Data Flow Branching in Mask Data Preparation

Abstract

Branching of the data-flow in a mask data preparation processes is described herein. In various implementations, the output stream from a first mask data processing operation is branched. Subsequently, the branched output stream may be connected to the input stream of a first independent mask data preparation operation and a second independent mask data preparation operation. This provides that the first and the second independent mask data preparation operations may operate in parallel. Furthermore, this provides that the first and the second independent mask data preparation operations may operate upon discrete “portions” of the data processed by the first mask data preparation operation.

1 . A computer-implemented method for branching the data-flow in an electronic design automation process comprising:
 receiving an output from a first operation in an electronic design automation process;   storing the output onto one or more tangible memory storage media; and   directing the output to a first independent operation and a second independent operation in the electronic design automation process simultaneously.   
   
   
       2 . The computer-implemented method recited in  claim 1 , wherein:
 the electronic design automation process is a lithographic mask data preparation process;   the first operation is a mask correction operation;   the first independent operation is a mask verification operation;   the second independent operation is a mask fracturing operation; and   the output is geographical sections from a grid-based layout design.   
   
   
       3 . The computer-implemented method recited in  claim 2 , the method act of directing the output to a first independent operation and a second independent operation in the electronic design automation process simultaneously comprising directing the output to a first output channel and a second output channel. 
   
   
       4 . The computer-implemented method recited in  claim 1 , further comprising:
 receiving a first independent output from the first independent operation; and   saving the first independent output onto one or more tangible memory storage media.   
   
   
       5 . The computer-implemented method recited in  claim 1 , further comprising:
 receiving a second independent output from the second independent operation; and   saving the second independent output onto one or more tangible memory storage media.   
   
   
       6 . The computer-implemented method recited in  claim 1 , wherein the output is cells from a hierarchical layout design. 
   
   
       7 . A computer-implemented method for branching the data-flow in a mask data preparation process comprising:
 identifying an output stream corresponding to a mask process correction operation; and   directing the output stream to a first output channel and a second output channel.   
   
   
       8 . The computer-implemented method recited in  claim 7 , wherein the output stream includes one or more of a plurality of modified sections of a mask design. 
   
   
       9 . The computer-implemented method recited in  claim 8 , the method act of directing the output stream to a first output channel and second output channel comprises:
 routing the first output channel to an input channel corresponding to a mask fracturing operation; and   routing the second output channel to an input channel corresponding to a mask correction verification operation.   
   
   
       10 . The computer-implemented method recited in  claim 9 , further comprising instantiating a communication channel between the mask process correction operation and the mask correction verification operation. 
   
   
       11 . The computer-implemented method recited in  claim 10 , wherein the mask process correction operation comprises:
 partitioning the mask design into the plurality of sections;   flattening the plurality of sections into a plurality of top level sections based upon hierarchy;   making adjustments to ones of the plurality of top level sections based upon a mask process correction rule deck; and   outputting the adjusted ones of the plurality of top level sections to the output stream.   
   
   
       12 . The computer-implemented method recited in  claim 11 , wherein the mask process correction operation further comprises saving the adjusted ones of the plurality of top level sections to one or more memory storage media. 
   
   
       13 . One or more tangible computer-readable media, having computer executable instructions for branching the data-flow in a mask data preparation process stored thereon, the computer executable instructions comprise:
 causing a computer to perform a set of operations; and   wherein the set of operations include:
 identifying an output stream corresponding to a mask process correction operation; and 
 directing the output stream to a first output channel and a second output channel. 
   
   
   
       14 . The one or more tangible computer-readable media recited in  claim 13 , wherein the output stream includes one or more of a plurality of modified sections of a mask design. 
   
   
       15 . The one or more tangible computer-readable media recited in  claim 14 , the operation for directing the output stream to a first output channel and second output channel comprising:
 routing the first output channel to an input channel corresponding to a mask fracturing operation; and   routing the second output channel to an input channel corresponding to a mask correction verification operation.   
   
   
       16 . The one or more tangible computer-readable media recited in  claim 15 , the set of operations further comprising instantiating a communication channel between the mask process correction operation and the mask correction verification operation. 
   
   
       17 . The one or more tangible computer-readable media recited in  claim 16 , wherein the mask process correction operation comprises:
 partitioning the mask design into the plurality of sections;   flattening the plurality of sections into a plurality of top level sections based upon hierarchy;   making adjustments to ones of the plurality of top level sections based upon a mask process correction rule deck; and   outputting the adjusted ones of the plurality of top level sections to the output stream.   
   
   
       18 . The one or more tangible computer-readable media recited in  claim 16 , wherein the mask process correction operation further comprises saving the adjusted ones of the plurality of top level sections to one or more memory storage media.