Cleaning sheet, conveying member using the same, and substrate processing equipment cleaning method using them

Abstract

A cleaning sheet for cleaning foreign matters away from the interior of the substrate processing equipment is provided. The cleaning sheet includes a cleaning layer having substantially no tackiness and having a tensile modulus of not lower than 0.98 N/mm 2 as determined according to JIS K7127. Alternatively, the cleaning sheet includes a cleaning layer having a Vickers hardness of not lower than 10 MPa.

1 . A cleaning sheet comprising a cleaning layer having substantially no tackiness and having a tensile modulus of not lower than 0.98 N/mm 2  as determined according to JIS K7127. 
     
     
         2 . A cleaning sheet according to  claim 1 , further comprising a base material for supporting said cleaning layer. 
     
     
         3 . A cleaning sheet according to  claim 1 , further comprising: a base material for supporting a cleaning layer on one side thereof; and an ordinary adhesive layer provided on the other side of said base material. 
     
     
         4 . A cleaning sheet according to  claim 1 , wherein said cleaning layer exhibits a 180° peel adhesion of not higher than 0.20 N/10 mm with respect to a mirror surface of silicon wafer. 
     
     
         5 . A cleaning sheet according to  claim 1 , wherein said cleaning layer has substantially no tackiness and substantially no electrical conductivity. 
     
     
         6 . A cleaning sheet according to  claim 5 , wherein said cleaning layer having substantially no tackiness and substantially no electrical conductivity is made of a plastic material or film. 
     
     
         7 . A cleaning sheet according to  claim 1 , wherein said cleaning layer exhibits a surface free energy of less than 30 mJ/m 2 . 
     
     
         8 . A cleaning sheet according to  claim 7 , wherein said cleaning layer exhibits a contact angle of greater than 90 degrees with respect to water. 
     
     
         9 . A cleaning sheet comprising a cleaning layer having a Vickers hardness of not lower than 10 MPa. 
     
     
         10 . A cleaning sheet according to  claim 9 , further comprising a base material for supporting said cleaning layer. 
     
     
         11 . A cleaning sheet according to  claim 9 , further comprising: a base material for supporting a cleaning layer on one side thereof; and an ordinary adhesive layer provided on the other side of said base material. 
     
     
         12 . A cleaning sheet according to  claim 1 , wherein said cleaning layer comprises an adhesive layer and has been cured by an active energy. 
     
     
         13 . A cleaning sheet according to  claim 12 , wherein said cleaning layer is obtained by subjecting a pressure-sensitive adhesive polymer containing at least a compound having one or more unsaturated double bonds per molecule and a polymerization initiator to polymerization curing reaction with an active energy so that the tackiness thereof substantially disappears. 
     
     
         14 . A cleaning sheet according to  claim 13 , wherein said active energy is ultraviolet light. 
     
     
         15 . A conveying member with a cleaning function comprising a cleaning sheet according to  claim 3  provided thereon with said ordinary adhesive layer. 
     
     
         16 - 19 . (canceled) 
     
     
         20 . A cleaning sheet according to  claim 1 , wherein said cleaning layer exhibits a friction coefficient of not lower than 1.0. 
     
     
         21 . A cleaning sheet according to  claim 48 , wherein said cleaning layer has substantially no tackiness and a tensile modulus of not higher than 2,000 N/mm 2  as determined according to JIS K7127. 
     
     
         22 - 47 . (canceled) 
     
     
         48 . A conveying member with a cleaning function comprising a cleaning sheet according to  claim 11  provided thereon with said ordinary adhesive layer. 
     
     
         49 . A cleaning sheet according to  claim 9 , wherein said cleaning layer comprises an adhesive layer and has been cured by an active energy.