Method for manufacturing substrate for mass spectrometry

Abstract

A substrate for mass spectrometry for effectively performing ionization has been demanded. The substrate for mass spectrometry includes a base, a porous film formed on the base, and an inorganic material film formed on the porous film. The inorganic material film has a plurality of concaves formed vertically to the base, and the diameter of the concaves is not less than 1 nm and less than 1 μm.

1 . A method for manufacturing a substrate for mass spectrometry, which comprising the steps of:
 forming a porous film on a base;   forming an inorganic material film on the porous film; and   forming, on the surface of the inorganic material film, a plurality of concaves having a diameter of not less than 1 nm and less than 1 μm vertically to the base.   
     
     
         2 . The method for manufacturing a substrate for mass spectrometry according to  claim 1 , further comprising a step of forming, on a surface of the inorganic material film, a substance different from the substance comprising the inorganic material film. 
     
     
         3 . The method for manufacturing a substrate for mass spectrometry according to  claim 1 , wherein the step of forming the concaves comprises the steps of:
 forming a film of a block copolymer on the surface of the inorganic material film;   developing a microphase separation structure in the block copolymer; selectively removing one of the components of the block copolymer which has the microphase separation structure; and   etching off the inorganic material film by using the component of the block copolymer remaining on the inorganic material film as a mask.   
     
     
         4 . A method for manufacturing a substrate for mass spectrometry, comprising the steps of:
 forming a porous film on a base; forming an inorganic material film on the porous film; and   forming a plurality of convexes having a diameter of not less than 1 nm and less than 1 μm vertically to the base.   
     
     
         5 . The method for manufacturing a substrate for mass spectrometry according to  claim 4 , wherein the step of forming the convexes comprises the steps of:
 forming a thin film of a block copolymer on the surface of the inorganic material film;   developing a microphase separation structure in the block copolymer;   selectively removing one of the components of the block copolymer from the block copolymer which has the microphase separation structure; and   etching off the inorganic material film by using the component of the block copolymer remaining on the inorganic material film as a mask.