Fine mold and method for regenerating fine mold

Abstract

A fine mold comprises a regeneration target film forming a convex part of a formation surface, and a light shielding unit that is configured deeper than a bottom of the formation surface and that regenerates the regeneration target film. A manufacturing cost of a product having a three-dimensional structure can be reduced.

1 . A method of manufacturing a fine mold comprising:
 forming a light shielding unit on a transparent substrate;   forming a transparent protection film on the light shielding unit; and   forming a target film on the transparent protection film, the target film forming a convex part of a formation surface.   
     
     
         2 . The method of manufacturing a fine mold according to  claim 1 , wherein the act of forming the light shielding unit further comprises forming the light shield unit as an opaque film. 
     
     
         3 . The method of manufacturing a fine mold according to  claim 1 , wherein the act of forming the light shielding unit further comprises forming the light shield unit as a gradation mask. 
     
     
         4 . The method of manufacturing a fine mold according to  claim 1 , further comprising forming a shallowest depth of the light shielding unit the same as deepest depth of the target film. 
     
     
         5 . The method of manufacturing a fine mold according to  claim 1 , wherein the transparent protection film is harder than the target film. 
     
     
         6 . The method of manufacturing a fine mold according to  claim 1 , further comprising:
 forming the transparent substrate as a transparent reinforcement plate having a concave part in which the light shielding unit is embedded, and   wherein the transparent protection film is embedded in the transparent reinforcement plate between the light shielding unit and the forming surface and is formed of transparent material having a lower refractive index than the transparent reinforcement plate.   
     
     
         7 . The method of manufacturing a fine mold according to  claim 1 , wherein the act of forming the light shielding unit further comprises:
 forming a film on the transparent substrate; and   patterning the film to form the light shielding unit.   
     
     
         8 . The method of manufacturing a fine mold according to  claim 1 , wherein the act of forming the target film further comprises:
 forming a photosensitive film on the transparent protective film;   exposing the photosensitive film to light through the light shielding unit; and   developing the photosensitive film to form the target film.   
     
     
         9 . The method of manufacturing a fine mold according to  claim 1 , further comprising forming a hard film on the target film.