Substrate cassette

Abstract

The present invention relates to a substrate cassette that houses a plurality of horizontally oriented substrates in multiple levels in the vertical direction and in which support bars are arranged that support the substrates so as to inhibit bending of the central portion of each substrate, wherein a vertical direction adjustment mechanism that adjusts distortion of the support bars in the vertical direction is provided between the support bars and a frame formed on the back of the opposite side from the substrate insertion side.

1 . A substrate cassette that houses a plurality of horizontally oriented substrates in multiple levels in the vertical direction and in which support bars are arranged that support the substrates so as to inhibit bending of the central portion of each substrate, wherein a vertical direction adjustment mechanism that adjusts distortion of the support bars in the vertical direction is provided between the support bars and a frame formed on the back of the opposite side from the substrate insertion side. 
   
   
       2 . The substrate cassette according to  claim 1 , wherein a horizontal direction adjustment mechanism that adjusts distortion of the support bars in the horizontal direction is provided between the frame and the support bars. 
   
   
       3 . The substrate cassette according to  claim 1 , wherein the vertical direction adjustment mechanism adjusts the angle in the vertical direction of the support bars relative to the frame with a screw. 
   
   
       4 . The substrate cassette according to  claim 2 , wherein the horizontal direction adjustment mechanism adjusts the angle in the horizontal direction of the support bars relative to the frame with a screw. 
   
   
       5 . The substrate cassette according to any of  claims 1 , wherein the support bars are made of a carbon fiber composite material. 
   
   
       6 . The substrate cassette according to any of  claims 1 , wherein the support bars are made of carbon fiber composite material and a material other than a carbon fiber composite material.