Carbon nanotube array sensor

Abstract

A carbon nanotube array sensor includes a first electrode, a second electrode, a carbon nanotube array, at least one first conductive metal layer, at least one second conductive metal layer, a first metallophilic layer, and a second metallophilic layer. The carbon nanotube array is located between the first and second electrodes. The carbon nanotube array includes a number of carbon nanotubes. Each of the carbon nanotubes includes a first end and a second end opposite to the first end. The first metallophilic layer is located on the first end of each of the carbon nanotubes and electrically connected to the first conductive metal layer. The second metallophilic layer is located on the second end of each of the carbon nanotubes and electrically connected to the second conductive metal layer.

1 . A carbon nanotube array sensor, comprising:
 a first electrode;   a second electrode;   a carbon nanotube array located between the first and second electrodes, the carbon nanotube array comprising a plurality of carbon nanotubes, each of the carbon nanotubes comprising a first end and a second end opposite to the first end;   at least one first conductive metal structure electrically connecting the first electrode and the first end of the carbon nanotubes;   at least one second conductive metal structure electrically connecting the second electrode and the second end of the carbon nanotubes;   a first metallophilic layer located on the first end of the carbon nanotubes, the first metallophilic layer electrically connected to the first conductive metal structure; and   a second metallophilic layer located on the second end of each of the carbon nanotubes, the second metallophilic layer electrically connected to the second conductive metal structure.   
   
   
       2 . The carbon nanotube array sensor of  claim 1 , wherein at least one of the first and second metallophilic layers is formed on the carbon nanotube array via electroplating, chemical platting, or magnetron sputtering. 
   
   
       3 . The carbon nanotube array sensor of  claim 1 , wherein the at least one first conductive metal structure comprises a plurality of first conductive metal layers, the plurality of first conductive metal layers is spaced apart from each other, each of the first conductive metal layers is formed on the first metallophilic layer. 
   
   
       4 . The carbon nanotube array sensor of  claim 1 , wherein the first metallophilic layer is embedded into the at least one first conductive metal layer, the second metallophilic layer is embedded into the second conductive metal layer. 
   
   
       5 . The carbon nanotube array sensor of  claim 1 , wherein the first conductive metal layer has a lower melting-point than that of the first electrode, and the second conductive metal layer has a lower melting point than that of the second electrode. 
   
   
       6 . The carbon nanotube array sensor of  claim 1 , wherein the first and second metallophilic layers have thicknesses of about 0.5 nanometers to about 50 nanometers. 
   
   
       7 . The carbon nanotube array sensor of  claim 1 , wherein the first and second metallophilic layers comprise of material selected from the group consisting of palladium, chromium, nickel, titanium, magnesium, and their alloy. 
   
   
       8 . The carbon nanotube array sensor of  claim 1 , wherein the first and second conductive metal layers have thicknesses of about 0.1 nm to about 900 nm. 
   
   
       9 . The carbon nanotube array sensor of  claim 1 , wherein at least one portion of the first end of the carbon nanotubes is embedded into the first conductive metal layers, at least one portion of the second end of the carbon nanotubes is embedded into the second conductive metal layers. 
   
   
       10 . The carbon nanotube array sensor of  claim 1 , wherein the carbon nanotubes of the carbon nanotube array are multi-walled carbon nanotubes. 
   
   
       11 . The carbon nanotube array sensor of  claim 1 , further comprising a supporter, the supporter is located between the first electrode and the second electrode. 
   
   
       12 . A carbon nanotube array sensor, comprising:
 a carbon nanotube array comprising a plurality of carbon nanotubes, each of the carbon nanotubes comprising a first end and a second end opposite to the first end;   at least one first conductive metal structure, and at least one second conductive metal structure;   a first metallophilic layer located on the first end of the carbon nanotubes, the first metallophilic layer electrically coupled to the first conductive metal structure; and   a second metallophilic layer located on the second end of the carbon nanotubes, the second metallophilic layer electrically coupled to the second conductive metal structure.   
   
   
       13 . A carbon nanotube array sensor, comprising:
 a carbon nanotube array;   at least one first conductive metal structure, and at least one second conductive metal structure;   a first metallophilic layer located on a first side of the carbon nanotube array, the first metallophilic layer electrically connected to the first conductive metal structure; and   a second metallophilic layer located on the second side of the carbon nanotube array, the second metallophilic layer electrically connected to the second conductive metal structure.