Polishing apparatus, polishing auxiliary apparatus and polishing method

Abstract

A polishing apparatus, a polishing method and a polishing auxiliary apparatus which are able to suppress clogging of the rotating grindstone and polish the work while suppressing the damage thereof are provided. A polishing apparatus 1 according to the present invention includes: a rotating shaft section 5; a rotating table 6 which is arranged on the rotating shaft section 5 and holds a work 30 on an upper surface of the rotating table; a rotating grindstone 3 which is supported to be able to rotate in a direction opposite to the rotating direction of the rotating table 6 and to move up and down; a dress grindstone arranging section 10 arranged around the rotating shaft section 5; and a dress grindstone 11 which is fixed onto the dress grindstone arranging section 10 with a polishing surface thereof facing a polishing surface of the rotating grindstone 3, wherein the work is polished by bringing a surface of the rotating grindstone 3 into contact with a surface of the work 30 while rotating the rotating table 6 and the rotating grindstone 3 in directions opposite to each other, and the rotating grindstone 3 is dressed by bringing a polishing surface of the rotating grindstone 3 into contact with the polishing surface of the dress grindstone 11.

1 . A polishing apparatus, comprising:
 a rotating shaft section,   a rotating table which is arranged on the rotating shaft section and which holds a work on an upper surface of the rotating table,   a rotating grindstone which faces the upper surface of the rotating table and which is supported to be able to rotate in a direction opposite to the rotating direction of the rotating table and operated to move up and down,   a dress grindstone arranging section arranged around the rotating shaft section, and   a dress grindstone which is fixed onto the dress grindstone arranging section with a polishing surface thereof facing a polishing surface of the rotating grindstone,   wherein polishing waste material attached to the rotating grindstone is removed by bringing the polishing surface of the rotating grindstone into contact with the polishing surface of the dress grindstone, when the work is polished by bringing the polishing surface of the rotating grindstone into contact with a surface of the work while rotating the rotating table and the dress grindstone, and the rotating grindstone in directions opposite to each other.   
     
     
         2 . The polishing apparatus according to  claim 1 , wherein the dress grindstone is a ring-shaped dress grindstone which is arranged onto the dress grindstone arranging section. 
     
     
         3 . The polishing apparatus according to  claim 1 , wherein the dress grindstone is made up of a plurality of dress grindstone pieces which are annularly arranged side by side at a predetermined distance onto the dress grindstone arranging section. 
     
     
         4 . The polishing apparatus according to  claim 1 , wherein the dress grindstone arranging section includes a dress grindstone table which holds the dress grindstone and a dress grindstone table supporting section which supports the dress grindstone table so as to be able to move up and down. 
     
     
         5 . The polishing apparatus according to  claim 4 , wherein the dress grindstone table supporting section includes a spring which elastically supports the dress grindstone table. 
     
     
         6 . A polishing auxiliary apparatus, comprising:
 an annular dress grindstone arranging section and   a dress grindstone fixed onto the dress grindstone arranging section,   wherein the dress grindstone arranging section is configured to be able to be attached to a peripheral surface of the rotating shaft section of a polishing apparatus.   
     
     
         7 . The polishing auxiliary apparatus according to  claim 6 , wherein the dress grindstone is made up of a ring-shaped dress grindstone which is arranged onto the dress grindstone arranging section. 
     
     
         8 . The polishing auxiliary apparatus according to  claim 6 , wherein the dress grindstone is made up of a plurality of dress grindstone pieces which are annularly arranged side by side at a predetermined distance onto the dress grindstone arranging section. 
     
     
         9 . The polishing auxiliary apparatus according to  claim 6 , wherein the dress grindstone arranging section includes a dress grindstone table which holds the dress grindstone and a dress grindstone table supporting section which supports the dress grindstone table so as to be able to move up and down. 
     
     
         10 . The polishing auxiliary apparatus according to  claim 9 , wherein the dress grindstone table supporting section includes a spring which elastically supports the dress grindstone table. 
     
     
         11 . A polishing method, wherein a work is polished while polishing waste material attached to a rotating grindstone is removed by placing dress grindstones around a rotating table and bringing a polishing surface of the rotating grindstone into contact with a polishing surface of the dress grindstone, when polishing a work by bringing a polishing surface of the rotating grindstone into contact with a surface of the work while rotating the rotating table which holds the work and the grindstone in directions opposite to each other.