US2011111448A1PendingUtilityA1

Device comprising a field of tips used in biotechnology applications

Assignee: ST MICROELECTRONICS CROLLES 2Priority: Jul 5, 2005Filed: Jan 14, 2011Published: May 12, 2011
Est. expiryJul 5, 2025(expired)· nominal 20-yr term from priority
B81C 1/00111B81B 2201/0214B81B 2203/0361Y10S438/911
34
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Claims

Abstract

A method for manufacturing a device including a field of micrometric tips, including forming a polycrystalline layer on a support; performing an anisotropic plasma etching of all or part of the polycrystalline layer by using a gas mixture including chlorine and helium, whereby tips are formed at the surface of the polycrystalline layer.

Claims

exact text as granted — not AI-modified
1 - 8 . (canceled) 
     
     
         9 . A device comprising at least one field of micrometric tips formed at the surface of a polycrystalline block placed on a support, each tip field being covered with a conductive film extending in a conductive track placed at the surface of the support and extending to reach a contact terminal. 
     
     
         10 . The device of  claim 9 , comprising a multitude of tip fields formed on crystal blocks arranged in a matrix. 
     
     
         11 . The use of the device of  claim 9  to evaluate the activity of biological cells placed on the tip fields of the device, a measurement device being connected to the contact terminals. 
     
     
         12 . The device of  claim 9 , wherein the crystalline block is disposed on a support. 
     
     
         13 . A method for evaluating activity of at least one biological cell, the method comprising:
 providing a crystalline block having at least one micrometric tip coupled to a conductor;   placing the at least one cell on the at least one micrometric tip; and   connecting the conductor to a measurement device.   
     
     
         14 . A method for transferring material into at least one biological cell, the method comprising:
 providing a crystalline block having at least one micrometric tip;   coating the at least one micrometric tip with material; and   placing the at least one biological cell on the at least one micrometric tip such that the tip pierces a membrane of the at least one cell, thereby allowing the material to enter the cell.

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