Composition for ferroelectric thin film formation, ferroelectric thin film and liquid-jet head

Abstract

A composition for ferroelectric thin film formation, comprising at least a colloidal solution containing metals serving as materials constituting a ferroelectric thin film, the colloidal solution having an average colloidal particle diameter of 1 to 100 nm, and obtaining a particle size distribution having two or more peaks; a ferroelectric thin film formed from the composition for ferroelectric thin film formation, and a liquid-jet head equipped with a piezoelectric element having the ferroelectric thin film.

1 . A method for producing a liquid-jet head which is equipped with a piezoelectric element having a ferroelectric thin film, as a piezoelectric actuator for jetting a liquid, comprising:
 coating a composition for ferroelectric thin film formation; and   drying and firing the coated the composition for ferroelectric thin film formation, whereby the ferroelectric thin film is formed,   wherein the composition for ferroelectric thin film formation comprises at least a colloidal solution containing metals serving as materials for making the ferroelectric thin film, said colloidal solution having an average colloidal particle diameter of 1 to 100 nm, and having a particle size distribution having two or more peaks,   wherein the metals serving as the materials for making the ferroelectric thin film include at least Pb, Zr and Ti, and the colloidal solution comprises each of (a), (b) and (c);   (a) colloidal particles comprising lead acetate;   (b) colloidal particles comprising lead acetate and zirconium acetylacetonate stabilized by water molecules; and   (c) colloidal particles comprising titanium alkoxides and lead acetate chelate-stabilized by amines.   
     
     
         2 . The method for producing the liquid-jet head according to  claim 1 , wherein the average colloidal particle diameter is 1 to 30 nm. 
     
     
         3 . The method for producing the liquid-jet head according to  claim 1 , wherein the average colloidal particle diameter of the colloidal particles comprising lead acetate is 1 to 6 nm, the average colloidal particle diameter of the colloidal particles comprising lead acetate and zirconium acetylacetonate stabilized by water molecules is 1 to 10 nm, and the average colloidal particle diameter of the colloidal particles comprising titanium alkoxides and lead acetate chelate-stabilized by amines is 3 to 50 nm. 
     
     
         4 . The method for producing the liquid-jet head according to  claim 1 , wherein the colloidal particles comprising lead acetate, the colloidal particles comprising lead acetate and zirconium acetylacetonate stabilized by water molecules, and the colloidal particles comprising titanium alkoxides and lead acetate chelate-stabilized by amines have the average colloidal particle diameter in increasing order.