Metal structural body-containing polymer film, method for manufacturing metal structural body-containing polymer film, and method for manufacturing patterned structural body

Abstract

A method for manufacturing a patterned structural body by which a patterned structural body having a micropattern can be manufactured, a metal structural body-containing polymer film that can be used in the manufacture of the patterned structural body, and a method for manufacturing the polymer film are provided. The metal structural body-containing polymer film comprises a polymer film that includes a block copolymer having an ion-conductive segment and a non-ion-conductive segment and has a microphase-separated structure including ion-conductive domains and non-ion-conductive domains, and a metal structural body localized at the ion-conductive domains.

1 . A metal structural body-containing polymer film, comprising:
 a polymer film that includes a block copolymer having an ion-conductive segment and a non-ion-conductive segment and has a microphase-separated structure including ion-conductive domains and non-ion-conductive domains, and   a metal structural body localized at the ion-conductive domains.   
     
     
         2 . The metal structural body-containing polymer film according to  claim 1 , wherein at least part of the metal structural body is positioned at least on one main surface of the polymer film, and a portion that is not positioned on the surface is continued from the portion that is positioned on the surface. 
     
     
         3 . The metal structural body-containing polymer film according to  claim 2 , wherein at least part of the metal structural body is positioned on two main surfaces of the polymer film, and a portion that is not positioned on the surface is continued from the portion that is positioned on the surface. 
     
     
         4 . The metal structural body-containing polymer film according to  claim 1 , wherein the ion-conductive domains have a co-continuous structure in relation with the non-ion-conductive segment. 
     
     
         5 . A method for manufacturing a metal structural body-containing polymer film, comprising the steps of:
 preparing a polymer film that includes a block copolymer having an ion-conductive segment and a non-ion-conductive segment and has a microphase-separated structure including ion-conductive domains and non-ion-conductive domains; and   localizing and depositing a metal structural body in the ion-conductive domains.   
     
     
         6 . The method for manufacturing a metal structural body-containing polymer film according to  claim 5 , wherein the step of localizing and depositing a metal structural body in the ion-conductive domains is a step of electroplating the polymer film. 
     
     
         7 . A method for manufacturing a patterned structural body, comprising the steps of:
 preparing the metal structural body-containing polymer film according to  claim 1  into contact with a base material and producing a composite body including the metal structural body-containing polymer film and the base material; and   etching the base material by using the metal structural body as a mask.   
     
     
         8 . The method for manufacturing a patterned structural body according to  claim 7 , further comprising a step of removing the polymer film of the metal structural body-containing polymer film between a step of producing the composite body and etching the base material by using the metal structural body as a mask. 
     
     
         9 . The method for manufacturing a patterned structural body according to  claim 7 , further comprising a step of removing the metal structural body after the step of etching the base material by using the metal structural body as a mask.