High-temperature evaporator cell for evaporating high-melting materials

Abstract

An evaporator cell for evaporating a high-melting material to be evaporated, comprises a crucible for receiving the material to be evaporated, and a heating device with a heating resistor for the resistance heating of the crucible, the heating resistor being provided as an electron emitter for the electron beam heating of the crucible.

1 . An evaporator cell, configured for evaporating a high-melting material to be evaporated, comprising:
 a crucible for receiving the material to be evaporated, and   a heating device with a heating resistor for a resistance heating of the crucible in a first temperature range, wherein   the heating resistor is arranged for a multi-sided heating on an outer side of the crucible, and   the heating resistor is provided as an electron emitter for electron beam heating of the crucible and for irradiating the outer side of the crucible with electrons in a second higher temperature range.   
   
   
       2 . The evaporator cell according to  claim 1 , in which the crucible has a longitudinal extension and the heating resistor is arranged along the longitudinal extension on the outside of the crucible. 
   
   
       3 . The evaporator cell according to  claim 2 , in which the crucible has a cylindrical or a conical form. 
   
   
       4 . The evaporator cell according to  claim 1 , in which a temperature measuring device is provided with which an operating temperature of the evaporator cell can be measured. 
   
   
       5 . The evaporator cell according to  claim 4 , in which the temperature measuring device comprises a thermocouple. 
   
   
       6 . The evaporator cell according to  claim 5 , in which the operating temperature of the evaporator cell can be measured in the environment of a crucible bottom of the crucible with the thermocouple. 
   
   
       7 . The evaporator cell according to  claim 1 , in which the crucible is connected via a thermally insulating holding device to a carrier. 
   
   
       8 . The evaporator cell according to  claim 7 , in which the holding device has a hollow profile attached to the crucible bottom of the crucible. 
   
   
       9 . The evaporator cell according to  claim 8 , in which the thermocouple is arranged in the hollow profile. 
   
   
       10 . The evaporator cell according to  claim 8 , in which the hollow profile can be inserted into a receptacle of the carrier. 
   
   
       11 . The evaporator cell according to  claim 9 , in which the hollow profile can be inserted into a receptacle of the carrier. 
   
   
       12 . The evaporator cell according to  claim 1 , in which a control device is provided for adjusting the heating device. 
   
   
       13 . The evaporator cell according to  claim 12 , in which the control device includes a first control circuit for adjusting a resistance heating operation. 
   
   
       14 . The evaporator cell according to  claim 12 , in which the control device includes a second control circuit for adjusting an electron beam heating operation. 
   
   
       15 . The evaporator cell according to  claim 12 , in which the control device is provided for simultaneously adjusting the resistance heating operation and the electron beam heating operation. 
   
   
       16 . The evaporator cell according to  claim 12 , in which the temperature measuring device is connected to at least one of the first and the second control circuits. 
   
   
       17 . A coating installation provided with at least one evaporator cell in accordance with  claim 1 .