Water jet type pump and method for operation thereof

Abstract

A water jet type pump is part of a system for generating an ultrahigh vacuum. The pump includes a pump chamber through which an ionic fluid flows at high velocity. The chamber has a first fluid feed for the fluid, the first feed ending in a nozzle with a nozzle opening, and a fluid discharge. A second feed of the pump chamber is connected to a high pressure chamber to be evacuated. Gas is suctioned out of the high vacuum chamber through the second feed by way of the flowing fluid jet, which is used to discharge the gas out of the pump chamber.

1 - 13 . (canceled) 
     
     
         14 . A water-jet pump to create a high vacuum, comprising:
 an ionic fluid circulation fluid, the ionic fluid circulation fluid containing at least one of sulfate ions, hydrogen sulfate ions, alkyl sulfate ions, thiocyanate ions, phosphate ions, borate ions, tetrakis hydrogen sulfate oborate ions, and silicate ions;   a chamber to communicate a through-flow of the circulation fluid;   a first feed to supply the circulation fluid to the chamber, the first feed projecting into the chamber and terminating in a nozzle orifice, the nozzle orifice having at least a tenfold reduction in diameter relative to an upstream portion of the first feed;   an outlet for the circulation fluid from the chamber, the outlet being positioned opposite to the nozzle orifice, in a flow direction;   a second feed, which leads into the chamber and is connected to a space which is to be evacuated;   a feed pump to deliver the circulation fluid into the first feed at a pre-specified velocity and/or at a pre-specified pressure;   a storage tank with a check valve to discharge gases; and   a closed fluid circuit to connect the feed pump to the first feed, to connect the outlet to the storage tank and to connect the storage tank to the feed pump.   
     
     
         15 . A water-jet pump to create a high vacuum, comprising:
 a chamber to communicate a fluid through-flow;   a first feed to supply the fluid, which first feed projects into the chamber and terminates in a nozzle orifice;   an outlet for the fluid from the chamber, the outlet being positioned opposite to the nozzle orifice, in a flow direction; and   a second feed, which leads into the chamber and is connectable to a space which is to be evacuated,   wherein the fluid is an ionic fluid.   
     
     
         16 . The pump as claimed in  claim 15 , further comprising means for delivering the ionic fluid into the first feed at a pre-specified velocity and/or at a pre-specified pressure. 
     
     
         17 . The pump as claimed in  claim 15 , further comprising a feed pump to deliver the ionic fluid into the first feed at a pre-specified velocity and/or at a pre-specified pressure. 
     
     
         18 . The pump as claimed in  claim 17 , further comprising:
 a storage tank with a check valve to discharge gases; and   a closed fluid circuit to connect the feed pump to the first feed, to connect the outlet to the storage tank and to connect the storage tank to the feed pump.   
     
     
         19 . The pump as claimed in  claim 15 , wherein the ionic fluid is a liquid or a liquid-gas mixture. 
     
     
         20 . The pump as claimed in  claim 19 , wherein
 the pump creates a vacuum pressure reduction in the space to be evacuated, and   the pressure reduction depends upon the vapor pressure of the ionic liquid.   
     
     
         21 . The pump as claimed in  claim 15 , wherein the ionic fluid contains at least one of sulfate ions, hydrogen sulfate ions, alkyl sulfate ions, thiocyanate ions, phosphate ions, borate ions, tetrakis hydrogen sulfate oborate ions, and silicate ions. 
     
     
         22 . The pump as claimed in  claim 15 , wherein
 the space to be evacuated is an ultra-high vacuum chamber, and   gas is exchanged between the pump and the ultra-high vacuum chamber via the second feed.   
     
     
         23 . The pump as claimed in  claim 22 , wherein
 the pump created a vacuum pressure reduction in the space to be evacuated, and   the vacuum pressure reduction reduces the pressure to a pressure range of 10 −7  to 10 −12  mbar.   
     
     
         24 . The pump as claimed in  claim 15 , wherein piping is used to form at least one of the first feed, the second feed and the fluid outlet. 
     
     
         25 . A method for evacuating a space, comprising:
 providing a pump comprising:
 a chamber to communicate a ionic fluid through-flow; 
 a first feed to supply the ionic fluid, which first feed projects into the chamber and terminates in a nozzle orifice; 
 an outlet for the ionic fluid from the chamber, the outlet being positioned opposite to the nozzle orifice, in a flow direction; and 
 a second feed, which leads into the chamber and is connectable to a space which is to be evacuated; 
   creating a jet of ionic fluid through the chamber of the pump;   drawing gas into the chamber with the jet of ionic fluid; and   discharging the gas from the chamber with the jet of ionic fluid.   
     
     
         26 . The method as claimed in  claim 25 , wherein creating a jet, drawing gas, and discharging the gas are carried out in sequence, are carried out continuously at the same time, or are carried out in pulses. 
     
     
         27 . The method as claimed in  claim 25 , wherein the jet of ionic fluid is created using the Venturi effect.