Gas supply structure

Abstract

A gas supply structure includes a nozzle having a gas supply passage, and a receptacle having an insertion hole into which the nozzle is inserted to achieve connection, wherein the receptacle is provided with a first O-ring that is provided in the vicinity of the insertion hole for the purpose of gas sealing, and a second O-ring that is provided further downstream the gas supply path than the first O-ring for the purpose of gas sealing, a portion of the second O-ring is bonded to a recessed section in the receptacle using a bonding material, and a foreign matter removal member is positioned closer to the insertion hole than the second O-ring. The foreign matter removal member is provided within the receptacle so as to partially protrude from an inner peripheral surface that extends from the insertion hole of the receptacle.

1 . A gas supply structure, comprising
 a nozzle that supplies a gas,   a receptacle that receives supply of the gas by insertion of the nozzle therein,   an O-ring that is provided within the receptacle, seals the nozzle and the receptacle, and slides against the nozzle during insertion of the nozzle, and   a foreign matter removal member that is provided within the receptacle in a position closer to an insertion hole for the nozzle than the O-ring,   the gas supply structure further comprising an insertion hole-side O-ring that is provided in the receptacle in a vicinity of an insertion hole.   
     
     
         2 . A gas supply structure, comprising
 a nozzle that supplies a gas,   a receptacle that receives supply of the gas by insertion of the nozzle therein,   an O-ring that is provided on the nozzle, seals the nozzle and the receptacle, and slides against the receptacle during insertion of the nozzle, and   a foreign matter removal member that is provided on the nozzle in a position closer to a tip of the nozzle than the O-ring.   
     
     
         3 . A gas supply structure, comprising
 a receptacle that receives supply of a gas by insertion of a nozzle therein,   an O-ring that is provided within the receptacle, seals the nozzle and the receptacle, and slides against the nozzle during insertion of the nozzle, and   a foreign matter removal member that is provided within the receptacle in a position closer to an insertion hole for the nozzle than the O-ring,   the gas supply structure further comprising an insertion hole-side O-ring that is provided in the receptacle in a vicinity of an insertion hole.   
     
     
         4 . A gas supply structure, comprising
 a receptacle that receives supply of a gas by insertion of a nozzle therein,   an O-ring that is provided on the nozzle, seals the nozzle and the receptacle, and slides against the receptacle during insertion of the nozzle, and   a foreign matter removal member that is provided on the nozzle in a position closer to a tip of the nozzle than the O-ring.   
     
     
         5 . (canceled) 
     
     
         6 . The gas supply structure according to  claim 2 , further comprising
 an insertion hole-side O-ring that is provided in the receptacle in a vicinity of an insertion hole.   
     
     
         7 . (canceled) 
     
     
         8 . The gas supply structure according to  claim 4 , further comprising
 an insertion hole-side O-ring that is provided in the receptacle in a vicinity of an insertion hole.   
     
     
         9 . The gas supply structure according to  claim 1 , further comprising
 a tank for storing the gas,   a filter having a small loss coefficient disposed in an upstream side of a gas passage connecting the receptacle to the tank, and   a filter having a large loss coefficient disposed in a downstream side of the gas passage.   
     
     
         10 . The gas supply structure according to  claim 2 , further comprising
 a tank for storing the gas,   a filter having a small loss coefficient disposed in an upstream side of a gas passage connecting the receptacle to the tank, and   a filter having a large loss coefficient disposed in a downstream side of the gas passage.   
     
     
         11 . The gas supply structure according to  claim 3 , further comprising
 a tank for storing the gas,   a filter having a small loss coefficient disposed in an upstream side of a gas passage connecting the receptacle to the tank, and   a filter having a large loss coefficient disposed in a downstream side of the gas passage.   
     
     
         12 . The gas supply structure according to  claim 4 , further comprising
 a tank for storing the gas,   a filter having a small loss coefficient disposed in an upstream side of a gas passage connecting the receptacle to the tank, and   a filter having a large loss coefficient disposed in a downstream side of the gas passage.   
     
     
         13 . The gas supply structure according to  claim 1 , wherein
 the foreign matter removal member has a sliding resistance, determined based on a pull-out load measurement, that is not less than 300 N and not more than 500 N.   
     
     
         14 . The gas supply structure according to  claim 2 , wherein
 the foreign matter removal member has a sliding resistance, determined based on a pull-out load measurement, that is not less than 300 N and not more than 500 N.   
     
     
         15 . The gas supply structure according to  claim 3 , wherein
 the foreign matter removal member has a sliding resistance, determined based on a pull-out load measurement, that is not less than 300 N and not more than 500 N.   
     
     
         16 . The gas supply structure according to  claim 4 , wherein
 the foreign matter removal member has a sliding resistance, determined based on a pull-out load measurement, that is not less than 300 N and not more than 500 N.