Vapor deposition apparatus

Abstract

Contamination of organic EL device is prevented. After a colored layer of the first color is formed, a positioning device moves relatively a substrate and a mask inside the same vacuum chamber, and an opening of the mask is moved to a position above the region where a colored layer of the next color is to be formed. As a result, since the colored layers of two or more colors can be formed without changing the mask and the moving distance of the substrate during deposition becomes short, dust is not generated and contamination of the organic EL device is prevented.

1 . A vapor deposition apparatus, comprising:
 a vacuum chamber;   a substrate-holding device located inside the vacuum chamber for holding a substrate;   a feeding device containing an organic material therein for generating a vapor of the organic material;   an emitting device located at a position facing the substrate for emitting, to the inside of the vacuum chamber, the vapor of the organic material which is generated from the feeding device;   a mask having a plurality of openings formed therein and located inside the vacuum chamber;   a mask-holding device holding the mask at a position between the substrate and the emitting device;   a positioning device for positioning the substrate held by the substrate-holding device with the mask held by the mask-holding device; and   a switching device for connecting the desired feeding device among a plurality of the feeding devices to the emitting device,   wherein the vapor emitted from the emitting device passes through the openings of the mask and reaches the substrate, and each of a plurality of the feeding devices is connected to the emitting device.   
   
   
       2 . The vapor deposition apparatus according to  claim 1 , wherein the respective feeding devices contain the organic material having a color different from each other. 
   
   
       3 . The vapor deposition apparatus according to  claim 1 , wherein each of the feeding devices includes a containing part containing the organic material, the containing part having a bottom part with a through-hole, an evaporation chamber connected to the containing part via the through-hole, a rotary shaft inserted into the through-hole, and a rotary means for rotating the rotary shaft around a center axis thereof, wherein the rotary shaft has a spiral convex portion formed at the periphery thereof, and the rotation of the rotary shaft moves the organic material from the containing part toward the evaporation chamber through a groove between the convex portions. 
   
   
       4 . A vapor deposition apparatus, comprising:
 a vacuum chamber;   a substrate-holding device located inside the vacuum chamber for holding a substrate;   a feeding device containing an organic material therein for generating a vapor of the organic material;   an emitting device located at a position facing the substrate for emitting, to the inside of the vacuum chamber, the vapor of the organic material which is generated from the feeding device; and   a switching device for connecting the desired feeding device among a plurality of the feeding devices to the emitting device,   wherein the vapor emitted from the emitting device reaches the substrate, and each of a plurality of the feeding devices is connected to the emitting device.   
   
   
       5 . The vapor deposition apparatus according to  claim 4 , wherein the respective feeding devices contain the organic material having a color different from each other. 
   
   
       6 . The vapor deposition apparatus according to  claim 4 , wherein each of the feeding devices includes a containing part containing the organic material, the containing part having a bottom part with a through-hole, an evaporation chamber connected to the containing part via the through-hole, a rotary shaft inserted into the through-hole, and a rotary means for rotating the rotary shaft around a center axis thereof, wherein the rotary shaft has a spiral convex portion formed at the periphery thereof, and the rotation of the rotary shaft moves the organic material from the containing part toward the evaporation chamber through a groove between the convex portions.