Polymers, Methods Of Use Thereof, And Methods Of Decomposition Thereof

Abstract

Polymers, methods of use thereof, and methods of decomposition thereof, are provided. One exemplary polymer, among others, includes, a photodefinable polymer having a sacrificial polymer and a photoinitiator.

1 - 19 . (canceled) 
   
   
       20 . A structure, comprising a three-dimensional air-region formed using a method claim  11  comprising:
 disposing a photodefinable polymer composition onto a surface, wherein the photodefinable polymer includes a sacrificial polymer and a photoinitiator;   disposing a gray scale photomask onto the photodefinable polymer, wherein the gray scale photomask encodes an optical density profile defining a three-dimensional structure to be formed from the photodefinable polymer;   exposing the photodefinable polymer through the gray scale photomask to optical energy;   removing portions of the photodefinable polymer composition to form the three-dimensional structure;   disposing an overcoat layer onto the three-dimensional structure; and   decomposing the photodefinable polymer composition, thermally, to form a three-dimensional air-region,   wherein the three-dimensional air-region has areas with non-rectangular cross-sections.   
   
   
       21 . A structure, comprising the three-dimensional air-region formed using a method comprising:
 disposing a photodefinable polymer composition onto a surface, wherein the photodefinable polymer includes a sacrificial polymer and a photoinitiator;   disposing a gray scale photomask onto the photodefinable polymer, wherein the gray scale photomask encodes an optical density profile defining a three-dimensional structure to be formed from the photodefinable polymer;   exposing the photodefinable polymer through the gray scale photomask to optical energy;   removing portions of the photodefinable polymer composition to form the three-dimensional structure;   disposing an overcoat layer onto the three-dimensional structure; and   decomposing the photodefinable polymer composition, thermally, to form a three-dimensional air-region,   wherein decomposing includes maintaining a constant rate of decomposition as a function of time, and   wherein the three-dimensional air-region has areas with non-rectangular cross-sections.   
   
   
       22 . A structure, comprising the three-dimensional air-region formed using a method comprising:
 disposing a photodefinable polymer composition onto a surface, wherein the photodefinable polymer includes a sacrificial polymer and a photoinitiator;   disposing a gray scale photomask onto the photodefinable polymer, wherein the gray scale photomask encodes an optical density profile defining a three-dimensional structure to be formed from the photodefinable polymer;   exposing the photodefinable polymer through the gray scale photomask to optical energy;   removing portions of the photodefinable polymer composition to form the three-dimensional structure;   disposing an overcoat layer onto the three-dimensional structure; and   decomposing the photodefinable polymer composition, thermally, to form a three-dimensional air-region,   wherein decomposing includes heating the structure according to the thermal decomposition profile expression,   
     
       
         
           
             T 
             = 
             
               
                 
                   
                     E 
                     a 
                   
                   R 
                 
                  
                 
                   [ 
                   
                     ln 
                      
                     
                         
                     
                      
                     
                       
                         
                           A 
                            
                           
                             ( 
                             
                               l 
                               - 
                               rt 
                             
                             ) 
                           
                         
                         n 
                       
                       r 
                     
                   
                   ] 
                 
               
               
                 - 
                 1 
               
             
           
         
       
       where R is the universal gas constant, t is time, n is the overall order of decomposition reaction, r is the desired polymer decomposition rate, A is the Arrhenius pre-exponential factor, and E a  is the activation energy of the decomposition reaction, and 
       wherein the three-dimensional air-region has areas with non-rectangular cross-sections. 
     
   
   
       23 - 27 . (canceled) 
   
   
       28 . The structure of  claim 20 , wherein the areas with non-rectangular cross-sections of said three-dimensional air-region are tapered cross-sections. 
   
   
       29 . The structure of  claim 20 , wherein the three-dimensional air-region having areas with non-rectangular cross-sections is further defined by tapered corner regions. 
   
   
       30 . The structure of  claim 21 , wherein the areas with non-rectangular cross-sections of said three-dimensional air-region are tapered cross-sections. 
   
   
       31 . The structure of  claim 21 , wherein the three-dimensional air-region having areas with non-rectangular cross-sections is further defined by tapered corner regions. 
   
   
       32 . The structure of  claim 22 , wherein the areas with non-rectangular cross-sections of said three-dimensional air-region are tapered cross-sections. 
   
   
       33 . The structure of  claim 22 , wherein the three-dimensional air-region having areas with non-rectangular cross-sections is further defined by tapered corner regions.