Complex Microdevices and Apparatus and Methods for Fabricating Such Devices

Abstract

Various embodiments of the invention are directed to various microdevices including sensors, actuators, valves, scanning mirrors, accelerometers, switches, and the like. In some embodiments the devices are formed via electrochemical fabrication (EFAB®).

1 . A microdevice comprising at least one of:
 a. a sensor comprising at least two sets of capacitor plates wherein each set of plates comprises a plurality of plates;   b. an actuator comprising at least two sets of capacitor plates wherein each set includes a plurality of plates and wherein a motion of the actuator is perpendicular to a plane of the plates;   c. an actuator comprising at least two sets of capacitor plates wherein each set includes a plurality of plates and wherein a motion of the actuator is in a direction parallel to a plane of the plates, and wherein a portion of the plurality of plates in one set are positioned in a first plane while another portion of the plurality of the plates of the one set are positioned in a second plane offset from the first plane;   d. an actuator comprising at least two sets of capacitor plates wherein each set includes a plurality of plates and wherein a motion of the actuator is in a direction parallel to a plane of the plates, and wherein the plurality of plates in one set are positioned in an array that extends in three dimensions;   e. an electrostatic actuator comprising at least one moveable member and at least one actuation electrode for causing movement of the moveable member wherein the electrode and/or the moveable member is configured to have a contour that leads to a spacing between moveable member and the electrode when the moveable member is in its deflected position toward the electrode which is more uniform than when the moveable member is in an undeflected position;   f. an electrostatic actuator comprising at least one moveable member and at least one actuation electrode for causing movement of the moveable member wherein the electrode and/or the moveable member has a configuration that brings portions of the electrode and member closer together without significantly interfering with the movement of the member;   g. an electrostatic actuator comprising at least one moveable member and at least one actuation electrode for causing movement of the moveable member wherein the electrode has at least one sidewall or at least one protrusion in a region that reduces the separation between the electrode and the member without hindering the motion of the member;   h. an electrostatic actuator comprising at least one moveable member and at least two actuation electrodes that can be activated to create forces that pull the moveable member in opposing directions;   i. an electrostatically actuated micro-mirror scanning system comprising contoured electrodes that allow a reduced drive voltage without hindering mirror movement;   j. a structure comprising a multi-level micro flow channel; or   k. a metal mold have a plurality of levels having features with dimensions on the order of 10s of microns or less.   
   
   
       2 . A method of fabricating a multi-layer structure, comprising:
 (i) forming a first layer on a substrate comprising deposition of at least one sacrificial material and deposition of at least one structural material wherein the deposited sacrificial material and the deposited structural material are planarized to have a common height to set a boundary level for the first layer;   (ii) forming additional layers adjacent to and adhered to previously formed layers, wherein the formation of each layer comprises deposition of at least one sacrificial material and deposition of at least one structural material and wherein the sacrificial material and the structural material for each additional layer are planarized to have a common height to set a boundary level for each additional layer; and   (iii) after formation of the additional layers, etching at least one sacrificial material from a plurality of layers to reveal the structure,
 wherein structure is configured to function as a check valve, and comprises: a valve body surrounding a passage; a valve plate supported by one or more springs relative to the valve body and capable of movement relative to the valve body to allow opening and closing of the passage. 
   
   
   
       3 . The method of  claim 2  wherein the check valve is opened when sufficient pressure is applied to a selected side of the valve plate. 
   
   
       4 . The method of  claim 2  wherein the check valve is closed when sufficient pressure is applied to a selected side of the valve plate. 
   
   
       5 . The method of  claim 2  wherein at least one sacrificial material comprises an electroplated metal and at least one structural material comprises an electroplated metal. 
   
   
       6 . The method of  claim 2  wherein a second structural material applied to at least one layer comprises a shape memory alloy. 
   
   
       7 . The method of  claim 6  wherein the second structural material is applied into a void formed by etching into a portion of previously deposited material. 
   
   
       8 . The method of  claim 7  wherein the valve can be set into a closed state or an opened state by manipulation of the shape memory alloy which state may be changed by application of sufficient pressure on a selected side of the valve plate. 
   
   
       9 . A method of fabricating a multi-layer structure, comprising:
 (i) forming a first layer on a substrate comprising deposition of at least one sacrificial material and deposition of at least one structural material wherein the deposited sacrificial material and the deposited structural material are planarized to have a common height to set a boundary level for the first layer;   (ii) forming additional layers adjacent to and adhered to previously formed layers, wherein the formation of each layer comprises deposition of at least one sacrificial material and deposition of at least one structural material and wherein the sacrificial material and the structural material for each additional layer are planarized to have a common height to set a boundary level for each additional layer; and   (iii) after formation of the additional layers, etching at least one sacrificial material from a plurality of layers to reveal the structure,
 wherein structure is configured to function as a bellows controlled valve, and comprises: a valve body surrounding a passage; a valve plate supported a bellows relative to the valve body and capable of movement relative to the valve body to allow opening and closing of the passage. 
   
   
   
       10 . The method of  claim 9  wherein at least one sacrificial material comprises an electroplated metal and at least one structural material comprises an electroplated metal. 
   
   
       11 . The method of  claim 10  wherein the bellows comprises a cavity and a passage for movement of a pneumatic control fluid. 
   
   
       12 . The method of  claim 11  wherein the bellows comprises a cavity and a passage for movement of a pneumatic control fluid. 
   
   
       13 . A method of fabricating a multi-layer structure, comprising:
 (i) forming a first layer on a substrate comprising deposition of at least one sacrificial material and deposition of at least one structural material wherein the deposited sacrificial material and the deposited structural material are planarized to have a common height to set a boundary level for the first layer;   (ii) forming additional layers adjacent to and adhered to previously formed layers, wherein the formation of each layer comprises deposition of at least one sacrificial material and deposition of at least one structural material and wherein the sacrificial material and the structural material for each additional layer are planarized to have a common height to set a boundary level for each additional layer; and   (iii) after formation of the additional layers, etching at least one sacrificial material from a plurality of layers to reveal the structure,
 wherein structure is configured to function as a bistable valve, and comprises: a valve body surrounding a passage; a valve plate supported by one or more controllable supports relative to the valve body and capable of moving a valve plate from a stable passage closed position to a stable passage open position. 
   
   
   
       14 . The method of  claim 13  wherein the valve is opened when sufficient pressure is applied to a selected side of the valve plate. 
   
   
       15 . The method of  claim 13  wherein the valve is closed when sufficient pressure is applied to a selected side of the valve plate. 
   
   
       16 . The method of  claim 13  wherein at least one sacrificial material comprises an electroplated metal and at least one structural material comprises an electroplated metal. 
   
   
       17 . The method of  claim 13  wherein a second structural material applied to at least one layer comprises a magnetic material. 
   
   
       18 . The method of  claim 13  wherein a second structural material applied to at least one layer comprises a dielectric material. 
   
   
       19 . The method of  claim 13  wherein the valve can be moved between states by a temporarily controlled actuator.