Method for fabricating multi-component nanowires

Abstract

A method for fabricating multi-component nanowires is disclosed, which can make multi-component nanowires used to realize a nanowire-based memory device by an electroplating process using a multi-component solution. The method for fabricating multi-component nanowires in accordance with the present invention includes the steps of: (a) preparing an anodized aluminum oxide nanotemplate having a plurality of pores; (b) forming an electrode layer on one surface of the anodized aluminum oxide nanotemplate; (c) injecting the anodized aluminum oxide nanotemplate in a predetermined multi-component solution and then growing multi-component nanowires through the pores of the anodized aluminum oxide nanotemplate by an electroplating process in which the anodized aluminum oxide nanotemplate is used as a cathode; and (d) removing the anodized aluminum oxide nanotemplate.

1 . A method for fabricating multi-component nanowires, comprising the steps of:
 (a) preparing an anodized aluminum oxide nanotemplate having a plurality of pores;   (b) forming an electrode layer on one surface of the anodized aluminum oxide nanotemplate;   (c) injecting the anodized aluminum oxide nanotemplate in a predetermined multi-component solution and then growing multi-component nanowires through the pores of the anodized aluminum oxide nanotemplate by an electroplating process in which the anodized aluminum oxide nanotemplate is used as a cathode; and   (d) removing the anodized aluminum oxide nanotemplate.   
   
   
       2 . The method according to  claim 1 , wherein the diameter of the pores is several tens to several hundreds nanometers. 
   
   
       3 . The method according to  claim 1 , wherein the electrode layer comprises gold (Au). 
   
   
       4 . The method according to  claim 1 , wherein if the multi-component solution is an Ag—Se solution, Ag—Se nanowires grow. 
   
   
       5 . The method according to  claim 4 , wherein the Ag—Se solution includes Ag and Se as precursors, and nitric acid and ethylglycerol as solvents. 
   
   
       6 . The method according to  claim 1 , wherein if the multi-component solution is a Ge—Sb—Te solution, Ge—Sb—Te nanowires grow. 
   
   
       7 . The method according to  claim 6 , wherein the Ge—Sb—Te solution includes GeO 2 , SbO 2 , and TeO 2  as precursors, and hydrochloric acid and ethylglycerol as solvents. 
   
   
       8 . The method according to  claim 1 , wherein, in said step (c), a platinum electrode is used as an anode. 
   
   
       9 . The method according to  claim 1 , wherein, in said step (c), a composition ratio of the multi-component nanowires is determined depending on the change of at least one of a mixing ratio of precursors in the multi-component solution and a current density applied during the electroplating process. 
   
   
       10 . The method according to  claim 1 , wherein, in said step (d), the anodized aluminum oxide nanotemplate is removed with a NaOH solution. 
   
   
       11 . Multi-component nanowires prepared by a process comprising the steps of:
 (a) preparing an anodized aluminum oxide nanotemplate having a plurality of pores;   (b) forming an electrode layer on one surface of the anodized aluminum oxide nanotemplate;   (c) injecting the anodized aluminum oxide nanotemplate in a predetermined multi-component solution and then growing multi-component nanowires through the pores of the anodized aluminum oxide nanotemplate by an electroplating process in which the anodized aluminum oxide nanotemplate is used as a cathode; and   (d) removing the anodized aluminum oxide nanotemplate.   
   
   
       12 . The multi-component nanowires according to  claim 11 , wherein the diameter of the pores is several tens to several hundreds nanometers. 
   
   
       13 . The multi-component nanowires according to  claim 11 , wherein the electrode layer comprises gold (Au). 
   
   
       14 . The multi-component nanowires according to  claim 11 , wherein if the multi-component solution is an Ag—Se solution, Ag—Se nanowires grow. 
   
   
       15 . The multi-component nanowires according to  claim 14 , wherein the Ag—Se solution includes Ag and Se as precursors, and nitric acid and ethylglycerol as solvents. 
   
   
       16 . The multi-component nanowires according to  claim 11 , wherein if the multi-component solution is a Ge—Sb—Te solution, Ge—Sb—Te nanowires grow. 
   
   
       17 . The multi-component nanowires according to  claim 16 , wherein the Ge—Sb—Te solution includes GeO 2 , SbO 2 , and TeO 2  as precursors, and hydrochloric acid and ethylglycerol as solvents. 
   
   
       18 . The multi-component nanowires according to  claim 11 , wherein, in said step (c), a platinum electrode is used as an anode. 
   
   
       19 . The multi-component nanowires according to  claim 11 , wherein, in said step (c), a composition ratio of the multi-component nanowires is determined depending on the change of at least one of a mixing ratio of precursors in the multi-component solution and a current density applied during the electroplating process. 
   
   
       20 . The multi-component nanowires according to  claim 11 , wherein, in said step (d), the anodized aluminum oxide nanotemplate is removed with a NaOH solution.