US2011108539A1PendingUtilityA1

Method and Device for Igniting an Arc

31
Assignee: GRABAU PATRICKPriority: Apr 8, 2008Filed: Apr 7, 2009Published: May 12, 2011
Est. expiryApr 8, 2028(~1.7 yrs left)· nominal 20-yr term from priority
Inventors:Patrick GrabauJulius RochVolkmar HopfeInes Dani
H05H 1/2406H05H 1/3421
31
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Claims

Abstract

A method and an apparatus relate to an ignition an arc between an anode and a cathode of a plasma source which can be used for a substrate surface modification at environmental atmosphere conditions. The cathode is arranged at a spacing from the anode. This method and the apparatus may reduce the effort for the ignition of an arc of a plasma source and to make the ignition process safer. The method is such that a barrier discharge is ignited with a supplied gas by means of two electrodes which are arranged parallel to the longitudinal axis between the anode and the cathode and are connected to a high-voltage generator and are supplied with a radio frequency electric AC voltage on the ignition. When an electric DC voltage is applied to the anode and to the cathode, an arc can thereby be ignited by means of the charge carriers present between the anode and the cathode due to the barrier discharge.

Claims

exact text as granted — not AI-modified
1 - 13 . (canceled) 
     
     
         14 . A method for igniting an arc between an anode and a cathode of a plasma source which can be used for a substrate surface modification at environmental atmosphere conditions, comprising:
 igniting a barrier discharge with a supplied gas arc by means of two electrodes, the electrodes being arranged parallel to a longitudinal axis between the anode and the cathode, the electrodes being connected to a high-voltage generator and supplied with a radio frequency electric AC voltage on ignition; and   igniting the arc with an electric DC voltage applied to the anode and the cathode by means of the charge carriers present between the anode and the cathode due to the barrier discharge.   
     
     
         15 . The method in accordance with  claim 14 , wherein the barrier discharge is ignited by an electric voltage of at least 1 kV and is maintained at least up to the ignition of the arc. 
     
     
         16 . The method in accordance with  claim 14 , wherein a frequency of at least 5 kHz is maintained for the barrier discharge. 
     
     
         17 . The method in accordance with  claim 14 , wherein an inert gas is used for the ignition of the arc. 
     
     
         18 . The method in accordance with  claim 14 , wherein the arc is ignited and maintained at an electric DC voltage of at least 100 V. 
     
     
         19 . The method in accordance with  claim 14 , wherein the arc is formed over a length of at least 150 mm between the anode and the cathode. 
     
     
         20 . The method in accordance with  claim 14 , wherein the barrier discharge is ignited over a length of at least 80% of the spacing between the anode and the cathode and is maintained at least up to the ignition of the arc. 
     
     
         21 . The method in accordance with  claim 14 , wherein the gas supply is carried out with a volume flow of at least 10 sl/min. 
     
     
         22 . An apparatus for igniting an arc between an anode and a cathode of a plasma source which can be used for a substrate surface modification at environmental atmosphere conditions, comprising:
 two electrodes arranged parallel to one another and to a longitudinal axis between the anode and the cathode, the electrodes being connected to a high-voltage generator and operated at an electric radio-frequency AC voltage so that excitement is provided by a gas supplied into the gap between the electrodes and the anode and cathode and a barrier discharge is formed.   
     
     
         23 . The apparatus in accordance with  claim 22 , wherein the electrodes are provided with a dielectric coating. 
     
     
         24 . The apparatus in accordance with  claim 22 , wherein the electrodes are made one of (a) in bar form and (b) in plate form. 
     
     
         25 . The apparatus in accordance with  claim 22 , wherein the electrodes have a length which amounts to at least 75% of the spacing between the anode and the cathode. 
     
     
         26 . The apparatus in accordance with  claim 22 , wherein the gap between the electrodes forms a discharge nozzle for plasma.

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