Gas injector and apparatus including the same

Abstract

A gas injector includes: a plate including at least one first injection hole; and at least one nozzle module combined with the plate, the at least one nozzle module including at least one second injection hole connected to the at least one first injection hole.

1 . A gas injector, comprising:
 a plate including an upper portion having a plurality of openings and a lower portion having a plurality of first injection holes corresponding to respective ones of the plurality of openings to inject a gas from a lower surface of the plate to a reaction space; and   a plurality of nozzle modules combined with corresponding ones of the plurality of openings, the plurality of nozzle modules including a plurality of second injection holes in communication with corresponding ones of the plurality of first injection holes corresponding to respective ones of the plurality of openings to form a gas path therethrough.   
     
     
         2 . The gas injector according to  claim 1 , further comprising a wall for defining the plurality of openings. 
     
     
         3 . The gas injector according to  claim 2 , wherein the wall is formed at the upper portion between the plurality of first injection holes. 
     
     
         4 . The gas injector according to  claim 2 , wherein the top flat surface of each of the plurality of nozzle modules is on substantially the same level with an adjacent portion of the wall. 
     
     
         5 . The gas injector according to  claim 1 , wherein the plurality of nozzle modules are attachable to and detachable from the plurality of openings. 
     
     
         6 . The gas injector according to  claim 1 , wherein the plurality of nozzle modules are inserted into the plurality of openings, respectively. 
     
     
         7 . The gas injector according to  claim 1 , wherein each of the plurality of nozzle modules has a tetragonal pillar shape or a square pillar shape. 
     
     
         8 . The gas injector according to  claim 1 , wherein each of the plurality of first injection holes has one of a cylindrical hollow shape and a tapering hollow shape. 
     
     
         9 . The gas injector according to  claim 1 , wherein each of the plurality of second injection holes includes a gas inlet portion, a nozzle portion and a diffusing portion having different diameters from one another. 
     
     
         10 . The gas injector according to  claim 1 , wherein each of the plurality of second injection holes has a minimum diameter within a range of about 0.1 mm to about 1 mm. 
     
     
         11 . The gas injector according to  claim 1 , wherein a diameter of each of the plurality of first injection holes is greater than a diameter of each of the plurality of second injection holes. 
     
     
         12 . The gas injector according to  claim 1 , further comprising an O-ring between each of the plurality of openings and each of the plurality of nozzle modules. 
     
     
         13 . An apparatus for a display device, comprising:
 a chamber;   a susceptor in the chamber; and   a gas injector over the susceptor, the gas injector comprising:   a plate including an upper portion having a plurality of openings and a lower portion having a plurality of first injection holes corresponding to respective ones of the plurality of openings to inject a gas from a lower surface of the plate to a reaction space; and   a plurality of nozzle modules combined with corresponding ones of the plurality of openings, the plurality of nozzle modules including a plurality of second injection holes in communication with corresponding ones of the plurality of first injection holes corresponding to respective ones of the plurality of openings to form a gas path therethrough.   
     
     
         14 . The apparatus according to  claim 13 , wherein a concentration of reaction gases in the chamber is locally controlled by varying a diameter and a direction of the plurality of second injection holes. 
     
     
         15 . A gas injector, comprising:
 a plate including an upper portion having a plurality of openings and a lower portion having a plurality of first injection holes corresponding to respective ones of the plurality of openings to inject a gas from a lower surface of the plate to a reaction space; and   a plurality of nozzle modules combined with the plurality of openings, each of the plurality of nozzle modules including at least one second injection hole connected to a corresponding one of the plurality of first injection holes to form a gas path therethrough.   
     
     
         16 . The gas injector according to  claim 15 , further comprising a wall for defining the plurality of openings. 
     
     
         17 . The gas injector according to  claim 16 , wherein the wall is formed at the upper portion between the plurality of first injection holes. 
     
     
         18 . The gas injector according to  claim 16 , wherein the top flat surface of each of the plurality of nozzle modules is on substantially the same level with an adjacent portion of the wall. 
     
     
         19 . The gas injector according to  claim 15 , wherein the plurality of nozzle modules are attachable to and detachable from each of the plurality of openings. 
     
     
         20 . The gas injector according to  claim 15 , wherein the plurality of nozzle modules are inserted into each of the plurality of openings. 
     
     
         21 . The gas injector according to  claim 15 , wherein the top flat surface of one of the plurality of nozzle modules is on substantially the same level with a region of the upper portion of the plate. 
     
     
         22 . The gas injector according to  claim 15 , wherein the number of the plurality of first injection holes corresponding to each of the plurality of openings and the number of plurality of nozzle modules combined with each of the plurality of openings are the same. 
     
     
         23 . An apparatus for a display device, comprising:
 a chamber;   a susceptor in the chamber; and   a gas injector over the susceptor, the gas injector comprising:   a plate including an upper portion having a plurality of openings and a lower portion having a plurality of first injection holes corresponding to respective ones of the plurality of openings to inject a gas from a lower surface of the plate to a reaction space; and   a plurality of nozzle modules combined with the plurality of openings, each of the plurality of nozzle modules including at least one second injection hole connected to a corresponding one of the plurality of first injection holes to form a gas path therethrough.