Micro-reactor and method of manufacturing the same

Abstract

A structure of a microreactor includes a joined body having a pair of substrates joined together, a flow path formed by a microchannel portion formed on a joining surface of at least one of the substrates, and a catalyst carrying member disposed in the flow path. In the production of such a microreactor, the catalyst carrying member is produced separately from formation of the joined body and the catalyst carrying member is disposed in the flow path at the time of forming the joined body.

1 . A production method of a microreactor for producing hydrogen by reforming a feed material, characterized by comprising:
 a channel forming step of forming a microchannel portion on one surface of at least one of a pair of substrates for forming a joined body;   a catalyst applying step of forming a catalyst carrying member carrying a catalyst on the surface thereof; and   a joining step of disposing said catalyst carrying member in said microchannel portion and joining together said pair of substrates so as to confront each other, thereby forming the joined body having a flow path formed by said microchannel portion and having said catalyst carrying member in said flow path.   
     
     
         2 . A production method of a microreactor according to  claim 1 , wherein said catalyst applying step forms a metal oxide film on the surface of a metal base body and applies the catalyst on said metal oxide film, thereby forming said catalyst carrying member. 
     
     
         3 . A production method of a microreactor according to  claim 2 , wherein said metal oxide film is formed by anodic oxidation of said metal base body. 
     
     
         4 . A production method of a microreactor according to  claim 2 , wherein said metal oxide film is formed by a boehmite treatment. 
     
     
         5 . A production method of a microreactor according to  claim 1 , wherein said catalyst applying step covers an electric heater with a metal oxide film and applies the catalyst on said metal oxide film, thereby forming said catalyst carrying member. 
     
     
         6 . A production method of a microreactor according to  claim 5 , wherein said metal oxide film is formed by a boehmite treatment. 
     
     
         7 . A production method of a microreactor according to  claim 1 , wherein said catalyst applying step covers an electric heater with a metal film, further covers said metal film with a metal oxide film, and applies the catalyst on said metal oxide film, thereby forming said catalyst carrying member. 
     
     
         8 . A production method of a microreactor according to  claim 7 , wherein said metal oxide film is formed by anodic oxidation of said metal film. 
     
     
         9 . A production method of a microreactor according to  claim 7 , wherein said metal oxide film is formed by a boehmite treatment. 
     
     
         10 . A production method of a microreactor for producing hydrogen by reforming a feed material, characterized by comprising:
 a channel forming step of forming a plurality of microchannel portions on one surface of at least one of a pair of substrates for forming a joined body;   a catalyst applying step of forming catalyst carrying members each carrying a catalyst on the surface thereof;   a first joining step of disposing said catalyst carrying members in said microchannel portions and joining together said pair of substrates so as to confront each other, thereby forming the joined body having a plurality of flow paths formed by said plurality of microchannel portions, having said catalyst carrying member in each flow path, and having two end surfaces where both end opening portions of each flow path are exposed, respectively, and   a second joining step of joining terminating members comprising turnback flow paths to said two end surfaces where the opening portions of the flow paths of said joined body are exposed, thereby forming a single continuous flow path.   
     
     
         11 . A production method of a microreactor according to  claim 10  wherein said catalyst applying step forms a metal oxide film on the surface of a metal base body and applies the catalyst on said metal oxide film, thereby forming each catalyst carrying member. 
     
     
         12 . A production method of a microreactor according to  claim 11 , wherein said metal oxide film is formed by anodic oxidation of said metal base body. 
     
     
         13 . A production method of a microreactor according to  claim 11 , wherein said metal oxide film is formed by a boehmite treatment. 
     
     
         14 . A production method of a microreactor according to  claim 10 , wherein said catalyst applying step covers an electric heater with a metal oxide film and applies the catalyst on said metal oxide film, thereby forming each catalyst carrying member. 
     
     
         15 . A production method of a microreactor according to  claim 14 , wherein said metal oxide film is formed by a boehmite treatment. 
     
     
         16 . A production method of a microreactor according to  claim 10 , wherein said catalyst applying step covers an electric heater with a metal film, further covers said metal film with a metal oxide film, and applies the catalyst on said metal oxide film, thereby forming each catalyst carrying member. 
     
     
         17 . A production method of a microreactor according to  claim 16 , wherein said metal oxide film is formed by anodic oxidation of said metal film. 
     
     
         18 . A production method of a microreactor according to  claim 16 , wherein said metal oxide film is formed by a boehmite treatment.