Work carrier

Abstract

A work carrier includes a work carrying mechanism, a cooling pipe for cooling the work carrying mechanism by circulation of a coolant, a thermally-conductive elastic member held in contact with the work carrying mechanism and the cooling pipe, and a fixing element for fixing the cooling pipe to the work carrying mechanism. The elastic member is made of aluminum, for example. Before fixed, the elastic member is bent in a cross section perpendicular to the longitudinal direction of the cooling pipe.

1 . A work carrier comprising:
 a work carrying mechanism;   a cooling pipe for cooling the work carrying mechanism by circulation of a coolant;   a thermally-conductive elastic member held in contact with the work carrying mechanism and the cooling pipe; and   a fixing element for fixing the cooling pipe to the work carrying mechanism.   
     
     
         2 . The work carrier according to  claim 1 , wherein the elastic member extends in a longitudinal direction of the cooling pipe. 
     
     
         3 . The work carrier according to  claim 1 , wherein the elastic member is bent in a cross section perpendicular to a longitudinal direction of the cooling pipe prior to fixation. 
     
     
         4 . The work carrier according to  claim 1 , wherein the elastic member is made of a deformable metal. 
     
     
         5 . The work carrier according to  claim 4 , wherein the elastic member is made of aluminum. 
     
     
         6 . The work carrier according to  claim 1 , wherein the cooling pipe includes a flat surface held in contact with the elastic member. 
     
     
         7 . The work carrier according to  claim 1 , further comprising:
 a scissors lift mechanism for vertically lifting and lowering the work carrying mechanism;   a base seat on which the scissors lift mechanism is mounted; and   a rotation mechanism for rotating the base seat about a vertical axis.   
     
     
         8 . The work carrier according to  claim 7 , wherein:
 the scissors lift mechanism comprises:
 a stage on which the work carrying mechanism is mounted; 
 a first scissors link including a first arm and a second arm; 
 a second scissors link arranged parallel to the first scissors link and including a third arm and a fourth arm; and 
 a lifting driver mounted on the base seat; 
   the first arm and the second arm are connected to each other at central portions of the respective arms so as to be rotatable to each other;   the first arm includes an upper end portion rotatably connected to the stage, and a lower end portion horizontally movable near the base seat;   the second arm includes a lower end portion rotatably connected to the base seat, and an upper end portion horizontally movable near the stage;   the third arm and the fourth arm are connected to each other at central portions of the respective arms so as to be rotatable to each other;   the third arm includes an upper end portion rotatably connected to the stage, and a lower end portion horizontally movable near the base seat;   the fourth arm includes a lower end portion rotatably connected to the stage, and an upper end portion horizontally movable near the stage; and   the lifting driver is configured to move the lower end portions of the first arm and the third arm near the base seat.   
     
     
         9 . The work carrier according to  claim 8 , further comprising: a lower pipe extending from the lower end portion of the second arm to the central portion of the second arm; an upper pipe extending from the upper end portion of the third arm to the central portion of the third arm; and an intermediate pipe extending between the central portion of the second arm and the central portion of the third arm and connected to the lower pipe and the upper pipe. 
     
     
         10 . The work carrier according to  claim 9 , further comprising: a through pipe extending from the base seat, via the lower end portion of the second arm and connected to the lower pipe; and a connection pipe connecting between the upper pipe and the work carrying mechanism. 
     
     
         11 . The work carrier according to  claim 10 , wherein the through pipe, the lower pipe, the intermediate pipe, the upper pipe and the connection pipe are configured to provide a pipeline in which a coolant supply pipe and a coolant discharge pipe, both connected to the cooling pipe, are accommodated.