEMS chip, the shield case having atop plate and a side plate,   wherein a thickness of the side plate is larger than a thickness of the top plate, and an end portion of the side plate is attached on a surface of the board, said MEMS being mounted on said surface of the board.   
     
     
         8 . The MEMS microphone according to  claim 7 , wherein the end portion of the side plate has an R shaped portion disposed inside of the shield case. 
     
     
         9 . The MEMS microphone according to  claim 7 , wherein a bent portion formed by an end portion of the top plate and the other end portion or the side plate is formed to have a corner. 
     
     
         10 . The MEMS microphone according to  claim 8 , wherein a bent portion formed by an end portion of the top plate and the other end portion of the side plate is formed to have a corner. 
     
     
         11 . The MEMS microphone according to  claim 7 , wherein the end portion of the side plate is attached on the surface of the board by a solder. 
     
     
         12 . The MEMS microphone according to  claim 8 , wherein a solder is formed between the R shaped portion of the end portion of the side plate and the board. 
     
     
         13 . The MEMS microphone according to  claim 10 , wherein a solder s formed between the R shaped portion of the other end portion of the side plate and the board. 
     
     
         14 . The MEMS microphone according  claim 7 , wherein a thickness of the top plate is approximately 0.1 mm and a thickness of the side plate is approximately 0.25 mm. 
     
     
         15 . The MEMS microphone according to  claim 8 , wherein a thickness of the top plate is approximately 0.1 mm and a thickness of the side plate is approximately 0.25 mm. 
     
     
         16 . The MEMS microphone according to  claim 11 , wherein a thickness of the top plate is approximately 0.1 mm and a thickness of the side plate is approximately 0.25 mm. 
     
     
         17 . The MEMS microphone according to  claim 7 , wherein the shield case has a Ni plating. 
     
     
         18 . The MEMS microphone according to  claim 8 , wherein the shield case has a Ni plating. 
     
     
         19 . The MEMS microphoneaccording according to  claim 11  wherein shield case has a Ni plating. 
     
     
         20 . The MEMS microphone according to  claim 7 , wherein a size of a mounting surface of the board is 3×4 mm or less. 
     
     
         21 . The MEMS microphone according to  claim 8 , wherein a size of a mounting surface of the board is 3×4 mm or less. 
     
     
         22 . The MEMS microphone according  claim 11 , wherein a size of a mounting surface of the board is 3×4 mm or less. 
     
     
         23 . The MEMS microphone according to  claim 12 , wherein the top plate has a sound hole and a distance from the sound hole to an end portion of the top plate is 1 mm or more. 
     
     
         24 . The MEATS microphone according to  claim 7 , wherein the top plate and the side plate are single-piece and the top plate and the side plate comprise metal. 
     
     
         25 . The MEMS microphone according to  claim 8 , wherein the top plate and the side plate are single-piece and the top plate and the side plate comprise metal. 
     
     
         26 . The MEMS microphone according to  claim 11 , wherein the top plate and the side plate are single-piece and the top plate and the side plate comprise metal.