Method of Smoothing Solid Surface with Gas Cluster Ion Beam and Solid Surface Smoothing Apparatus

Abstract

Scratches or similar surface roughness in a solid surface is reduced by gas cluster ion beam irradiation. A method of smoothing a solid surface with a gas cluster ion beam includes an irradiation step in which the solid surface is irradiated with a gas cluster ion beam, and the irradiation step includes a process of causing clusters from a plurality of directions to collide with at least an area (spot) irradiated with the gas cluster ion beam on the solid surface. Collision of the clusters from a plurality of directions with the spot is brought about by an irradiation of the gas cluster ion beam in which flight directions of the clusters diverge with respect to a center of the beam, for example.

1 . A method of smoothing a solid surface with a gas cluster ion beam comprising an irradiation step of irradiating the solid surface with the gas cluster ion beam, wherein
 the irradiation step comprises a process of causing clusters from a plurality of directions to collide with at least an area (spot) irradiated with the gas cluster ion beam on the solid surface.   
   
   
       2 . The method of smoothing a solid surface with a gas cluster ion beam according to  claim 1 , wherein the collision of the clusters from a plurality of directions with the spot is performed by an irradiation of the gas cluster ion beam in which flight directions of the clusters diverge with respect to a center of the beam. 
   
   
       3 . The method of smoothing a solid surface with a gas cluster ion beam according to  claim 2 , wherein the gas cluster ion beam is a gas cluster ion beam randomly diverging with an angle of at least 2° with respect to the center of the beam. 
   
   
       4 . The method of smoothing a solid surface with a gas cluster ion beam according to any of  claims 1  to  3 , wherein the collision of the clusters from a plurality of directions with the spot is performed by emitting the gas cluster ion beam while moving the solid. 
   
   
       5 . The method of smoothing a solid surface with a gas cluster ion beam according to any of  claims 1  to  3 , wherein the collision of the clusters from a plurality of directions with the spot is performed by emitting the gas cluster ion beam while rotating the solid. 
   
   
       6 . The method of smoothing a solid surface with a gas cluster ion beam according to  claim 5 , wherein the collision of the clusters from a plurality of directions with the spot is performed by emitting the gas cluster ion beam while avoiding the irradiation angle formed by the gas cluster ion beam and the normal to the solid surface irradiated with the gas cluster ion beam being 0°. 
   
   
       7 . The method of smoothing a solid surface with a gas cluster ion beam according to any of  claims 1  to  3 , wherein the collision of the clusters from a plurality of directions with the spot is performed by emitting one or more gas cluster ion beams in addition to the emission of said gas cluster ion beam. 
   
   
       8 . A solid surface smoothing apparatus for smoothing a solid surface with a gas cluster ion beam; comprising:
 a beam setup means adapted to set up the gas cluster ion beam to diverge randomly with an angle of at least 2° with respect to a center of the beam;   a gas cluster ion beam emission means which emits the gas cluster ion beam onto the solid surface; and   a means adapted to move the solid and/or a means adapted to rotate the solid.   
   
   
       9 . The solid surface smoothing apparatus according to  claim 8 , wherein the solid surface smoothing apparatus further comprises one or more gas cluster ion beam emission means.