Processes and equipments for preparing f2-containing gases, as well as processes and equipments for modifying the surfaces of articles

Abstract

Apparatus for safely and easily preparing an F 2 -containing gas including equipment for handling a gas containing a fluoro compound that is easier to handle than F 2 , and in which the fluoro compound is excited and decomposed to convert it into F 2 gas before surface modification and then used for surface modification. There is no necessity of providing, storing and transporting a large amount of F 2 gas in advance because a necessary amount of F 2 gas is obtained immediately before surface modification.

1 . An equipment for preparing an F 2 -containing gas comprising:
 a means for ionizing a fluoro compound-containing gas under reduced pressure; and   a pressure controlling means communicating with the ionizing means and controlling the pressure of the ionized fluoro compound-containing gas at a normal pressure or overpressure condition.   
   
   
       2 . A surface modification equipment comprising a means communicating with the pressure controlling means in the equipment for preparing an F 2 -containing gas of  claim 1  and positioning an article whose surface should be contacted with the F 2 -containing gas prepared in the equipment for preparing an F 2 -containing gas under reduced pressure or overpressure or normal pressure. 
   
   
       3 . The surface modification equipment of  claim 2  further comprising a vacuum pump or compressor communicating with the means for positioning the article. 
   
   
       4 . An apparatus for preparing an F 2 -containing gas comprising:
 means for exciting at least one fluoro compound in a fluoro compound-containing gas by conferring energy on the fluoro compound-containing gas under reduced pressure; and   means for partially or completely converting the excited fluoro compound-containing gas containing the excited fluoro compound into F 2  under normal pressure or overpressure.   
   
   
       5 . The apparatus of  claim 4 , wherein the means for exciting a fluoro compound comprises a first zone adapted for and capable of being maintained under reduced pressure; and
 the means for converting the gas into F 2  comprises a second zone communicating with the first zone and adapted for and capable of being maintained under normal pressure or overpressure.   
   
   
       6 . The apparatus of  claim 4 , wherein the means for exciting a fluoro compound comprises a first zone adapted for and capable of being maintained under reduced pressure; and
 the means for converting the gas into F 2  comprises means for maintaining the pressure in the transportation system under a normal pressure or overpressure condition during transportation of the excited fluoro compound-containing gas to a second zone communicating with the first zone.   
   
   
       7 . The apparatus of  claim 4  wherein the means for exciting a fluoro compound comprises a first zone capable of being maintained under reduced pressure; and
 the means for converting the gas into F 2  comprises means for maintaining the pressure in the first zone under a normal pressure or overpressure condition.   
   
   
       8 . The apparatus of  claim 4  wherein the means for exciting a fluoro compound comprises a first chamber capable of begin maintained under reduced pressure; and
 the means for converting the gas into F 2  comprises means for transporting the excited fluoro compound-containing gas containing the excited fluoro compound from the first chamber to a second chamber maintained under normal pressure or overpressure via a gas channel connecting the first chamber and the second chamber.   
   
   
       9 . The apparatus of  claim 4  wherein the means for exciting a fluoro compound comprises a first chamber capable of being maintained under reduced pressure; and
 the means for converting the gas into F 2  comprises means for maintaining the pressure in the transportation system under a normal pressure or overpressure condition during transportation of the excited fluoro compound-containing gas containing the excited fluoro compound from the first chamber to a second chamber via a gas channel connecting the first chamber and the second chamber.   
   
   
       10 . The apparatus of  claim 4  wherein the means for exciting a fluoro compound comprises a first chamber and means for maintaining the first chamber under reduced pressure; and
 the means for converting the gas into F 2  comprises means in the first chamber for maintaining the first chamber under normal pressure or overpressure.   
   
   
       11 . The apparatus of  claim 8  wherein a vacuum pump is provided in a gas channel connecting the first chamber and the second chamber and said vacuum pump for use during transporting the excited fluoro compound-containing gas from the first chamber to the second chamber. 
   
   
       12 . The apparatus of  claim 9  wherein a vacuum pump is provided in a gas channel connecting the first chamber and the second chamber and said vacuum pump for use during transporting the excited fluoro compound-containing gas from the first chamber to the second chamber.