Abatement system

Abstract

Abatement systems are described. An abatement system includes a combustion chamber and a fuel burner ring coupled with the combustion chamber. Another abatement system includes a combustion chamber and a fuel flow control mechanism coupled with the combustion chamber.

1 . An abatement system, comprising:
 a combustion chamber; and   a fuel burner ring coupled with the combustion chamber.   
   
   
       2 . The abatement system of  claim 1 , wherein the fuel burner ring comprises a plurality of ports. 
   
   
       3 . The abatement system of  claim 2 , wherein the plurality of ports is arranged to provide an approximately uniform flow pattern of a fuel provided to the plurality of ports. 
   
   
       4 . The abatements system of  claim 3 , wherein the approximately uniform flow pattern of the fuel is provided along a length of the combustion chamber. 
   
   
       5 . The abatement system of  claim 4 , further comprising:
 a process gas inlet tube to introduce a process gas into the combustion chamber, the process gas inlet tube surrounded by the fuel burner ring.   
   
   
       6 . The abatement system of  claim 5 , further comprising:
 one or more additional process gas inlet tubes, each of the one or more additional process gas inlet tubes surrounded by a fuel burner ring.   
   
   
       7 . The abatement system of  claim 2 , wherein the fuel burner ring comprises a number of ports approximately in the range of 8-30 ports. 
   
   
       8 . An abatement system, comprising:
 a combustion chamber; and   a fuel flow control mechanism coupled with the combustion chamber.   
   
   
       9 . The abatement system of  claim 8 , wherein the fuel flow control mechanism comprises a vacuum generator device configured to be driven by a high pressure airflow. 
   
   
       10 . The abatement system of  claim 9 , wherein the vacuum generator device is configured such that the high pressure airflow creates a slight vacuum for drawing gaseous fuel into the vacuum generator device. 
   
   
       11 . The abatement system of  claim 10 , wherein the vacuum generator device is the sole fuel flow control mechanism in the abatement system. 
   
   
       12 . The abatement system of  claim 10 , wherein the vacuum generator device is further coupled with a pressure regulator as an additional fuel flow control mechanism in the abatement system. 
   
   
       13 . The abatement system of  claim 10 , wherein the vacuum generator device is further configured to mix a fuel flow and an airflow. 
   
   
       14 . An abatement system, comprising:
 a combustion chamber;   a fuel burner ring coupled with the combustion chamber; and   a fuel flow control mechanism coupled with the combustion chamber.   
   
   
       15 . The abatement system of  claim 14 , wherein the fuel burner ring comprises a plurality of ports, and wherein the fuel flow control mechanism comprises a vacuum generator device configured to be driven by a high pressure airflow. 
   
   
       16 . The abatement system of  claim 15 , wherein the vacuum generator device is configured such that the high pressure airflow creates a slight vacuum for drawing a fuel into the vacuum generator device, and wherein the plurality of ports is arranged to provide an approximately uniform flow pattern of the fuel provided to the plurality of ports. 
   
   
       17 . The abatements system of  claim 16 , wherein the approximately uniform flow pattern of the fuel is provided along a length of the combustion chamber, and wherein the vacuum generator device is the sole fuel flow control mechanism in the abatement system. 
   
   
       18 . The abatement system of  claim 17 , wherein the vacuum generator device is further coupled with a pressure regulator as an additional fuel flow control mechanism in the abatement system, the abatement system further comprising:
 a process gas inlet tube to introduce a process gas into the combustion chamber, the process gas inlet tube surrounded by the fuel burner ring.   
   
   
       19 . The abatement system of  claim 18 , wherein the vacuum generator device is further configured to mix a fuel flow and an airflow, the abatement system further comprising:
 one or more additional process gas inlet tubes, each of the one or more additional process gas inlet tubes surrounded by a fuel burner ring.   
   
   
       20 . The abatement system of  claim 15 , wherein the fuel burner ring comprises a number of ports approximately in the range of 8-30 ports.