US2010233429A1PendingUtilityA1

Substrate for Biochip, Biochip, Method for Manufacturing Substrate for Biochip and Method for Manufacturing Biochip

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Assignee: YAMATAKE CORPPriority: Sep 16, 2005Filed: Sep 6, 2006Published: Sep 16, 2010
Est. expirySep 16, 2025(expired)· nominal 20-yr term from priority
Inventors:Yasuhiro GoshooTakaaki KuroiwaNaohiro IshikawaDaisuke ObaraShinsuke YamasakiKazuko SasakiYasuko Horiguchi
B01J 19/0046G01N 33/54393B01L 2300/0636Y10T428/24331Y10T428/31525G01N 33/54353B01L 3/5025Y10T428/31529B01J 2219/00675B01J 2219/00729B01J 2219/00626
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Claims

Abstract

A base plate having a surface on which a plurality of hydroxyl groups can be introduced, a metallic membrane disposed on the base plate and having a plurality of wells reaching the base plate, and a crosslinkable polymer membrane disposed on the metallic membrane are included.

Claims

exact text as granted — not AI-modified
1 . A substrate for a biochip comprising:
 a base plate having a surface on which a plurality of hydroxyl groups can be introduced;   a metallic membrane disposed on the base plate and having a plurality of wells reaching the base plate; and   a crosslinkable polymer membrane disposed on the metallic membrane.   
   
   
       2 . The substrate for the biochip of  claim 1 , wherein the base plate is composed of a silicon oxide. 
   
   
       3 . The substrate for the biochip of  claim 1 , wherein the metallic membrane is composed of a Titan. 
   
   
       4 . The substrate for the biochip of  claim 1 , wherein the metallic membrane is composed of a transition metallic oxide. 
   
   
       5 . The substrate for the biochip of  claim 1 , wherein the metallic membrane is composed of a transition metal nitride. 
   
   
       6 . The substrate for the biochip of  claim 1 , wherein the metallic membrane is composed of a transition metal carbide. 
   
   
       7 . The substrate for the biochip of  claim 1 , wherein the polymer membrane is insoluble in an acid solution. 
   
   
       8 . The substrate for the biochip of  claim 1 , wherein the polymer membrane has a photosensitivity. 
   
   
       9 . The substrate for the biochip of  claim 1 , wherein the polymer membrane is composed of an epoxy resin. 
   
   
       10 . The substrate for the biochip of  claim 1 , wherein the polymer membrane is composed of SU8. 
   
   
       11 . A biochip comprising:
 a base plate;   a metallic membrane disposed on the base plate and having a plurality of wells reaching the base plate; and   a plurality of probe biomolecules bonded on a surface of the base plate exposed from the plurality of wells.   
   
   
       12 . The biochip of  claim 11 , wherein the base plate is composed of a silicon oxide. 
   
   
       13 . The biochip of  claim 11 , wherein the metallic membrane is composed of a Titan. 
   
   
       14 . The biochip of  claim 12 , wherein the metallic membrane is composed of a transition metallic oxide. 
   
   
       15 . The biochip of  claim 12 , wherein the metallic membrane is composed of a transition metal nitride. 
   
   
       16 . The biochip of  claim 11 , wherein the metallic membrane is composed of a transition metal carbide. 
   
   
       17 . The biochip of  claim 16 , wherein the plurality of probe biomolecules are bonded to the surface via a plurality of hydroxyl groups introduced on the surface. 
   
   
       18 . A method for manufacturing a substrate for a biochip including:
 a step for preparing a base plate having a surface on which a plurality of hydroxyl groups can be introduced;   a step for forming a metallic membrane on the base plate;   a step for forming a crosslinkable polymer membrane on the metallic membrane;   a step for selectively removing portions of the polymer membrane; and   a step for delineating a plurality of wells reaching the base plate in the metallic membrane, by using the polymer membrane of which the portions were selectively removed as an etching mask.   
   
   
       19 . The method for manufacturing the substrate for the biochip of  claim 18 , wherein the metallic membrane is composed of a Titan. 
   
   
       20 . The method for manufacturing the substrate for the biochip of  claim 18 , wherein the metallic membrane is composed of a transition metallic oxide. 
   
   
       21 . The method for manufacturing the substrate for the biochip of  claim 18 , wherein the metallic membrane is composed of a transition metal nitride. 
   
   
       22 . The method for manufacturing the substrate for the biochip of  claim 18 , wherein the metallic membrane is composed of a transition metal carbide. 
   
   
       23 . The method for manufacturing the substrate for the biochip of  claim 22 , wherein the polymer membrane is composed of an epoxy resin. 
   
   
       24 . The method for manufacturing the substrate for the biochip of  claim 18 , wherein the polymer membrane is composed of SU8. 
   
   
       25 . A method for manufacturing a biochip including:
 a step for preparing a base plate;   a step for forming a metallic membrane on the base plate;   a step for forming a crosslinkable polymer membrane on the metallic membrane;   a step for selectively removing portions of the polymer membrane;   a step for delineating a plurality of wells reaching the base plate in the metallic membrane, by using the polymer membrane of which the portions were selectively removed as an etching mask;   a step for introducing a plurality of hydroxyl groups on a surface of the base plate exposed from the plurality of wells;   a step for bonding a plurality of probe biomolecules to the plurality of hydroxyl groups, respectively; and   a step for soaking the metallic membrane and the polymer membrane in an alkaline solution to peel off the polymer membrane from the metallic membrane.   
   
   
       26 . A method for manufacturing a biochip including:
 a step for preparing a substrate for the biochip comprising a base plate, a metallic membrane disposed on the base plate and having a plurality of wells reaching the base plate, a crosslinkable polymer membrane disposed on the metallic membrane, and a plurality of hydroxyl groups introduced on a surface of the base plate exposed from the plurality of wells;   a step for bonding a plurality of probe biomolecules to the plurality of hydroxyl groups, respectively; and   a step for soaking the metallic membrane and the polymer membrane in an alkaline solution to peel off the polymer membrane from the metallic membrane.   
   
   
       27 . The method for manufacturing the biochip of  claim 25 , wherein the base plate is composed of a silicon oxide. 
   
   
       28 . The method for manufacturing the biochip of  claim 26 , wherein the metallic membrane is composed of a Titan. 
   
   
       29 . The method for manufacturing the biochip of  claim 27 , wherein the metallic membrane is composed of a transition metallic oxide. 
   
   
       30 . The method for manufacturing the biochip of  claim 25 , wherein the metallic membrane is composed of a transition metal nitride. 
   
   
       31 . The method for manufacturing the biochip of  claim 26 , wherein the metallic membrane is composed of a transition metal carbide. 
   
   
       32 . The method for manufacturing the biochip of  claim 25 , wherein the polymer membrane is composed of an epoxy resin. 
   
   
       33 . The method for manufacturing the biochip of  claim 31 , wherein the polymer membrane is composed of SU8. 
   
   
       34 . The method for manufacturing the biochip of  claim 25 , further including a step for deprotecting amino groups included in the plurality of probe biomolecules by the alkaline solution. 
   
   
       35 . The method for manufacturing the biochip of  claim 34 , wherein the step for peeling off the polymer membrane from the metallic membrane includes a step for blowing the polymer membrane with an air. 
   
   
       36 . A substrate for a biochip comprising:
 a base plate having a surface on which a plurality of hydroxyl groups can be introduced; and   a cover member disposed on the base plate when probe biomolecules are bonded to the plurality of hydroxyl groups, respectively, the cover member having a plurality of through holes to define binding regions where the probe biomolecules are bonded to the surface of the base plate.   
   
   
       37 . A biochip comprising:
 an optical transparency base plate;   a light shielding film disposed on the base plate and having a plurality of through holes reaching the base plate; and   a plurality of probe biomolecules bonded to the base plate exposed from each of the plurality of through holes.   
   
   
       38 . The biochip of  claim 37 , wherein a plurality of wells that open to the plurality of through holes are delineated in the base plate. 
   
   
       39 . A biochip comprising:
 an optical transparency base plate;   a light shielding film disposed on a first surface of the base plate and having a plurality of through holes reaching the first surface; and   a plurality of probe biomolecules bonded to a second surface of the base plate opposite to the first surface of the base plate.   
   
   
       40 . The biochip of  claim 39 , wherein the base plate is composed of a silicon oxide. 
   
   
       41 . The biochip of  claim 39 , wherein the plurality of probe biomolecules are bonded to the base plate via a plurality of hydroxyl groups introduced on the base plate. 
   
   
       42 . A biochip comprising:
 an optical transparency base member;   a plurality of probe biomolecules bonded on the base member; and   a light shielding member disposed around the base member.   
   
   
       43 . The biochip of  claim 42 , wherein the base member is composed of a silicon oxide. 
   
   
       44 . The biochip of  claim 42 , wherein the plurality of probe biomolecules are bonded to the base member via a plurality of hydroxyl groups introduced on the base member.

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