Heating apparatus for x-ray inspection

Abstract

In a heating apparatus for X-ray inspection which heats at least one surface of a sample ( 7 ) by convection to perform an X-ray inspection, a planar heater 1 formed of an X-ray transmitting material having an opening 1 b for passing gas is provided at a window part 22 for making an X-ray observation of the sample. Thereby, a board can be subjected to convection heating uniformly without enlarging or complicating the apparatus.

1 . A heating apparatus for X-ray inspection which heats at least one surface of a sample by convection to perform an X-ray inspection, comprising,
 a planar heater provided at a window part for making an X-ray observation of the sample,   the planer heater comprising a thin metal plate which can transmit X-rays having a shape of a spiral type, a zigzag type or a combination of the spiral type with the zigzag type or having holes and electric insulating plate integrated with the thin metal plate,   the integrated electric insulating plate and the thin metal plate has heated-air blowing holes at least a part thereof communicated with each other.   
     
     
         2 . (canceled) 
     
     
         3 . (canceled) 
     
     
         4 . (canceled) 
     
     
         5 . The heating apparatus for X-ray inspection according to  claim 1 , wherein
 the heated-air blowing hole formed at the electric insulating plate on the side of a sample is formed obliquely so as to generate a swirling flow.   
     
     
         6 . The heating apparatus for X-ray inspection according to  claim 1 , wherein
 the planar heaters are disposed so as to oppose both surfaces of the sample, thus making it possible to effect convection heating from the both surfaces of the sample.   
     
     
         7 . The heating apparatus for X-ray inspection according to  claim 1 , wherein
 a shielded heat isolation part formed of an X-ray transmitting material having a gas supplying port is disposed on the planar heater so as to be overlapped.   
     
     
         8 . The heating apparatus for X-ray inspection according to  claim 1 , wherein
 a heated-air blowing plate formed of an X-ray transmitting material having a heated-air blowing hole for smooth convection is disposed on the planar heater so as to be overlapped.   
     
     
         9 . The heating apparatus for X-ray inspection according to  claim 8 , wherein
 the heated-air blowing hole is provided obliquely.   
     
     
         10 . The heating apparatus for X-ray inspection according to  claim 7 , wherein
 the heating apparatus is disposed on rigid supporting bodies which oppose each other, the shielded heat isolation part and the planar heater are arranged on one of the window part and, of the shielded heat isolation part and the planar heater, at least the shielded heat isolation part is arranged on the other of the window part.   
     
     
         11 . The heating apparatus for X-ray inspection according to  claim 10 , wherein
 the heating apparatus is provided with a gas supplying pipe exclusively for cooling on the supporting bodies.   
     
     
         12 . The heating apparatus for X-ray inspection according to  claim 10 , wherein
 the heating apparatus is provided with an exhaust opening on the supporting bodies.   
     
     
         13 . The heating apparatus for X-ray inspection according to  claim 10 , wherein
 the heating apparatus is provided with a limit switch between rigid supporting bodies which oppose each other.   
     
     
         14 . The heating apparatus for X-ray inspection according to  claim 10 , wherein
 a pressure sensor is disposed on a gas supplying pipe connected to a gas supplying port of the shielded heat isolation part.   
     
     
         15 . The heating apparatus for X-ray inspection according to  claim 6 , wherein
 at least the shielded heat isolation part and the planar heater are made available as modules.   
     
     
         16 . The heating apparatus for X-ray inspection according to  claim 1 , wherein
 the heating apparatus is a reflow furnace.   
     
     
         17 . (canceled)