Angular velocity sensor and method for fabricating the same

Abstract

An angular velocity sensor includes a tuning-fork vibrator having a base and multiple arms extending from the base. Two arms out of the multiple arms driven to vibrate have first end parts opposite to second end parts connected to the base. The first end parts being wider than the second end parts.

1 . An angular velocity sensor comprising:
 a tuning-fork vibrator having a base and multiple arms extending from the base,   two arms out of the multiple arms driven to vibrate having first end parts opposite to second end parts connected to the base,   the first end parts being wider than the second end parts.   
   
   
       2 . The angular velocity sensor as claimed in  claim 1 , wherein the first end parts protrude from first side surfaces of the multiple arms opposite to second side surfaces facing each other. 
   
   
       3 . The angular velocity sensor as claimed in  claim 1 , wherein the first end parts have steps so that the first end parts are wider than the second end parts. 
   
   
       4 . The angular velocity sensor as claimed in  claim 1 , wherein the two arms have driving electrodes that extend from front and back surfaces of the two arms to side surfaces thereof. 
   
   
       5 . The angular velocity sensor as claimed in  claim 1 , wherein the base and the multiple arms are made of LiNbO 3  or LiTaO 3 . 
   
   
       6 . The angular velocity sensor as claimed in  claim 1 , wherein the angular velocity sensor senses an angular velocity about an axis in a longitudinal direction of the multiple arms. 
   
   
       7 . The angular velocity sensor as claimed in  claim 1 , wherein the angular velocity sensor senses an angular velocity about an axis in a thickness direction of the multiple arms.