Hydrophobic cutting tool and method for manufacturing the same

Abstract

A method of manufacturing a cutting tool is disclosed. An object of the manufacturing method of a cutting tool is to reduce contamination of an abrasive layer surface, particularly, agglomeration contamination due to slurry by improving hydrophobicity maintaining performance of an abrasive layer. A cutting tool according to the method of manufacturing comprises an abrasive layer on a base member, the abrasive layer having abrasives bonded to a surface thereof; and a coating on the surface of the abrasive layer that is a hydrophobic material film.

1 . A method of manufacturing a cutting tool, comprising the steps of:
 forming an abrasive layer on a base member, the abrasive layer having a plurality of abrasives bonded to a top surface of the abrasive layer; and   coating the top surface of the abrasive layer and the plurality of abrasives with a hydrophobic material film, the hydrophobic material film having a thickness smaller than a height of the plurality of abrasives.   
     
     
         2 . The method as claimed in  claim 1 , wherein in the coating step with the hydrophobic material film, the hydrophobic material film is a self assembled molecular monolayer in which a tail group of molecules is hydrophobic. 
     
     
         3 . The method as claimed in  claim 1 , wherein the coating step with the hydrophobic material film is performed using a deposition process. 
     
     
         4 . The method as claimed in  claim 1 , wherein the coating step with the hydrophobic material film is performed by forming a self assembled molecular monolayer on the surface of the abrasive layer using a deposition process, the self assembled molecular monolayer having a tail group of molecules that is hydrophobic. 
     
     
         5 . The method as claimed in  claim 4 , wherein a precursor used in the deposition process has molecules of which a tail group is one of a CF (fluorocarbon) group and a CHF (fluorohydrocarbon) group. 
     
     
         6 . The method as claimed in  claim 1 , wherein the step of forming the abrasive layer is performed using an Ni electrodeposition process. 
     
     
         7 . A cutting tool, comprising:
 a base member;   an abrasive layer formed on the base member, the abrasive layer having a plurality of abrasives bonded to a top surface of the abrasive layer; and   a hydrophobic material film formed on the top surface of the abrasive layer and the plurality of abrasives, the hydrophobic material film having a thickness smaller than a height of the plurality of abrasives.   
     
     
         8 . The cutting tool as claimed in  claim 7 , wherein the hydrophobic material film is a self assembled molecular monolayer in which a tail group of molecules is hydrophobic. 
     
     
         9 . The cutting tool as claimed in  claim 8 , wherein the self assembled molecular monolayer is formed by using trichlorosilane as a precursor. 
     
     
         10 . The cutting tool as claimed in  claim 7 , wherein the abrasive layer is an Ni electrodeposition layer to which the plurality of abrasives are bonded. 
     
     
         11 . The cutting tool as claimed in  claim 7 , wherein the cutting tool is a CMP conditioner.