US2010264948A1PendingUtilityA1

Differential signal probing system

Assignee: CASCADE MICROTECH INCPriority: Jun 12, 2006Filed: Jun 16, 2010Published: Oct 21, 2010
Est. expiryJun 12, 2026(expired)· nominal 20-yr term from priority
G01R 1/06772
48
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Claims

Abstract

A probe measurement system comprises a probe with a linear array of probe tips enabling a single probe to be used when probing a test structure with a differential signal

Claims

exact text as granted — not AI-modified
1 . A probe for testing a differential test structure having a plurality of probe pads, said probe comprising:
 (a) a first probe tip operable to conduct a first mode component of a first differential signal;   (b) a second probe tip proximate said first probe tip and operable to conduct a first mode component of a second differential signal;   (c) a third probe tip proximate said second probe tip;   (d) a fourth probe tip proximate said third probe tip and operable to conduct a second mode component of said second differential signal together with conduction of said first mode component of said first differential signal by said first probe tip; and   (e) a fifth probe tip proximate said fourth probe tip and operable to conduct a second mode component of said first differential signal together with conduction of said first mode component of said second differential signal by said second probe tip; said first, said second, said fourth and said fifth probe tips being arranged in a substantially linear array and, with said third probe tip, co-locatable with respective probe pads of said test structure.   
     
     
         2 . The probe of  claim 1  wherein a source of said first differential signal comprises said respective probe pads of said test structure co-locatable with said first and said fifth probe tips. 
     
     
         3 . The probe of  claim 1  wherein a source of said second differential signal comprises said respective probe pads of said test structure co-locatable with said second and said fourth probe tips. 
     
     
         4 . The probe of  claim 1  wherein said third probe tip is interconnected to a source of a direct current. 
     
     
         5 . The probe of  claim 1  wherein said third probe tip is aligned substantially linearly with said linear array of said first, said second, said fourth and said fifth probe tips. 
     
     
         6 . The probe of  claim 5  further comprising:
 (a) a sixth probe tip proximate said first probe tip; and   (b) a seventh probe tip proximate said fifth probe tip; said sixth and said seventh probe tips being arrayed substantially linearly with said first, said second, said third, said fourth and said fifth probe tips; interconnected to said third probe tip and co-locatable with respective probe pads of said test structure.   
     
     
         7 . The probe of  claim 6  wherein said third probe tip is interconnected to a source of a direct current. 
     
     
         8 . A probe for testing a differential test structure having a plurality of probe pads, said probe comprising:
 (a) a dielectric plate having a substantially planar first surface and a second surface;   (b) a first probe tip projecting from said first surface and operable to conduct a first mode component of a first differential signal;   (c) a second probe tip projecting from said first surface proximate said first probe tip and operable to conduct a first mode component of a second differential signal;   (d) a third probe tip projecting from said first surface proximate said second probe tip;   (e) a fourth probe tip projecting from said first surface proximate said third probe tip and operable to conduct a second mode component of said second differential signal together with conduction of said first mode component of said first differential signal by said first probe tip; and   (f) a fifth probe tip projecting from said first surface proximate said fourth probe tip and operable to conduct a second mode component of said first differential signal together with conduction of said first mode component of said second differential signal by said second probe tip; said first, said second, said fourth and said fifth probe tips being arranged in a substantially linear array and co-locatable with respective probe pads of said test structure.   
     
     
         9 . The probe of  claim 8  wherein a source of said first differential signal comprises said respective probe pads of said test structure co-locatable with said first and said fifth probe tips. 
     
     
         10 . The probe of  claim 8  wherein a source of said second differential signal comprises said respective probe pads of said test structure co-locatable with said second and said fourth probe tips. 
     
     
         11 . The probe of  claim 8  wherein said third probe tip is interconnected to a source of a direct current. 
     
     
         12 . The probe of  claim 8  wherein said third probe tip is aligned substantially linearly with said linear array of said first, said second, said fourth and said fifth probe tips. 
     
     
         13 . The probe of  claim 12  further comprising:
 (a) a sixth probe tip proximate said first probe tip; and   (b) a seventh probe tip proximate said fifth probe tip; said sixth and said seventh probe tips being arrayed substantially linearly with said first, said second, said third, said fourth and said fifth probe tips; interconnected to said third probe tip and co-locatable with respective probe pads of said test structure.   
     
     
         14 . The probe of  claim 8  further comprising:
 (a) a first conductor overlaying an area of said first surface and electrically interconnected with said third probe tip;   (b) a second conductor extending from said first surface to said second surface of said dielectric plate and electrically interconnected with said first conductor; and   (c) a conductor of direct current electrically interconnected with said second conductor.   
     
     
         15 . The probe of  claim 14  further comprising:
 (a) a sixth probe tip projecting from said first surface proximate said first probe tip; and   (b) a seventh probe tip projecting from said first surface proximate said fifth probe tip, said sixth and said seventh probe tips being electrically interconnected with said first conductor and arrayed substantially linearly with said first, said second, said third, said fourth and said fifth probe tips and respectively co-locatable with probe pads of said test structure.   
     
     
         16 . The probe of  claim 8  further comprising:
 (a) a first conductor overlaying an area of said second surface; and   (b) a second conductor extending from said second surface of said dielectric plate and electrically interconnecting said first conductor with a ground potential.   
     
     
         17 . The probe of  claim 8  wherein said dielectric plate is rigid. 
     
     
         18 . The probe of  claim 8  wherein said dielectric plate is flexible.

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