Coated article with sputter-deposited transparent conductive coating capable of surviving harsh environments, and method of making the same

Abstract

Certain example embodiments relate to sputter-deposited transparent conductive coatings (TCCs) that are capable of surviving the harsh environments of ovens so that they can be included, for example, in oven door applications. In certain example embodiments, zirconium oxide (e.g., ZrO 2 or other suitable stoichiometry) may be used as a protective overcoat to protect an underlying Ag layer from corrosion in the atmosphere. In three lite oven door example embodiments, surface 1 has a TCC pyrolytically disposed thereon, surface 2 has a TCC sputter-deposited thereon and, optionally, surface 3 has a TCC sputter-deposited thereon. In two lite oven door example embodiments, surface 1 has a TCC pyrolytically disposed or sputter-deposited thereon, and surface 2 has a TCC sputter-deposited thereon.

1 . A method of making a door for an oven, the method comprising:
 providing an inner glass substrate and an outer glass substrate, the inner glass substrate being provided for an interior side of the door and the outer glass substrate being provided for an exterior side of the door;   disposing a first transparent conductive coating on a first surface of the inner glass substrate, the first surface being farthest from the outer glass substrate;   sputter-depositing a second transparent conductive coating on a second surface of the inner glass substrate, the second surface being closest to the outer glass substrate, wherein the second transparent conductive coating includes a zirconium oxide protective overcoat; and   thermally tempering the inner and outer glass substrates.   
     
     
         2 . The method of  claim 1 , wherein:
 the second transparent conductive coating comprises:
 a first barrier layer of silicon nitride provided on the second substrate, 
 a first nickel chromium inclusive contact layer provided on the first barrier layer, 
 a silver-inclusive conductive layer provided on the first contact layer, 
 a second nickel chromium inclusive contact layer provided on the conductive layer, and 
 a second barrier layer of silicon nitride provided on the second contact layer, and 
   the protective overcoat is provided on the second contact layer.   
     
     
         3 . The method of  claim 2 , wherein the first transparent conductive coating is disposed on the first surface of the inner glass substrate via pyrolysis. 
     
     
         4 . The method of  claim 3 , further comprising:
 providing a middle glass substrate located between the inner glass substrate and the outer glass substrate; and   thermally tempering the middle glass substrate.   
     
     
         5 . The method of  claim 4 , further comprising sputter-depositing a third transparent conductive coating on a third surface of the middle glass substrate, the third surface being farthest from the outer glass substrate,
 wherein the third transparent conductive coating includes a zirconium oxide protective overcoat.   
     
     
         6 . The method of  claim 5 , wherein:
 the third transparent conductive coating comprises:
 a first barrier layer of silicon nitride provided on the second substrate, 
 a first nickel chromium inclusive contact layer provided on the first barrier layer, 
 a silver-inclusive conductive layer provided on the first contact layer, 
 a second nickel chromium inclusive contact layer provided on the conductive layer, and 
 a second barrier layer of silicon nitride provided on the second contact layer, and 
   the protective overcoat is provided on the second contact layer.   
     
     
         7 . The method of  claim 6 , wherein each of the second and third transparent conductive coatings has a sheet resistance of 12-15 ohms/square. 
     
     
         8 . The method of  claim 3 , wherein the second transparent conductive coating has a sheet resistance of 4-8 ohms/square. 
     
     
         9 . The method of  claim 1 , wherein the first transparent conductive coating is disposed on the first surface of the inner glass substrate via sputtering, and
 wherein the first transparent conductive coating includes a zirconium oxide protective overcoat.   
     
     
         10 . The method of  claim 9 , wherein:
 the first transparent conductive coating comprises:
 a first barrier layer of silicon nitride provided on the second substrate, 
 a first nickel chromium inclusive contact layer provided on the first barrier layer, 
 a silver-inclusive conductive layer provided on the first contact layer, 
 a second nickel chromium inclusive contact layer provided on the conductive layer, and 
 a second barrier layer of silicon nitride provided on the second contact layer, and 
   the protective overcoat is provided on the second contact layer.   
     
     
         11 . The method of  claim 10 , wherein the first transparent conductive coating has a sheet resistance of 12-15 ohms/square, and
 wherein the second transparent conductive coating has a sheet resistance of 4-8 ohms/square.   
     
     
         12 . The method of  claim 1 , further comprising building at least the inner and outer glass substrates into an assembly in making the oven door. 
     
     
         13 . A method of making an oven, the method comprising:
 making an oven door according to the method of  claim 1 ; and   connecting the oven door to the oven.   
     
     
         14 . A method of making a coated article comprising a coating supported by a substrate, the method comprising:
 providing the substrate;   sputter-depositing a transparent conductive coating on the substrate, the transparent conductive coating comprising:
 a first barrier layer of silicon nitride provided on the substrate, 
 a first nickel chromium inclusive contact layer provided on the first barrier layer, 
 a silver-inclusive conductive layer provided on the first contact layer, 
 a second nickel chromium inclusive contact layer provided on the conductive layer, 
 a second barrier layer of silicon nitride provided on the second contact layer, and 
 a protective overcoat comprising zirconium oxide provided on the second barrier layer. 
   
     
     
         15 . The method of  claim 14 , further comprising tempering the substrate together with the transparent conductive coating. 
     
     
         16 - 25 . (canceled)