Organic el element and its manufacturing method

Abstract

There is provided an organic EL element having, between a positive electrode and a negative electrode, a lamination structure formed of organic films having a light emitting layer, a hole transport layer adjacent to a positive electrode side of the light emitting layer, and an electron transport layer adjacent to a negative electrode side of the light emitting layer. At least one of the organic films composing the lamination structure includes a metal element having reactivity to oxygen or water.

1 . A method for manufacturing an organic EL element including a substrate and a lamination structure formed of organic films on the substrate, the laminated structure including at least a hole transport layer, a light emitting layer, and an electron transport layer, the method comprising:
 depositing each of the organic films composing the lamination structure, wherein at least a part of the depositing is executed in the presence in the vicinity of the substrate of a metal element having reactivity to oxygen or water.   
   
   
       2 . The method for manufacturing an organic EL element of  claim 1 , wherein the metal element comprises one selected from Ti, Si, Al, and Cr. 
   
   
       3 . The method for manufacturing an organic EL element of  claim 1 , wherein the depositing is preceded by discharging the metal element to the vicinity of the substrate. 
   
   
       4 . The method for manufacturing an organic EL element of  claim 3 , wherein the discharging of the metal element is terminated before the depositing starts. 
   
   
       5 . The method for manufacturing an organic EL element of  claim 3 , wherein the discharging of the metal element comprises heating a medium comprising the metal element. 
   
   
       6 . The method for manufacturing an organic EL element of  claim 3 , wherein the discharging of the metal element is executed in advance to the depositing of one of the organic films composing the lamination structure. 
   
   
       7 . The method for manufacturing an organic EL element of  claim 3 , wherein the discharging of the metal element is executed in advance of the depositing of each organic film composing the lamination structure.