Dynamic Film Thickness Control System/Method and its Utilization

Abstract

A dynamic film thickness control system/method and its utilization consisting of a minimum of one mask plate arranged between a substrate and a vapor source. A film thickness control device is utilized for real-time control over deposited film thickness and gradually moves the mask plate according to the film thickness control value acquired by the film thickness control device, enabling the mask plate to mask film zones on the said substrate to achieve the film thickness of a design objective. When the required zones of deposition are masked, the deposition of a particular film layer is completed.

1 . A dynamic film thickness control system comprising a mask plate and a film thickness control device; the mask plate being situated between a substrate and a vapor source and the film thickness control device being placed at an appropriate position; the utilization of the film thickness control device providing for real-time control over a coated film thickness and gradually moves the mask plate according to a film thickness control value acquired by the film thickness control device, enabling the mask plate to mask film zones on the substrate to achieve the film thickness of a design objective, wherein the film thickness control device comprises a light source and a detector and/or optical fiber; the light source being situated at a window outside a coating vacuum system such that light rays of the light source are externally projected through the window and a transparent substrate in the vacuum system; and the detector and/or optical fiber is attached to an end section at a lower extent of the mask plate; a small tube is conjoined to a front extremity of the detector enabling the detector to measure the projection rate of the light rays through the substrate and the film or utilizes the said optical fiber instead as a light ray guide for detection purposes. 
   
   
       2 . The dynamic film thickness control system as claimed in  claim 1  in which the mask plate comprises at least two strip-shaped plate elements that are tautly flush against each other or sectionally overlaid. 
   
   
       3 . The dynamic film thickness control system as claimed in  claim 1  in which the film thickness control device further comprises a second detector and/or optical fiber;
 the second detector and/or optical fiber being situated outside the window such that the second detector detects a reflection rate of light rays reflected from the substrate or utilizes the said optical fiber as a light ray guide for detection purposes.   
   
   
       4 . The dynamic film thickness control system as claimed in  claim 2  further comprising a rolled opening formed at one end of said plate elements to provide for the insertion of a pin. 
   
   
       5 . The dynamic film thickness control system as claimed  claim 2  in which adjacent extents of the plate elements are evenly contiguous.