Substrate holder mounting device and substrate holder container chamber

Abstract

A substrate holder mounting device is provided that is compact and has a simple structure. The substrate holder mounting device according to the present invention is provided with: a first and a second mounting mechanisms ( 5, 7 ) that are housed in a chamber and that are respectively configured to be capable of mounting a plurality of substrate holders along a row; row direction drive means that moves the first mounting mechanism to a row direction relatively with respect to the second mounting mechanism; a shifting mechanism ( 30 ) that shifts the substrate holders between the first and second mounting mechanisms; and a link-up mechanism that changes positions of the substrate holders in the row direction in the first or second mounting mechanism by a linkage between the shifting mechanism and the above-described row direction drive means.

1 .- 12 . (canceled) 
   
   
       13 . A substrate holder container chamber comprised of a plurality of substrate holder mounting devices and a controller,
 wherein each substrate holder mounting device comprises;   a table mechanism for mounting a plurality of substrate holders arranged substantially parallel in a row and movable in a direction of the row of arranged substrate holders, and;   an up/down mechanism provided with a rest unit for resting the substrate holders, and through an up/down operation the arranged substrate holders rested on the rest unit are lifted up to separate the substrate holders from the table mechanism, and the separated plurality of substrate holder are lifted down from the rest unit onto the table mechanism,   wherein the controller controls the table mechanism and the up/down mechanism in association with each other so that the table mechanism is moved in the direction of the row of arranged substrate holders while the substrate holders are being separated from the table mechanism, and the separated substrate holders are lifted down onto the moved table mechanism by the up/down mechanism, whereby the row of arranged plurality of substrate holders is shifted from one position to another position on the table mechanism, and   wherein the plurality of substrate holders are arranged to be substantially parallel in the substrate holder container chamber.   
   
   
       14 . The substrate holder container chamber according to  claim 13 , further comprising:
 a carrying mechanism that carries substrate holders out of a chamber; and   a shifting mechanism that takes out a substrate holder mounted at an end of the table mechanism to shift it to the carrying mechanism.   
   
   
       15 . The substrate holder container chamber according to  claim 14 , wherein the table mechanism arranges and mounts a plurality of substrate holders which are directed to face a front end of the substrate holder, and
 the carrying means is configured to be capable of carrying the substrate holders without changing the mounted direction of the substrate holders.   
   
   
       16 . An in-line type substrate processing device comprising:
 the substrate holder container chamber according to  claim 13 ;   a substrate supply chamber which loads substrates on the substrate holder; and   a process chamber that performs surface treatment on the substrates loaded on the substrate holder.   
   
   
       17 . A method of manufacturing a magnetic disk comprising the steps of:
 taking the substrate holder housed in the substrate holder container chamber according to  claim 13  out of the substrate holder container chamber;   loading a substrate on the substrate holder; and   performing surface treatment on the substrate loaded on the substrate holder.