Electronic device manufacturing chamber and methods of forming the same

Abstract

A non-polygon shaped, multi-piece chamber is provided. A non-polygon shaped, multi-piece chamber may include (1) a central piece having a first side and a second side, (2) a first side piece adapted to couple with the first side of the central piece, and (3) a second side piece adapted to couple with the second side of the central piece. The central piece, the first side piece, and the second side piece form a cylindrical overall shape when coupled together. Numerous other aspects are provided.

1 . An apparatus comprising:
 a plurality of chamber pieces adapted to fit together to form a non-polygon shaped electronic device manufacturing chamber,   wherein the chamber pieces individually have dimensions that comply with at least one of ground and air transportation regulations; and   wherein an overall dimension of the non-polygon shaped electronic device manufacturing chamber does not comply with at least one of ground and air transportation regulations.   
     
     
         2 . The apparatus of  claim 1  wherein the chamber pieces each include at least one curved side. 
     
     
         3 . The apparatus of  claim 2  wherein at least one of the chamber pieces includes at least two curved sides and two straight sides. 
     
     
         4 . The apparatus of  claim 2  wherein at least two of the chamber pieces each include at least one curved side and one straight side. 
     
     
         5 . The apparatus of  claim 4  wherein the chamber pieces are adapted to fit together along the straight sides. 
     
     
         6 . The apparatus of  claim 2  wherein the curved sides each include at least one opening, each opening being both sized to allow a substrate to pass therethrough and adapted to be coupled to a second chamber. 
     
     
         7 . The apparatus of  claim 2  wherein the plurality of chamber pieces include at least one chamber piece having at least one facet in at least one of the curved sides, and
 wherein the at least one facet is adapted to be coupled to a second chamber and includes at least one opening.   
     
     
         8 . The apparatus of  claim 7  wherein the at least one facet is recessed in the curved side. 
     
     
         9 . The apparatus of  claim 8  wherein the at least one facet includes a plurality of openings. 
     
     
         10 . The apparatus of  claim 7  wherein the at least one facet is adapted to extend out of the curved side. 
     
     
         11 . The apparatus of  claim 10  wherein the at least one facet includes a plurality of openings. 
     
     
         12 . An apparatus comprising:
 a first chamber piece having a lateral cross-sectional shape of a portion of an ellipse cut by two cords such that the shape includes two curve segments, a first line segment, and a second line segment;   a second chamber piece having a lateral cross-sectional shape of a portion of an ellipse cut by a cord such that the shape includes a curve segment and a third line segment; and   a third chamber piece having a lateral cross-sectional shape of a portion of an ellipse cut by a cord such that the shape includes a curve segment and a fourth line segment,   wherein the chamber pieces are adapted to fit together to form a shape of an elliptical cylinder.   
     
     
         13 . The apparatus of  claim 10  wherein the two cords forming the lateral cross-sectional shape of the first chamber piece are parallel. 
     
     
         14 . The apparatus of  claim 10  wherein the first chamber piece is adapted to be coupled to the second chamber piece along the first line segment, and
 wherein the first chamber piece is adapted to be coupled to the third chamber piece along the second line segment.   
     
     
         15 . The apparatus of  claim 12  wherein the chamber pieces are adapted to fit together to form a chamber having circular cylinder shape. 
     
     
         16 . An apparatus comprising:
 a first chamber piece;   a second chamber piece adapted to be coupled to the first chamber piece; and   a third chamber piece adapted to be coupled to the first chamber piece,   wherein the first chamber piece includes a top having a shape formed from two curve segments, a first line segment, and a second line segment,   wherein the second chamber piece includes a top having a shape formed from one curve segment and one line segment,   wherein the third chamber piece includes a top having a shape formed from one curve segment and one line segment,   wherein the first line segment of the first chamber piece is approximately equal in length to the line segment of the second chamber piece, the second line segment of the first chamber piece is approximately equal in length to the line segment of the third chamber piece, and   wherein the two curve segments of the first chamber piece, the curve segment of the second chamber piece, and the curve segment of the third chamber piece form an ellipse when the second and third chamber pieces are coupled to the first chamber piece.   
     
     
         17 . The apparatus of  claim 16  wherein the ellipse formed by the curve segments of the chamber pieces is a circle. 
     
     
         18 . The apparatus of  claim 16  wherein the second chamber piece is adapted to be coupled to the first chamber piece along the line segment of the second chamber piece and the first line segment of the first chamber piece. 
     
     
         19 . The apparatus of  claim 16  wherein the first line segment of the first chamber piece and the second line segment of the first chamber piece are approximately equal in length. 
     
     
         20 . The apparatus of  claim 16  wherein the first line segment of the first chamber piece and the second line segment of the first chamber piece are of different lengths. 
     
     
         21 . The apparatus of  claim 16  wherein the chamber pieces each include at least one curved sidewall and at least one facet in the curved sidewall,
 wherein at least one facet is adapted to be coupled to a load lock, and   wherein at least one facet includes one or more openings adapted to pass a substrate.   
     
     
         22 . The apparatus of  claim 21  wherein at least one facet is recessed into a curved sidewall. 
     
     
         23 . The apparatus of  claim 21  wherein at least one facet extends out from a curved sidewall.