Liquid ejecting head, liquid ejecting apparatus, and method of manufacturing liquid ejecting head

Abstract

A liquid ejecting head includes a flow channel forming substrate in which a plurality of pressure generating chambers in communication with nozzles which eject liquid droplets are juxtaposed to each other; a diaphragm which is provided on the flow channel forming substrate and constitutes one side surface of the pressure generating chamber; and piezoelectric elements which are provided so that their leading ends abut on the diaphragm, wherein the diaphragm includes a first vibrating member and a second vibrating member disposed between the first vibrating member and the flow channel forming substrate, the first vibrating member is formed from a first composite plate made up of a first sheet member and a first supporting plate and has a first island portion which is constructed from the first supporting plate and on which a leading end of the piezoelectric element abuts, and the second vibrating member is formed from a second composite plate made up of a second sheet member and a second supporting plate and has a second island portion which is constructed from the second supporting plate and arranged at a portion opposite to the first island portion.

1 . A liquid ejecting head, comprising:
 a flow channel forming substrate in which a plurality of pressure generating chambers in communication with nozzles which eject liquid droplets are juxtaposed to each other;   a diaphragm which is provided on the flow channel forming substrate and constitutes one side surface of the pressure generating chamber; and   piezoelectric elements which are provided so that their leading ends abut on the diaphragm,   wherein the diaphragm includes a first vibrating member and a second vibrating member disposed between the first vibrating member and the flow channel forming substrate,   the first vibrating member is formed from a first composite plate made up of a first sheet member and a first supporting plate and has a first island portion which is constructed from the first supporting plate and on which a leading end of the piezoelectric element abuts, and   the second vibrating member is formed from a second composite plate made up of a second sheet member and a second supporting plate and has a second island portion which is constructed from the second supporting plate and arranged at a portion opposite to the first island portion.   
     
     
         2 . The liquid ejecting head according to  claim 1 ,
 wherein the width of the first island portion is wider than the width of the second island portion at least in a juxtaposing direction of the pressure generating chambers.   
     
     
         3 . The liquid ejecting head according to  claim 1 ,
 wherein the first sheet member is provided with a through hole and a space defined between the first vibrating member and the second vibrating member is vented to the atmosphere by the through hole.   
     
     
         4 . The liquid ejecting head according to  claim 1 ,
 wherein the first vibrating member has a first thin-walled portion constructed from the first sheet member at a periphery of the first island portion and the second vibrating member has a second thin-walled portion constructed from the second sheet member at a periphery of the second island portion, and   wherein the width of the first thin-walled portion is wider than the width of the second thin-walled portion.   
     
     
         5 . A liquid ejecting apparatus comprising the liquid ejecting head according to  claim 1 . 
     
     
         6 . A method of manufacturing a liquid ejecting head comprising: a flow channel forming substrate in which a plurality of pressure generating chambers in communication with nozzles which eject liquid droplets are juxtaposed to each other; a diaphragm which is provided on the flow channel forming substrate and constitutes one side surface of the pressure generating chamber; and piezoelectric elements which are provided so that their leading ends abut on the diaphragm, wherein the diaphragm includes a first vibrating member and a second vibrating member disposed between the first vibrating member and the flow channel forming substrate, the first vibrating member is formed from a first composite plate made up of a first sheet member and a first supporting plate and has a first island portion which is constructed from the first supporting plate and on which the leading end of the piezoelectric element abuts, and the second vibrating member is formed from a second composite plate made up of a second sheet member and a second supporting plate and has a second island portion which is constructed from the second supporting plate and arranged at a portion opposite to the first island portion,
 the method comprising:   forming the second vibrating member on a wafer for the flow channel forming substrate in which a plurality of the flow channel forming substrates are integrally formed;   forming the first vibrating member on the second vibrating member; and   dividing the wafer for the flow channel forming substrate;   wherein in forming the second vibrating member, after bonding the second composite plate made up of the second sheet member and the second supporting plate onto the wafer for the flow channel forming substrate, a mask member is positioned with taking an alignment mark provided on the wafer for the flow channel forming substrate as a reference, and the second island portion is formed by etching the second supporting plate through the mask member.