Separation methods for imprint lithography

Abstract

Methods for separating a template from a substrate are described. Generally, the template and the substrate have a template-substrate interface. A tilting motion may be generated about a tilting axis located at the template-substrate interface. The tilting motion may include forming a wedge between the template and the substrate at one end of the template-substrate interface. The substrate may be titled with respect to the template, and the template may remain stationary. Additionally, a force may be applied to increase a distance between the template and the substrate, such that the template is spaced apart from the substrate.

1 . A method for separating a template from a substrate, the template and the substrate having a template-substrate interface, comprising:
 generating tilting motion about a tilting axis located at the template-substrate interface, where generating the tilting motion includes forming a wedge between the template and the substrate at one end of the template-substrate interface, with the substrate being titled with respect to the template, and the template remaining stationary; and,   applying a force to increase a distance between the template and the substrate such that the template is spaced apart from the substrate.   
     
     
         2 . The method of  claim 1 , wherein relative lateral motion between the template and the substrate is substantially insignificant during generation of the tilting motion. 
     
     
         3 . The method of  claim 1 , wherein generation of the tilting motion and application of the force to increase the distance between the template and the substrate are performed concurrently. 
     
     
         4 . The method of  claim 1 , wherein at least a portion of the force applied to increase the distance between the template and the substrate is provided by a Z-translation stage. 
     
     
         6 . The method of  claim 1 , wherein at least a portion of the force applied to increase the distance between the template and the substrate is provided by an actuator system. 
     
     
         7 . A method for separating a template from a substrate, comprising:
 curing a liquid positioned between the template and the substrate, the cured liquid resulting in an imprinted layer;   applying a first force to induce a tilting motion at an interface between the template and the substrate, wherein applying the first force includes forming a wedge between the template and the substrate at one end of the template-substrate interface, with the substrate being tilted with respect to the template, and the template remaining stationary; and,   applying a second force in a Z-direction to increase a distance between the template and the substrate.   
     
     
         8 . The method of  claim 7 , wherein relative lateral motion between the template and the substrate is substantially insignificant during application of the first force. 
     
     
         9 . The method of  claim 7 , wherein application of the first force and the second force is concurrent. 
     
     
         10 . The method of  claim 8 , wherein at least a portion of the second force is provided by a Z-translation stage. 
     
     
         11 . The method of  claim 7 , wherein at least a portion of the second force is provided by a plurality of actuators. 
     
     
         12 . A method for separating a template and a transfer layer positioned on a substrate, comprising:
 applying a peeling force to the template by generating a tilting motion about an axis located between the template and the substrate, wherein the peeling force forms a wedge between the template and the substrate at one end of the template-substrate interface, with the substrate being tilted with respect to the template, and the template remaining stationary; and,   applying a pulling force to the template in the Z-direction to increase a distance between the template and the substrate.   
     
     
         13 . The method of  claim 12 , wherein relative lateral motion between the template and the substrate is substantially insignificant during application of the peeling force. 
     
     
         14 . The method of  claim 13 , wherein the peeling force and the pulling force are applied substantially simultaneously. 
     
     
         15 . The method of  claim 13 , wherein at least a portion of the pulling force is provided by a Z-translation stage. 
     
     
         16 . The method of  claim 13 , wherein at least a portion of the pulling force is provided by an actuator system.