Shape memory alloy actuators

Abstract

A shape memory alloy (SMA) actuator includes a groove formed in a surface of a shape memory alloy (SMA) substrate establishing a trace pattern for a layer of conductive material formed over an electrically insulative layer. The trace pattern includes a first end, a second end, and a heating element disposed between the first and second ends. The SMA substrate is trained to deform at a transition temperature achieved when electricity is conducted through the conductive material via first and second interconnect pads terminating the first and second ends of the trace pattern.

1 . A method for manufacturing a shape memory alloy (SMA) actuator, comprising forming a groove on a surface of an SMA substrate to establish a trace pattern. 
     
     
         2 . The method of  claim 1 , further comprising forming a layer of electrically insulative material on the surface of the SMA substrate including the groove. 
     
     
         3 . The method of  claim 2 , further comprising forming a layer of conductive material over the insulative layer. 
     
     
         4 . The method of  claim 3 , further comprising removing insulative material and conductive material from a portion of the surface of the SMA substrate not including the groove, leaving behind insulative material and conductive material in the groove.