Probe Storage Container, Prober Apparatus, Probe Arranging Method and Manufacturing Method of Probe Storage Container

Abstract

An object of the present invention relates to an arrangement of a manufactured probe in a prober apparatus without being exposed to an atmospheric air. The present invention relates to a probe storage container which can supply a probe in a prober apparatus without being exposed to an atmospheric air. Preferably, the probe is stored in the probe storage container by removing an oxide film in a leading end portion of the probe in accordance with a dry treatment using an ion source or the like, without being exposed to the atmospheric air. In accordance with the present invention, it is possible to replace and attach the probe with respect to the prober apparatus without being exposed to the atmospheric air, and it is possible to avoid a formation of the oxide film on a surface of the probe. Further, a worker attaching the probe to the prober apparatus can work without being directly in contact with the probe, and it is possible to prevent the leading end portion of the probe from being broken. Accordingly, it is possible to stably measure an electric characteristic of a semiconductor device or the like on the wafer.

1 . A probe storage container storing a probe used in a prober apparatus, comprising:
 a probe holding portion for holding said probe at a predetermined position in an inner portion of said container;   a reference portion for positioning said container with respect to the prober apparatus; and   a lid portion capable of sealing an inner portion in which said probe is stored.   
     
     
         2 . A probe storage container as claimed in  claim 1 , wherein an oxide film is removed at least in a leading end portion of said probe. 
     
     
         3 . A probe storage container as claimed in  claim 1 , wherein the other portions of said probe than the portion in which the oxide film is removed are coated by a gold. 
     
     
         4 . A probe storage container as claimed in  claim 1 , wherein a leading end portion of said probe is made of a tungsten or a tungsten alloy. 
     
     
         5 . A probe storage container as claimed in  claim 1 , wherein the probe storage container is provided with an intake port for making an inner portion of the container in a vacuum state, and a valve for shutting off the inner portion of the container from an ambient air. 
     
     
         6 . A probe storage container as claimed in  claim 1 , wherein an inner portion of the container is filled with an inert gas. 
     
     
         7 . A probe storage container as claimed in  claim 1 , wherein an inner portion of the container is filled with a nitrogen gas. 
     
     
         8 . A prober apparatus comprising:
 a chamber in which a sample and a probe are arranged; and   a probe supply chamber provided with a door portion to the chamber,   wherein an inner side of said probe supply chamber comprises:   a holding mechanism for holding a probe storage container for storing a probe used for the prober apparatus at a predetermined position;   a container opening and closing mechanism capable of opening and closing a lid portion of the probe storage container;   a probe supply mechanism capable of arranging the probe in the probe storage container in the chamber; and   an exhausting mechanism capable of exhausting an inner portion of the probe supply chamber.   
     
     
         9 . A prober apparatus as claimed in  claim 8 , wherein an oxide film is removed at least in a leading end portion of said probe. 
     
     
         10 . A prober apparatus as claimed in  claim 8 , wherein the other portions of said probe than the portion in which the oxide film is removed are coated by a gold. 
     
     
         11 . A prober apparatus as claimed in  claim 8 , wherein a leading end portion of said probe is made of a tungsten or a tungsten alloy. 
     
     
         12 . A prober apparatus as claimed in  claim 8 , wherein the probe storage container is provided with an intake port for making an inner portion of the container in a vacuum state, and a valve for shutting off the inner portion of the container from an ambient air. 
     
     
         13 . A prober apparatus as claimed in  claim 8 , wherein an inner portion of the container is filled with an inert gas. 
     
     
         14 . A prober apparatus as claimed in  claim 8 , wherein an inner portion of the container is filled with a nitrogen gas. 
     
     
         15 . A probe arranging method of arranging a probe in a prober apparatus, comprising the steps of:
 holding a probe storage container for storing the probe at a predetermined position within a probe supply chamber of the prober apparatus;   exhausting an inner side of the probe supply chamber;   opening a lid portion of the probe storage container within the probe supply chamber; and   arranging the probe in the probe storage container in a chamber of the prober apparatus.   
     
     
         16 . A probe arranging method as claimed in  claim 15 , wherein an oxide film is removed at least in a leading end portion of said probe. 
     
     
         17 . A probe arranging method as claimed in  claim 15 , wherein the other portions of said probe than the portion in which the oxide film is removed are coated by a gold. 
     
     
         18 . A probe arranging method as claimed in  claim 15 , wherein a leading end portion of said probe is made of a tungsten or a tungsten alloy. 
     
     
         19 . A probe arranging method as claimed in  claim 15 , wherein the probe storage container is provided with an intake port for making an inner portion of the container in a vacuum state, and a valve for shutting off the inner portion of the container from an ambient air. 
     
     
         20 . A probe arranging method as claimed in  claim 15 , wherein an inner portion of the container is filled with an inert gas. 
     
     
         21 . A probe arranging method as claimed in  claim 15 , wherein an inner portion of the container is filled with a nitrogen gas.