Methods for manufacturing chucking systems

Abstract

Methods for manufacturing chucking systems are described. Generally, a plurality of flow holes may be provided in an optical flat. A surface of the optical flat may be masked and patterned to provide a desired feature (e.g., pins or grooves). The surface may etched to produce the desired feature on the surface of the optical flat.

1 . A method for manufacturing a chuck, comprising:
 providing a plurality of flow holes in an optical flat;   masking and patterning a first surface of the optical flat to provide a desired feature; and,   etching the first surface of the optical flat to produce the desired feature.   
     
     
         2 . The method of  claim 1 , wherein the desired feature is a plurality of pins. 
     
     
         3 . The method of  claim 1 , wherein the desired feature is a plurality of grooves. 
     
     
         4 . The method of  claim 4 , wherein the grooves include a wall shape. 
     
     
         5 . The method of  claim 4 , wherein the grooves includes a smooth curved cross section. 
     
     
         6 . The method of  claim 4 , wherein a cross section of at least one groove is adjusted during etching of the first surface of the optical flat. 
     
     
         7 . The method of  claim 1 , further comprising providing vacuum flow to the desired feature. 
     
     
         8 . The method of  claim 7 , wherein the desired feature is a plurality of grooves and the vacuum flow is provided through fine vacuum channels across multiple grooves. 
     
     
         9 . The method of  claim 8 , wherein the multiple grooves are in parallel with respect to the first surface of the optical flat. 
     
     
         10 . The method of  claim 8 , further comprising etching the first surface to produce the fine vacuum channels. 
     
     
         11 . A method for manufacturing a chuck, comprising:
 providing a plurality of flow holes in an optical flat;   providing a pattern including a plurality of grooves for a first surface of the optical flat;   masking and patterning a first surface of the optical flat using the pattern; and,   etching the first surface of the optical flat to produce the plurality of grooves in the first surface of the optical flat.   
     
     
         12 . The method of  claim 11 , wherein each grooves includes a wall shape. 
     
     
         13 . The method of  claim 11 , wherein at least one groove includes a smooth curved cross section. 
     
     
         14 . The method of  claim 11 , wherein a cross section of at least one groove is adjusted during etching of the first surface of the optical flat. 
     
     
         15 . The method of  claim 11 , further comprising providing vacuum flow to the plurality of grooves. 
     
     
         16 . The method of  claim 15 , wherein vacuum flow is provided through fine vacuum channels across multiple grooves. 
     
     
         17 . The method of  claim 16 , wherein the multiple grooves are in parallel with respect to the first surface of the optical flat. 
     
     
         18 . The method of  claim 16 , further comprising etching the first surface to produce the fine vacuum channels. 
     
     
         19 . A method for manufacturing a chuck, comprising:
 providing a plurality of flow holes in an optical flat;   providing a pattern including a plurality of pins for a first surface of the optical flat;   masking and patterning a first surface of the optical flat using the pattern; and,   etching the first surface of the optical flat to produce the plurality of pins in the first surface of the optical flat.