Sealing apparatus for a process chamber

Abstract

A sealing apparatus is provided herein. In some embodiments, the sealing apparatus includes an annular body including a first portion having a circular cross-section and a second portion extending radially outward from the first portion, wherein the second portion has a rectangular cross-section. In some embodiments, a sealing apparatus includes a body configured to be retained in a recess of a first surface; an arm extending from the body away from the first surface and configured to provide a force when deflected towards the body by a second surface to form a seal between the first surface and the second surface.

1 . A sealing apparatus, comprising:
 an annular body including a first portion having a circular cross-section and a second portion extending radially outward from the first portion, wherein the second portion has a rectangular cross-section.   
     
     
         2 . The sealing apparatus of  claim 1 , further comprising:
 a first flange and a second flange having an terminal end of the second portion of the annular body compressed therebetween.   
     
     
         3 . The sealing apparatus of  claim 2 , wherein the first flange further comprises a first recess configured to fit the first portion of the annular body therein. 
     
     
         4 . The sealing apparatus of  claim 2 , wherein the first flange further comprises a second recess configured to fit the second portion of the annular body therein. 
     
     
         5 . The sealing apparatus of  claim 2 , further comprising:
 a first wall disposed radially inward along the first portion of the annular body and the first flange, wherein the first portion contacts the first wall.   
     
     
         6 . The sealing apparatus of  claim 5 , further comprising:
 a second wall coupled to the second flange, wherein a gap separates the second wall and the second flange from the first wall.   
     
     
         7 . The sealing apparatus of  claim 6 , wherein the first wall comprises quartz and the second wall comprises a metal. 
     
     
         8 . The sealing apparatus of  claim 2 , wherein the first flange and second flange are coupled by at least one of bolts or a clamp. 
     
     
         9 . The sealing apparatus of  claim 2 , wherein the first flange further comprises:
 a lip extending upwards from a radially inward side of the first flange.   
     
     
         10 . The sealing apparatus of  claim 9 , wherein the first flange comprises a ceramic. 
     
     
         11 . The sealing apparatus of  claim 2 , wherein the first flange and the second flange each comprise at least one of stainless steel or aluminum. 
     
     
         12 . The sealing apparatus of  claim 1 , wherein the annular body comprises a perfluoroelastomer. 
     
     
         13 . A sealing apparatus, comprising:
 a body configured to be retained in a recess of a first surface;   an arm extending from the body away from the first surface and configured to provide a force when deflected towards the body by a second surface to form a seal between the first surface and the second surface.   
     
     
         14 . The sealing apparatus of  claim 13 , wherein the body and arm comprise a perfluoroelastomer. 
     
     
         15 . The sealing apparatus of  claim 13 , wherein the body is a closed loop. 
     
     
         16 . The sealing apparatus of  claim 15 , wherein the closed loop is annular. 
     
     
         17 . The sealing apparatus of  claim 15 , wherein the arm extends along the body. 
     
     
         18 . The sealing apparatus of  claim 13 , further comprising:
 a first surface having a recess and the body retained therein; and   a second surface facing the first surface and compressing the arm towards the first surface.