Position correcting apparatus, vacuum processing equipment and position correcting method

Abstract

A technology to resolve positional deviations without using a transport robot. An object to be transported placed on a holding stand is rotated, so as to make an error angle α to be zero; and thereafter, a temporarily placing portion is made to move obliquely to move for an error distance in a horizontal component, thereby locating the center of the object to be transported on the central axis line of the holding stand; and the object to be transported is placed on holding stand. In a case where an orientation of a notch is definite, the holding stand is further rotated by a desired amount. Without using the transport robot, it is possible to resolve an error angle and an error distance.

1 . A position-correcting apparatus, comprising:
 a holding stand for rotating object to be transported around a rotation-axis line as a center within a plane perpendicular to the rotation-axis line;   a stand-elevating mechanism for moving the holding stand upward and downward;   a temporary placing portion for temporary placing the object to be transported; and   an oblique correcting and moving device inclined at a predetermined intersecting angle to the rotation-axis line for moving obliquely upward and downward the temporary placing portion.   
   
   
       2 . The position correcting apparatus according to  claim 1 ,
 wherein the rotation-axis line is vertically arranged, and the plane is made to be a horizontal plane.   
   
   
       3 . The position correcting apparatus according to  claim 1 , in which:
 a top of the temporary placing portion located below the object to be transported on the holding stand is contactable with the back surface of the object to be transported arranged on the holding stand,   wherein the surface of the holding stand located below the object to be transported arranged on the temporary placing portion can be in contact with the back surface of the object to be transported arranged on the temporary placing portion.   
   
   
       4 . The position-correcting apparatus according to  claim 1 , further comprising:
 a detection device for detecting an error distance within the plane between the center of the object to be transported on the holding stand and the rotation-axis line, and an error angle formed by a straight line within the plane connecting between the center of the object to be transported and the rotation-axis line, and a moving direction of the object to be transported within the plane moved by the oblique correcting and moving device; and   a control device for controlling the holding stand and the oblique correcting and moving device to move the object to be transported, and thus positioning the centers of the object to be transported on the rotation-axis line.   
   
   
       5 - 17 . (canceled) 
   
   
       18 . A position-correcting method, comprising the steps of:
 using a position-correcting apparatus including:   a holding stand for rotating an object to be transported around a rotation-axis line as a center within a plane perpendicular to the rotation-axis line,   a stand-elevating mechanism for moving the holding stand upward and downward,   a temporary placing portion for temporary placing the object to be transported, and   an oblique correcting and moving device inclined at a predetermined intersecting angle to the rotation-axis line for moving obliquely upward and downward the temporary placing portion;   performing an alignment, by rotating the holding stand, of: (a) the direction of a line segment extending between the center of the object to be transported which is arranged on the holding stand and the rotation-axis line, and (b) the direction of a component of oblique movement of the holding stand on the plane;   arranging the object to be transported on the temporary placing portion in the above-explained state; and   after positioning the center of the object to be transported on the rotation axis by moving the temporary placing portion, arranging the object to be transported on the holding stand by moving the holding stand.   
   
   
       19 . The position-correcting method according to  claim 18 , wherein the plane is made to be horizontal.