Fluid storage and dispensing systems and processes

Abstract

Fluid storage and dispensing systems and processes involving various devices, structures and arrangements, as well as techniques and methods, for fluid storage and dispensing, including, without limitation, pre-connect verification couplings that are usefully employed in application to fluid storage and dispensing packages, to ensure proper coupling and avoid fluid contamination issues, empty detect systems that are usefully employed for fluid storage and dispensing packages incorporating liners that are pressure-compressed in the fluid dispensing operation, ergonomically enhanced structures for facilitating removal of a dispense connector from a capped vessel, cap integrity assurance systems for preventing misuse of vessel caps, and keycoding systems for ensuring coupling of proper dispense assemblies and vessels. Fluid storage and dispensing systems are described, which achieve zero or near-zero headspace character, and prevent or ameliorate solubilization effects in liquid dispensing from liners in overpack vessels.

1 . A pre-connect verification coupling, comprising a first coupling body, a ring including a first keycode structure and interlock, and a second coupling body including a second keycode structure, the ring being cooperative with the first coupling body to allow translational movement of the body against the ring in a post-verification coupling with the second coupling body, with the interlock preventing such translational movement prior to verification coupling of the first keycode structure with the second keycode structure. 
     
     
         2 . The pre-connect verification coupling of  claim 1 , wherein the first coupling body comprises a dispense head of a dispensing assembly. 
     
     
         3 . The pre-connect verification coupling of  claim 2 , wherein the dispense head includes a probe. 
     
     
         4 . The pre-connect verification coupling of  claim 1 , wherein the second coupling body is connected to a fluid container. 
     
     
         5 . The pre-connect verification coupling of  claim 4 , wherein the second coupling body comprises a cap of the fluid container. 
     
     
         6 . The pre-connect verification coupling of  claim 5 , wherein the cap comprises a membrane, and the first coupling body includes a probe adapted to pierce the membrane in said post-verification coupling of the first coupling body with the second coupling body. 
     
     
         7 . The pre-connect verification coupling of  claim 6 , wherein the membrane comprises a material selected from the group consisting of rubber, cellulosic materials and polymeric materials. 
     
     
         8 . The pre-connect verification coupling of  claim 4 , wherein the fluid container comprises a flexible liner in a rigid overpack. 
     
     
         9 . The pre-connect verification coupling of  claim 8 , wherein the flexible liner holds a high purity liquid. 
     
     
         10 . The pre-connect verification coupling of  claim 8 , wherein the flexible liner is a three-dimensional, closed head liner. 
     
     
         11 . The pre-connect verification coupling of  claim 8 , wherein the flexible liner is formed of a blown tubular polymeric film material. 
     
     
         12 . The pre-connect verification coupling of  claim 8 , wherein the flexible liner is a closed head liner. 
     
     
         13 . The pre-connect verification coupling of  claim 8 , wherein the flexible liner is formed of a virgin polymeric material. 
     
     
         14 . The pre-connect verification coupling of  claim 8 , wherein the flexible liner comprises a material selected from the group consisting of polytetrafluoroethylene, polyethylene, polypropylene, polyurethane, polyvinylidene chloride, polyvinylchloride, polyacetal, polystyrene, polyacrylonitrile, polybutylene, and copolymers including a monomer of one or more of the foregoing polymers. 
     
     
         15 . The pre-connect verification coupling of  claim 8 , wherein the flexible liner has a thickness in a range of from about 5 mils to about 30 mils. 
     
     
         16 . The pre-connect verification coupling of  claim 8 , further comprising a radio frequency identification tag. 
     
     
         17 . The pre-connect verification coupling of  claim 1 , wherein the first and second keycode structures comprise notch and pin elements. 
     
     
         18 . The pre-connect verification coupling of  claim 1 , wherein the first and second keycode structures comprise channel and protrusion elements. 
     
     
         19 . The pre-connect verification coupling of  claim 1 , wherein the first and second keycode structures comprise interdigitating ribs of circumferentially varied transverse dimensions. 
     
     
         20 . The pre-connect verification coupling of  claim 1 , wherein the first and second keycode structures comprise tongue and groove elements. 
     
     
         21 . The pre-connect verification coupling of  claim 1 , wherein the first coupling body and the ring are interconnected with one another, with the first coupling body biased to a retracted position by a biasing structure prior to verification coupling of the first keycode structure with the second keycode structure, and after such verification coupling the first coupling body is downwardly translatable to an extended position, by application of manual downward force on the first coupling body, so that the first coupling body is translated downwardly through the ring, with accompanying compression of the biasing structure. 
     
     
         22 . The pre-connect verification coupling of  claim 21 , wherein the biasing structure comprises a biasing spring. 
     
     
         23 . The pre-connect verification coupling of  claim 1 , wherein the interlock comprises a mechanism selected from the group consisting of electronic interlock mechanisms, electromechanical interlock mechanisms, and mechanical interlock mechanisms. 
     
     
         24 . The pre-connect verification coupling of  claim 1 , wherein the interlock comprises spring-biased tumblers responsive to engagement with the keycode structure of the first coupling body with the keycode structure of the second coupling body. 
     
     
         25 . The pre-connect verification coupling of  claim 24 , wherein the spring-biased tumblers respond to engagement of the key code structure of the first coupling body with the key code structure of the second coupling body by retracting to allow downward translation of the first coupling body through the ring when downwardly directed manual pressure is exerted on the first coupling body. 
     
     
         26 . A fluid storage and dispensing package, comprising a fluid storage and dispensing vessel and a fluid dispensing assembly adapted for connection to flow circuitry, said fluid storage and dispensing package comprising a pre-connect verification coupling as claimed in  claim 1 , said fluid dispensing assembly comprising said first coupling body and said ring, and said fluid storage and dispensing vessel having a cap thereon, wherein said cap comprises the second coupling body. 
     
     
         27 . The fluid storage and dispensing package of  claim 26 , wherein said cap overlies a membrane, and the fluid dispensing assembly comprises a probe adapted for penetration of said membrane when the first coupling body and second coupling body are fully engaged with one another. 
     
     
         28 . The fluid storage and dispensing package of  claim 27 , wherein said fluid storage and dispensing vessel comprises a flexible liner in a rigid overpack. 
     
     
         29 . The fluid storage and dispensing package of  claim 28 , wherein said flexible liner contains a semiconductor manufacturing fluid. 
     
     
         30 . The fluid storage and dispensing package of  claim 29 , wherein said fluid dispensing assembly is coupled with fluid flow circuitry arranged to deliver dispensed fluid to a location of use. 
     
     
         31 . The fluid storage and dispensing package of  claim 30 , wherein said fluid flow circuitry is coupled at said location of use to a fluid-utilizing facility. 
     
     
         32 . The fluid storage and dispensing package of  claim 31 , wherein said fluid-utilizing facility comprises a semiconductor manufacturing facility. 
     
     
         33 . The fluid storage and dispensing package of  claim 26 , wherein the fluid dispensing assembly comprises a fluid discharge conduit. 
     
     
         34 . The fluid storage and dispensing package of  claim 33 , wherein the fluid discharge conduit comprises connection structure adapted for connection to fluid flow circuitry. 
     
     
         35 . The fluid storage and dispensing package of  claim 26 , wherein the first coupling body when downwardly translated to complete engagement with the second coupling body is lockable in completely engaged position by a locking structure. 
     
     
         36 . The fluid storage and dispensing package of  claim 35 , wherein the locking structure comprises a bayonet locking structure. 
     
     
         37 . The fluid storage and dispensing package of  claim 35 , wherein the locking structure comprises a dimple-and-ball detent structure. 
     
     
         38 . A pre-connect verification coupling including a first coupling body and a ring cooperative therewith to allow a translational movement of the body against the ring in a post-verification coupling with a second coupling body including second keycode structure, wherein the ring includes a first keycode structure and an interlock preventing such translational movement prior to verification coupling of the first keycode structure with the second keycode structure. 
     
     
         39 . A fluid supply system including a liner-based fluid storage and dispensing package coupled with flow circuitry for delivery of fluid from a liner in said package to a location of use, wherein the liner-based fluid storage and dispensing package is coupled with a source of pressurizing gas for delivery of pressurizing gas into the package to exert pressure on the liner for pressure-mediated dispensing of fluid from the liner into said flow circuitry, a pressure transducer adapted to sense pressure of fluid dispensed from the liner into said flow circuitry and produce a transducer output indicative of the said pressure, and a processor adapted to receive said transducer output and determine rate of change of pressure of said fluid and provide a processor output indicative of an increased rate of change correlative to onset of exhaustion of fluid in the liner. 
     
     
         40 . The fluid supply system of  claim 39 , wherein the pressurizing comprises a gas selected from the group consisting of the argon, helium, nitrogen and air. 
     
     
         41 . The fluid supply system of  claim 39 , wherein the liner contains a liquid medium selected from the group consisting of photoresist liquid compositions and chemical mechanical polishing slurries. 
     
     
         42 . The fluid supply system of  claim 39 , further comprising a filter arranged for filtering of the fluid dispensed from the liner into the flow circuitry. 
     
     
         43 . The fluid supply system of  claim 39 , further comprising a dispensing pump in the flow circuitry. 
     
     
         44 . The fluid supply system of  claim 43 , wherein the dispensing pump comprises a pump selected from the group consisting of diaphragm pumps, piston pumps, peristaltic pumps, injector pumps, and metered-dose pumps. 
     
     
         45 . The fluid supply system of  claim 39 , wherein the location of use comprises a semiconductor manufacturing tool. 
     
     
         46 . The fluid supply system of  claim 45 , wherein the semiconductor manufacturing tool comprises a tool selected from the group consisting of coating tools, etching tools, publishing tools, masking tools, deposition tools, volatilization tools, pyrolysis tools, packaging tools, mixing tools, and abatement tools. 
     
     
         47 . The fluid supply system of  claim 39 , wherein the processor is arranged to control fluid dispensing and utilization of fluid dispensed from the liner. 
     
     
         48 . The fluid supply system of  claim 47 , wherein the processor is selected from the group consisting of general-purpose programmable computers, microprocessors, microcontrollers, and programmable logic controllers. 
     
     
         49 . The fluid supply system of  claim 39 , wherein the processor is further adapted to control the source of pressurizing gas, to modulate flow thereof. 
     
     
         50 . The fluid supply system of  claim 39 , wherein the processor is further adapted to control at least one of: pressurizing gas flow rate from the source of pressurizing gas; fluid processing at the location of use; valve(s) in the flow circuitry; and pump(s) in the flow circuitry. 
     
     
         51 . The fluid supply system of  claim 39 , wherein the processor is arranged to transmit the processor output to a display monitor. 
     
     
         52 . The fluid supply system of  claim 39 , wherein the processor is adapted to monitor pressure of the pressurizing gas. 
     
     
         53 . A fluid supply system comprising a liner-based fluid storage and dispensing package including a liner adapted to contain a liquid medium, a pressurized gas source adapted to exteriorly exert on the liner a gas pressure for pressure-mediated dispensing of liquid medium from the liner, and a monitor adapted to monitor rate of change of pressure of liquid medium dispensed from the liner and to output a slope droop condition indicative of onset of exhaustion of liquid medium from the liner. 
     
     
         54 . The fluid supply system of  claim 53 , wherein the monitor includes a pressure transducer arranged to monitor pressure of the liquid medium dispensed from the liner, and a processor operatively coupled to the transducer to receive transducer output signals for signal processing of same, to determine and output said slope droop condition indicative of onset of exhaustion of liquid medium from the liner. 
     
     
         55 . The fluid supply system of  claim 53 , operatively coupled in fluid medium-transmitting relationship to a semiconductor manufacturing tool. 
     
     
         56 . The fluid supply system of  claim 55 , wherein the liner contains a photoresist material. 
     
     
         57 . A method of supplying fluid to a location of use from a liner-based fluid storage and dispensing package including a liner holding said fluid, the method comprising applying exterior pressure to the liner to progressively collapse the liner and dispense fluid therefrom, and monitoring pressure of the dispensed fluid as a function of time to determine slope droop indicative of onset of exhaustion of fluid from the liner during dispensing operation. 
     
     
         58 . The method of  claim 57 , further comprising readying another liner-based fluid storage and dispensing package for dispensing operation in response to determination of said slope droop. 
     
     
         59 . The method of  claim 58 , further comprising switching-in said another liner-based fluid storage and dispensing package to effect continuity of dispensing to the location of use. 
     
     
         60 . The method of  claim 57 , wherein the location of use is a semiconductor manufacturing tool. 
     
     
         61 . A method of supplying a fluid from a collapsible liner subjected to pressure to effect dispensing of the fluid, said method including monitoring pressure of the dispensed fluid as a function of time, and determining slope droop of the pressure-time function as indicative of a predetermined approach to exhaustion of fluid from the liner. 
     
     
         62 . The method of  claim 61 , wherein fluid dispensed from the liner is subjected to pumping in a dispensed fluid flow circuit, and delivered from the flow circuitry to a location of use. 
     
     
         63 . The method of  claim 62 , wherein the pumping is conducted by a metered dose pump, and the location of use includes a semiconductor manufacturing tool. 
     
     
         64 . The method of  claim 63 , wherein the liner contains a fluid selected from the group consisting of photoresists and chemical mechanical polishing compositions. 
     
     
         65 . The method of  claim 61 , wherein when said predetermined approach to exhaustion is reached, an alarm is outputted. 
     
     
         66 . The method of  claim 61 , wherein when said predetermined approach to exhaustion is reached, a change-out operation is initiated for continuation of dispensing, from another liner. 
     
     
         67 . The method of  claim 61 , wherein when said predetermined approach to exhaustion is reached, the dispensing operation is modified to terminate dispensing operation in a manner coordinated with remaining inventory of fluid in the liner. 
     
     
         68 . A fluid storage and dispensing system, including a fluid storage and dispensing vessel adapted for holding fluid in an interior volume thereof, said vessel having a port opening, a cap engaged with said port opening for sealing thereof, and a dispense assembly including a connector engageable with the cap, to access fluid in the vessel for dispensing thereof through the dispense assembly, said connector including at least one engagement member engageable with the cap to lockingly retain the connector in position for dispensing, and a manually graspable member coupled with the at least one engagement member and manually translatable between a first biased position at which the at least one engagement member lockingly retains the connector in position for dispensing, and a second release position at which the at least one engagement member is disengaged from the cap to prevent removal of the connector from the cap. 
     
     
         69 . A fluid storage and dispensing system according to  claim 68 , comprising two engagement members mounted at diametrally opposite sides of the connector in relation to one another. 
     
     
         70 . A fluid storage and dispensing system according to  claim 69 , wherein the two engagement members are coupled with the manually graspable member by a coupling assembly including rotational cam elements adapted for translation of the manually graspable member to the first biased position in the absence of manual translation of the manually graspable member. 
     
     
         71 . A fluid storage and dispensing system according to  claim 70 , wherein said engagement members are pivotally translatable clamping members. 
     
     
         72 . A fluid storage and dispensing system according to  claim 71 , wherein said manually graspable member comprises a handle. 
     
     
         73 . A fluid storage and dispensing system according to  claim 72 , wherein said handle comprises a curvate handle that is finger-contoured. 
     
     
         74 . A fluid storage and dispensing system according to  claim 72 , wherein said handle in said second release position is vertically upstanding, and in said first biased position is displaced at least 90° from said second release position. 
     
     
         75 . A fluid storage and dispensing system according to  claim 74 , wherein said handle in said first biased position is displaced more than 90° from said second release position. 
     
     
         76 . A fluid storage and dispensing system according to  claim 75 , wherein said handle in said first biased position is downwardly oriented and in contact with the vessel. 
     
     
         77 . A fluid storage and dispensing system according to  claim 70 , wherein said manually graspable member is biased to said first biased position by a spring element. 
     
     
         78 . A fluid storage and dispensing system according to  claim 77 , wherein said spring element comprises a torsional spring element. 
     
     
         79 . A fluid storage and dispensing system according to  claim 70 , wherein said rotational cam elements comprise at least one push off cam arranged to exert push off pressure when said manually graspable member is in said second release position. 
     
     
         80 . A fluid storage and dispensing system according to  claim 70 , wherein the connector includes a limit stop feature determining position of the manually graspable member in said second release position. 
     
     
         81 . A fluid storage and dispensing system according to  claim 80 , wherein the limit stop feature comprises a protrusion with which the manually graspable member abuttingly engages, when said manually graspable member is in said second release position. 
     
     
         82 . A fluid storage and dispensing system according to  claim 70  wherein said rotational cam elements engage a push off structure that exerts bearing pressure against the vessel to assist disengagement of the connector when said manually graspable member is in said second release position. 
     
     
         83 . A fluid storage and dispensing system according to  claim 82 , wherein said push off structure comprises at least two posts in bearing contact with the vessel. 
     
     
         84 . A fluid storage and dispensing system according to  claim 82 , wherein said push off structure comprises at least four posts in bearing contact with the vessel. 
     
     
         85 . A fluid storage and dispensing system according to  claim 84 , wherein said push off structure comprises four posts in bearing contact with the vessel, comprising an assembly including two posts at opposite sides of the connector, and a linking structure coupling the two posts at each of said opposite sides of the connector. 
     
     
         86 . A fluid storage and dispensing system according to  claim 68 , wherein the manually graspable member coupled with the at least one engagement member and manually translatable between a first biased position at which the at least one engagement member lockingly retains the connector in position for dispensing, and a second release position at which the at least one engagement member is disengaged from the cap to prevent removal of the connector from the cap, comprises a side platform that is manually depressible from the first biased position to a second release position, by application of squeezing force manually exerted thereon. 
     
     
         87 . A fluid storage and dispensing system according to  claim 86 , comprising a side platform at each of opposite sides of the connector. 
     
     
         88 . A fluid storage and dispensing system according to  claim 68 , wherein said fluid storage and dispensing vessel includes a liner adapted for holding a fluid therein. 
     
     
         89 . A fluid storage and dispensing system according to  claim 88 , wherein said liner holds a high purity liquid for semiconductor manufacturing. 
     
     
         90 . A fluid storage and dispensing system according to  claim 70 , wherein said rotational cam elements include pivot clamp cams and push off cams mounted on axles. 
     
     
         91 . A fluid storage and dispensing system according to  claim 90 , wherein a handle is coupled to said rotational cam elements. 
     
     
         92 . A fluid storage and dispensing system according to  claim 91 , wherein the engagement members include pivot clamps, and said pivot clamp cams activate the pivot clamps when the pivot clamp cams are rotated upwardly by corresponding movement of the handle. 
     
     
         93 . A fluid storage and dispensing system according to  claim 92 , wherein the pivot clamp cams during such rotation ramp up and press the pivot clamps inwardly to create a moment about a pivot clamp axis, to cause the pivot clamps to release from engagement with the cap. 
     
     
         94 . A fluid storage and dispensing system according to  claim 93 , wherein the coupling assembly comprises a torque spring causing the handle to fall down in said first biased position. 
     
     
         95 . A fluid storage and dispensing system according to  claim 94 , wherein the push off cams push off a top portion of the cap when the handle is rotated to an up position as said second release position. 
     
     
         96 . A fluid storage and dispensing system according to  claim 95 , wherein the connector has protrusions on side surfaces thereof that stop the handle in a vertical position as said second release position. 
     
     
         97 . A method of storing and dispensing fluid, comprising use of a fluid storage and dispensing system according to any one of  claims 68 - 96 . 
     
     
         98 . A fitment seal, comprising a main disk-shaped body and a cylindrical sealing wall depending downwardly therefrom at a radius less than radius of the main disk-shaped body, whereby the main disk-shaped body forms a peripheral flange, the main disk-shaped body having a main top surface and an annular boss extending upwardly from said main top surface and forming a corresponding well in a center portion of said main disk-shaped body. 
     
     
         99 . The fitment seal of  claim 98 , wherein said well has a floor that is planar, in a plane displaced from a plane including a remaining portion of said main disk-shaped body. 
     
     
         100 . The fitment seal of  claim 98 , wherein said main disk-shaped body has a main bottom surface, and said annular boss and well form a protrusion on the bottom surface of the main disk-shaped body. 
     
     
         101 . The fitment seal of  claim 98 , wherein said peripheral flange has a tapered outer edge portion. 
     
     
         102 . The fitment seal of  claim 98 , wherein the cylindrical sealing wall at a lower end portion thereof has an inwardly tapered outer surface. 
     
     
         103 . The fitment seal of  claim 98 , as reposed in a fitment. 
     
     
         104 . The fitment seal of  claim 103 , wherein the fitment has secured thereto a liner adapted to hold a fluid. 
     
     
         105 . The fitment seal of  claim 98 , formed of a flexible resilient material. 
     
     
         106 . The fitment seal of  claim 105 , wherein said flexible resilient material comprises material selected for the group consisting of rubber and polymeric materials. 
     
     
         107 . The fitment seal of  claim 103 , as interference fitted in said fitment. 
     
     
         108 . A fluid storage and dispensing vessel including a fitment, wherein said fitment is sealed with a fitment seal as claimed in  claim 98 . 
     
     
         109 . The fitment seal of  claim 98 , further including a tear tab adapted to be manually grasped for installation and deinstallation of the fitment seal. 
     
     
         110 . A cap adapted for locking engagement with a container having an array of circumferentially spaced-apart locking cavities on a neck of the container, said cap comprising a main cap body including a cylindrical sidewall, and a circular top wall joined to said cylindrical sidewall at an upper end thereof, said cylindrical sidewall having a series of circumferentially spaced-apart cut-outs at a lower portion of said sidewall, each cut-out having joined thereto at an upper end of the cut-out a downwardly depending anti-rotation finger element biased in the absence of force thereon to an outwardly flared position, each said finger element comprising an elongate strip joined at an upper end thereof to the upper end of the cut-out, and joined at a lower end thereof to a radially inwardly directed lug adapted to engage with one of said locking cavities when over-fit by a connector adapted for engagement with said cap. 
     
     
         111 . A cap according to  claim 110 , wherein said finger elements depend downwardly to said radially inwardly directed lugs with a lower portion of the finger elements and the lugs being below a lower edge of said cylindrical sidewall. 
     
     
         112 . A cap according to  claim 111 , wherein said finger elements are biased to a position out of engagement with said locking cavities on the neck of the container. 
     
     
         113 . A fluid storage and dispensing package, comprising a container adapted to hold fluid, said container having an array of circumferentially spaced-apart locking cavities on the neck of the container, and a cap adapted for locking engagement with said container, said comprising a main cap body including a cylindrical sidewall, and a circular top wall joined to said cylindrical sidewall at an upper end thereof, said cylindrical sidewall having a series of circumferentially spaced-apart cut-outs at a lower portion of said sidewall, each cut-out having joined thereto at an upper end of the cut-out a downwardly depending anti-rotation finger element, each said finger element comprising an elongate strip joined at an upper end thereof to the upper end of the cut-out, and joined at a lower end thereof to a radially inwardly directed lug adapted to engage with one of said locking cavities when over-fit by a connector adapted for engagement with said cap. 
     
     
         114 . A fluid storage and dispensing package according to  claim 113 , wherein the cylindrical sidewall is threaded on an interior surface thereof, and said neck of the container is complementarily threaded on an exterior surface thereof for matable engagement with the threaded interior surface of the cap. 
     
     
         115 . A fluid storage and dispensing package according to  claim 114 , further comprising a dispense connector over-fitting the cap, with said fingers interposed between the neck of the container and an interior surface of the connector, and with the lugs engaged with locking cavities on the neck of the container. 
     
     
         116 . A fluid storage and dispensing package according to  claim 115 , wherein the container holds a fluid for semiconductor manufacturing. 
     
     
         117 . A fluid storage and dispensing package according to  claim 116 , wherein the container holds the fluid in a liner. 
     
     
         118 . A fluid storage and dispensing package according to  claim 117 , wherein the dispense connector comprises a probe adapted for contact with the fluid in the liner and is arranged for float therethrough for dispensing fluid from the container. 
     
     
         119 . A method of preventing removal of a cap, along with a connector, from a container of a fluid storage and dispensing package, including said container, said cap and said connector, said method comprising providing said container with locking cavities at a neck region of the container, and providing said cap has comprising a main cap body including a cylindrical sidewall, and a circular top wall joined to said cylindrical sidewall at an upper end thereof, said cylindrical sidewall having a series of circumferentially spaced-apart cut-outs at a lower portion of said sidewall, each cut-out having joined thereto at an upper end of the cut-out a downwardly depending anti-rotation finger element, each said finger element comprising an elongate strip joined at an upper end thereof to the upper end of the cut-out, and joined at a lower end thereof to a radially inwardly directed lug adapted to engage with one of said locking cavities when over-fit by the connector. 
     
     
         120 . A cap adapted for engagement with a fluid storage and dispensing container, and for engagement with a dispensing assembly including a dispense connector adapted to cooperatively overfit the cap, said cap having an outward protrusion element at a lower portion thereof engageable with locking structure on the fluid storage and dispensing container. 
     
     
         121 . A cap according to  claim 120 , having threading on an engagement surface thereof for matable engagement with complementary threading on the container. 
     
     
         122 . A cap according to  claim 121 , formed of a material of construction selected from the group consisting of rubber and polymeric materials. 
     
     
         123 . A cap according to  claim 122 , formed of a polymeric material selected from the group consisting of polyethylene, polypropylene, and polytetrafluoroethylene. 
     
     
         124 . A fluid storage and dispensing package, comprising a container adapted for holding fluid, said container including a port and locking structure on a surface of the container, and a cap adapted for engagement with said port, wherein said cap is adapted for engagement with a dispensing assembly including a dispense connector adapted to cooperatively overfit the cap, said cap having an outward protrusion element at a lower portion thereof engageable with said locking structure when said dispense connector overfits said cap. 
     
     
         125 . A fluid storage and dispensing package according to  claim 124 , wherein said locking structure comprises a ratchet structure engageable with the protrusion element of the cap to prevent rotational movement of the cap. 
     
     
         126 . A fluid storage and dispensing package according to  claim 125 , wherein the protrusion element is biased to a non-engagement position when the dispense connector is not engaged to overfit said cap. 
     
     
         127 . A fluid storage and dispensing package according to  claim 124 , wherein said locking structure comprises an upstanding post on a surface of the container. 
     
     
         128 . A fluid storage and dispensing package according to  claim 127 , wherein the cap has a channel at a lower portion thereof, and the protrusion element comprises a spar terminating said channel, whereby the upstanding post is engageable with the spar to prevent rotation of the cap. 
     
     
         129 . A fluid storage and dispensing package, comprising a container adapted for holding fluid, said container including a port and a first locking structure on a surface of the container, and a cap adapted for engagement with said port, wherein said cap is adapted for engagement with a dispensing assembly including a dispense connector adapted to cooperatively overfit the cap, said cap having a second locking structure at a lower portion thereof engageable with said locking structure when said dispense connector overfits said cap, and wherein said second locking structure is non-engageable with the first locking structure when said dispense connector does not overfit said cap. 
     
     
         130 . A fluid storage and dispensing package, according to  claim 129 , wherein the first locking structure comprises a projection on a neck region of the container, and said second locking structure comprises a cut-out on a lower portion of the cap. 
     
     
         131 . A fluid storage and dispensing package, comprising a container adapted for holding fluid, said container including a port, and a cap adapted for engagement with said port, wherein said cap is adapted for engagement with a dispensing assembly including a dispense connector adapted to cooperatively overfit the cap, said cap having a locking structure that is operative when said dispense connector overfits said cap, and that is de-actuatable when said dispense connector does not overfit said cap. 
     
     
         132 . A fluid storage and dispensing package according to  claim 131 , wherein the locking structure comprises a tear tab. 
     
     
         133 . A fluid storage and dispensing package, comprising a container including a port, a liner in said container adapted for holding fluid, a fitment including an opening for fluid egress, coupled to said liner and to said port, and a cap adapted for engagement with said port, wherein said cap is additionally adapted for engagement with a dispensing assembly including a dispense connector adapted to cooperatively overfit the cap for withdrawal of fluid from the liner when pressure is exteriorly exerted on said liner, said dispense connector being adapted for connection to pressurizing gas for flow of the pressurizing gas into the container for exterior exertion of pressure on liner, a gas seal element positioned between the cap and the fitment to seal against the pressurizing gas in the container, and a plug seal to prevent fluid escape from the liner at the fitment. 
     
     
         134 . A fluid storage and dispensing package according to  claim 133 , wherein the gas seal element comprises a ring sealing element. 
     
     
         135 . A fluid storage and dispensing package according to  claim 133 , wherein the plug seal is attached to a tear tab on the cap. 
     
     
         136 . A fluid storage and dispensing package according to  claim 133 , wherein the cap includes a pressurization opening for flow of pressurizing gas there through. 
     
     
         137 . A fluid storage and dispensing package, according to  claim 136 , for the comprising a plug for sealing of said pressurization opening. 
     
     
         138 . A fluid storage and dispensing package according to  claim 133 , wherein the dispense connector includes a probe that is insertable into the liner for accessing fluid therein, without breakage of a membrane seal by insertion of the probe. 
     
     
         139 . A fluid storage and dispensing package according to  claim 133 , wherein the cap has a coating of polytetrafluoroethylene thereon. 
     
     
         140 . A fluid storage and dispensing package, comprising a container adapted for holding fluid, said container including a first engagement structure, a cap adapted for engagement with said container, a code ring engageable with said cap to form a cap/code ring assembly, wherein said cap/code ring assembly is adapted for engagement with a dispensing assembly including a dispense connector adapted to cooperatively overfit the cap/code ring assembly for withdrawal of fluid from the container, wherein the cap/code ring assembly includes second engagement structure engageable with said first engagement structure, to fixedly position the cap/code ring assembly on the container and oppose removal thereof. 
     
     
         141 . A fluid storage and dispensing package according to  claim 140 , wherein the code ring is removable from the cap using a tool. 
     
     
         142 . A fluid storage and dispensing package according to  claim 141 , wherein said tool comprises a screwdriver. 
     
     
         143 . A fluid storage and dispensing package according to  claim 140 , wherein the cap is removable from the container upon removal of the code ring from the cap/code ring assembly. 
     
     
         144 . A fluid storage and dispensing package according to  claim 143 , wherein the cap is non-reusable upon removal of the code ring from the cap/code ring assembly. 
     
     
         145 . A fluid storage and dispensing package according to  claim 140 , wherein the container includes a mis-connection interference feature preventing installation of an incorrect dispense connector on the cap/code ring assembly. 
     
     
         146 . A cap including threading for connection thereof to a container having a complementary threading, said cap including non-reuse structure rendering the cap non-reusable subsequent to initial engagement of the cap with the container, said non-reuse structure adapted to deform, destroy or remove said threading upon attempted or effected removal of the cap from the container subsequent to said initial engagement, wherein said non-reuse structure is selected from the group consisting of: toothed locks that cut or tear the area above the threading; arrangements in which attempted removal of the cap results in ripping or destruction of threads; two-piece caps that thread on the neck of the vessel with a detent stop, whereby the threads peel off under high torque when the cap is removed; screw-on caps with anti-rotation features that prevent the cap from being unscrewed; arrangements in which the cap has a tear area above the thread that is activated by unscrewing, in which the remaining threaded area is removed by pulling a vertical tear tab; two-piece threading; tear-off threading; helical threadings that unscrew themselves; formed threading that undergoes deformation when the cap is removed; and threading on the cap which is additionally formed over large features on the container neck, whereby the cap threading is destroyed when the cap is removed from the container. 
     
     
         147 . A cap including threading for connection thereof to a container having a complementary threading, said cap including a cap modification to prevent removal and/or reuse of the cap, wherein said cap modification is selected from the group consisting of: provision of caps with clips that require a tool to press them into position, wherein the cap when the clip is pressed into position is able to be installed or removed in a ready manner; provision of pins holding the cap in place, with a removal tool being adapted to withdraw the pins out of the position securing the cap; provision of a screw-on cap with pressed-in pins to prevent unscrewing of the cap, wherein the pins can only be removed with a special tool in order to unscrew the cap; provision of a screw-on cap with anti-rotation lock, wherein the code ring must be removed to unlock the cap, and wherein the lock includes pins that must be pulled up or tabs that must be squeezed together to release the lock; provision of a screw-on cap with an anti-rotation lock, in which the code ring must be removed to unlock the cap, wherein the anti-rotation lock is a ratchet type, with teeth on the cap and teeth on the vessel, whereby high torque is required to remove the cap, using a special tool; use of a code ring torque tool having grab features are torque on only; provision of a second ring on the cap to attach the cap to the vessel, wherein the ring breaks off when the cap is removed; provision of a snap-on cap with a tear tab to remove the cap, wherein the cap will not lock on once the tear tab is removed; provision of a tear ring that snaps over, wherein the snap is at the tear ring; provision of a snap-on cap that requires a special tool to cut it off the vessel; provision of a shrink cap or wrap, which is heat activated or wet-to-dry activated; provision of a non-threaded cap that is formed over features on the vessel neck, wherein interference between the vessel features and the cap retains the cap in position, so that the cap is removable only with a tool or otherwise by prying it off, and removal of the cap rips off the formed areas of the cap, so that part of the cap remains on the vessel and can be removed with a special tool or vertical tear tab; provision of a cap constructed and arranged so that cap removal alters the code ring so that the cap will not work with the dispense probe again; provision of a code ring that is cut by the installation of the dispense probe, so that the code ring falls off when the dispense probe is removed; provision of a magnetic structure that is broken off when the dispense probe is removed; fabrication of the vessel with a feature that mates with the recess in the cap, so that when the cap is removed, the vessel feature breaks off and becomes lodged in the cap recess, and the cap then cannot be used with a new vessel; fabrication of a cap with break-off tabs that hold the cap in position on the vessel and slide down complementary grooves in the vessel when installed, and break off when the cap is removed; fabrication of a cap with a built-in dye release mechanism operating to release dye when the cap is removed; fabrication of the cap with a security-type tag that breaks upon removal of the cap, so that empty vessels bearing broken tags will evidence misuse; and provision of radio-frequency identification (RFD) integrated circuit chips on the package, in conjunction with monitoring software that prevents an operator from switching caps. 
     
     
         148 . A fluid storage and dispensing system adapted for coupling with a fluid-utilizing tool by flow circuitry therebetween, said system including a liner-based fluid storage and dispensing package adapted for pressure-mediated dispensing of fluid from a liner in the package, and said flow circuitry containing a filter, a pump, and a pressure transducer arrange to monitor pressure of dispense fluid, and to actuate a controller adapted to modulate dispensing operation, wherein said pressure transducer is positioned in said flow circuitry at a fluid inlet to said fluid-utilizing tool. 
     
     
         149 . A fluid storage and dispensing system according to  claim 148 , wherein said pump comprises a dispense shot pump. 
     
     
         150 . A fluid storage and dispensing system according to  claim 148 , wherein said fluid-utilizing tool has a downstream dispenser associated therewith. 
     
     
         151 . A method of achieving a zero or near-zero headspace condition in a liner of a fluid storage and dispensing package in which dispensing is carried out with imposition of pressure on the liner for progressive compaction thereof to discharge fluid from an interior volume of the liner through a discharge passage of a probe coupled with the liner, in which the probe is a stubby probe having a terminus including an opening to the discharge passage, and the terminus of the stubby probe is disposed in an upper portion of the interior volume of the liner for removal of headspace gas prior to discharge of fluid from the liner. 
     
     
         152 . A method of supplying a fluid from a collapsible liner subjected to pressure to effect dispensing of the fluid, said method including monitoring pressure of the dispensed fluid as a function of time, and determining pressure slope droop of the pressure-time function as indicative of a predetermined approach to exhaustion of fluid from the liner, and at said predetermined approach to exhaustion of fluid from the liner, imposing a pressure spike on the liner to effect further dispensing of fluid from the liner. 
     
     
         153 . A method according to  claim 152 , wherein fluid dispensed from the liner subsequent to imposition of the pressure spike thereon is flowed to a reservoir for transitional supply of fluid during exhaustion of fluid from the liner. 
     
     
         154 . A dispensing assembly for coupling with a cap of a fluid storage and dispensing vessel, comprising a connector body, a handle mounted on the connector body for pivotable movement thereon from a first position at which the connector body is in a locked position on said cap, to a second position at which the connector body is releasable by upward pull of the handle, clamps mounted on the connector body and adapted for movement between a first position at which the clamps lockingly engage the cap, and a second position at which the clamps release the cap, said handle at ends thereof being coupled with cams engageable with the clamps in the first position of the handle and the first position of the clamps, and disengaged from the clamps in the second position of the handle and the second position of the clamps. 
     
     
         155 . A dispensing assembly according to  claim 154 , wherein the handle is coupled with a torsional spring and interconnecting the connector body and the handle to facilitate said movement of the handle between the first and second position thereof. 
     
     
         156 . A dispensing assembly according to  claim 154 , further comprising a wheel coupled with the handle to translate the clamps to the second position when the handle is moved to its second position. 
     
     
         157 . A dispensing assembly according to  claim 154 , further comprising at least one push off cam coupled with the handle and adapted to engage a surface of the vessel when the handle is translated to its second position and apply a force on the surface to assist removal of the connector head from the cap. 
     
     
         158 . A process system including a fluid-utilizing apparatus, a fluid supply including a fluid storage and dispensing package including a liner adapted for imposition of a pressurizing gas thereon to contract the liner and dispense the fluid therefrom, wherein the liner is coupled to a connector for flow of fluid from the liner therethrough during dispensing operation, and a flow circuitry coupled to the connector and to the fluid-utilizing apparatus, the liner including a fluid dispensing port at an upper part thereof, and the connector including a probe for coupling with the fluid dispensing port, wherein the probe comprises a stubby probe, whereby headspace gas may be vented from the liner prior to the dispensing operation, and headspace thereafter minimized throughout the process system during the dispensing operation. 
     
     
         159 . A connector including a stubby probe and adapted for coupling with a cap of a fluid storage and dispensing package including said cap. 
     
     
         160 . A connector according to  claim 159 , as coupled to a cap of a fluid storage and dispensing package. 
     
     
         161 . A semiconductor manufacturing tool coupled by flow circuitry to a capped fluid storage and dispensing package, wherein the flow circuitry is coupled to a connector that is matably engaged with the cap, and wherein the cap and connector comprising a pre-verification coupling as claimed in  claim 1 . 
     
     
         162 . A semiconductor manufacturing system including a fluid-utilizing tool and a fluid supply system as claimed in  claim 39 , operatively coupled in fluid dispensing relationship to the fluid-utilizing tool by said flow circuitry. 
     
     
         163 . A semiconductor manufacturing system including a fluid-utilizing tool and a fluid supply system as claimed in  claim 53 . 
     
     
         164 . A semiconductor manufacturing system including a fluid-utilizing tool and a fluid storage and dispensing system as claimed in  claim 68 . 
     
     
         165 . A connector adapted for engagement with a cap of a fluid storage and dispensing vessel, wherein the cap has a keycoded structure coupled thereto for prevention of miscoupling and reuse of the cap, and the connector comprises a stubby probe. 
     
     
         166 . The connector of  claim 165 , having mounted thereon a handle moveable between a first locking position and a second release position. 
     
     
         167 . A cap assembly, comprising a cap adapted for coupling with a fluid storage and dispensing vessel, and a keycoded structure coupled to the cap for prevention of miscoupling and reuse of the cap. 
     
     
         168 . A method of manufacturing a semiconductor product, comprising use of a fluid reagent, wherein the fluid reagent is supplied from a fluid storage and dispensing package including a liner holding the fluid reagent, wherein the liner is subjected to imposition of external pressure thereon for pressure-dispensing of the fluid, wherein the liner is maintained in a zero or near-zero headspace state during pressure-dispensing of the fluid. 
     
     
         169 . The method of  claim 168 , wherein the fluid storage and dispensing package is coupled by flow circuitry to a semiconductor manufacturing tool, and minimum headspace is maintained in said flow circuitry during pressure-dispensing of the fluid. 
     
     
         170 . The method of  claim 169 , wherein minimum headspace is maintained in the flow circuitry during pressure-dispensing of the fluid. 
     
     
         171 . The method of  claim 168 , wherein during pressure-dispensing of the fluid the liner is coupled to a connector including a stubby probe. 
     
     
         172 . The method of  claim 168 , wherein the fluid storage and dispensing package comprises a fluid storage and dispensing package as claimed in  claim 26 . 
     
     
         173 . The method of  claim 168 , wherein the fluid storage and dispensing package includes a cap coupled with the liner, wherein the liner is disposed in a rigid overpack and the cap is coupled with a connector including a stubby probe for flow of pressure-dispensed fluid therethrough. 
     
     
         174 . The method of  claim 168 , wherein the fluid storage and dispensing package is coupled with flow circuitry for delivery of fluid from the liner to a semiconductor manufacturing tool utilizing the fluid, comprising sensing pressure of fluid dispensed from the liner into said flow circuitry during pressure-dispensing and monitoring rate of change of pressure of said fluid to determine an increased rate of pressure change correlative to onset of exhaustion of fluid in the liner. 
     
     
         179 . A method of manufacture of a semiconductor product, comprising supplying fluid for said manufacture by the method of  claim 57 . 
     
     
         180 . A method of manufacture of a semiconductor product, comprising use of a fluid storage and dispensing system as claimed in  claim 68  to supply fluid for said manufacture. 
     
     
         181 . A method of manufacture of a semiconductor product, comprising use of a fluid storage and dispensing system including a fitment seal as claimed in  claim 98 , to supply fluid for said manufacture. 
     
     
         182 . A method of manufacture of a semiconductor product, comprising use of a fluid storage and dispensing system including a cap as claimed in  claim 110 , to supply fluid for said manufacture. 
     
     
         183 . A method of manufacture of a semiconductor product, comprising use of a fluid storage and dispensing package as claimed in  claim 113 , to supply fluid for said manufacture. 
     
     
         184 . A method of manufacture of a semiconductor product, comprising use of a fluid storage and dispensing system including a cap as claimed in  claim 120 , to supply fluid for said manufacture. 
     
     
         185 . A method of manufacture of a semiconductor product, comprising use of a fluid storage and dispensing package as claimed in  claim 124 , to supply fluid for said manufacture. 
     
     
         186 . A method of manufacture of a semiconductor product, comprising use of a fluid storage and dispensing package as claimed in  claim 131 , to supply fluid for said manufacture. 
     
     
         187 . A method of manufacture of a semiconductor product, comprising use of a fluid storage and dispensing package as claimed in  claim 133 , to supply fluid for said manufacture. 
     
     
         188 . A method of manufacture of a semiconductor product, comprising use of a fluid storage and dispensing package as claimed in  claim 140 , to supply fluid for said manufacture. 
     
     
         189 . A method of manufacture of a semiconductor product, comprising use of a fluid storage and dispensing system including a cap as claimed in  claim 146 , to supply fluid for said manufacture. 
     
     
         190 . A method of manufacture of a semiconductor product, comprising use of a fluid storage and dispensing system including a cap as claimed in  claim 147 , to supply fluid for said manufacture. 
     
     
         191 . A method of manufacture of a semiconductor product, comprising use of a fluid storage and dispensing system as claimed in  claim 148 , to supply fluid for said manufacture. 
     
     
         192 . A method of making a fluid storage and dispensing package, comprising fabricating the package with a pre-connect verification coupling according to  claim 1 . 
     
     
         193 . A method of making a fluid storage and dispensing package, comprising fabricating the package with a pre-connect verification coupling according to  claim 38 . 
     
     
         194 . A method of making a fluid storage and dispensing package, comprising fabricating the package with a fitment seal according to  claim 98 . 
     
     
         195 . A method of making a fluid storage and dispensing package, comprising fabricating the package with a cap according to  claim 110 . 
     
     
         196 . A method of making a fluid storage and dispensing package, comprising fabricating the package with a cap according to  claim 120 . 
     
     
         197 . A method of making a fluid storage and dispensing package, comprising fabricating the package with a cap according to  claim 146 . 
     
     
         198 . A method of making a fluid storage and dispensing package, comprising fabricating the package with a cap according to  claim 147 . 
     
     
         199 . A method of making a fluid storage and dispensing package, comprising fabricating the package with a cap connector with a connector including a keycode ring. 
     
     
         200 . A method of making a fluid storage and dispensing package, comprising fabricating the package with a keycoded structure coupled thereto for prevention of miscoupling and reuse of the cap. 
     
     
         201 . A method of facilitating removal of a probe connector from a cap coupled with a fluid storage and dispensing container, wherein the probe connector has clamps lockingly securing the probe connector to the cap, said method comprising fabricating the probe connector with a handle translatable from a down position at which the clamps are lockingly engaged with the cap to an up position at which the handle permits release of the clamps and removal of the probe connector by upward pull of the handle. 
     
     
         202 . A method according to  claim 201 , wherein the probe connector comprises a structure as shown and described with reference to any one of  FIGS. 9-17 ,  28 - 31 ,  35 - 36  and  38 - 44 . 
     
     
         203 . A dispensing head connector comprising a structure as shown and described with reference to any one of  FIGS. 9-17 ,  28 - 31 ,  35 - 36  and  38 - 44 . 
     
     
         204 . A cap assembly comprising a structure as shown and described with reference to any one of  FIGS. 45 and 46  hereof. 
     
     
         205 . A connector for a material storage and dispensing package, comprising a main body portion, including a handle mounted on the main body portion and pivotally translatable thereon, between an up position, and a down position, wherein the connector is adapted to be coupled with a material storage and dispensing vessel for closure thereof, and the connector includes a dispensing assembly for dispensing material from the vessel, and a pressure relief device operatively coupled with the handle and adapted when the handle is in the down position to prevent removal of the connector from the material storage and dispensing vessel, and a stop element operatively coupled with the pressure relief device to maintain the handle in the down position when the handle is pivotally translated to such down position, the stop element being selectively disengageable to cause the pressure relief device to vent the vessel to an ambient pressure, and to allow the handle to be pivotally translated upwardly, and with the connector thereafter being disengageable from the vessel when the handle is in the up position, whereby disengagement of the connector from the vessel is enabled to occur at said ambient pressure. 
     
     
         206 . The connector of  claim 205 , wherein a pressure relief device is operatively coupled with the handle at each of opposite ends thereof. 
     
     
         207 . The connector of  claim 206 , wherein the handle at said opposite ends comprises axle portions coupled with the main body portion of the connector. 
     
     
         208 . The connector of  claim 207 , comprising two of said stop elements, wherein each of the axle portions comprises a cam surface engageable with a corresponding one of said stop elements, and each of said stop elements comprises a button that is spring-biased to a locking position preventing movement of the handle, and that is manually depressible to disengage it from its locking position, and thereupon to enable movement of the handle. 
     
     
         209 . The connector of  claim 205 , further comprising a pressurizing gas inlet assembly adapted for flow of pressurizing gas into a vessel when coupled with the connector. 
     
     
         210 . The connector of  claim 205 , wherein the pressure relief device comprises a three-way valve. 
     
     
         211 . The connector of  claim 205 , wherein the stop element comprises a slide member, that is manually translatable between a locking position engaged with the handle, and a release position. 
     
     
         212 . The connector of  claim 205 , wherein the stop element comprises a cylinder that is selectively actuatable to cause extension of a protrusion element for engagement with the handle, and de-actuatable to cause retraction of said protrusion element disengaging same from the handle. 
     
     
         213 . The connector of  claim 212 , wherein the protrusion element engages an axle portion of the handle. 
     
     
         214 . The connector of  claim 212 , wherein the protrusion element is translated by action of a biasing spring coupled therewith. 
     
     
         215 . A material storage and dispensing package, comprising a material storage and dispensing vessel, and a connector as claimed in  claim 205 , coupled with the vessel for closure thereof. 
     
     
         216 . The material storage and dispensing package of  claim 215 , further comprising a liner in the vessel. 
     
     
         217 . The material storage and dispensing package of  claim 216 , wherein the liner holds a chemical reagent. 
     
     
         218 . The material storage and dispensing package of  claim 217 , wherein said chemical reagent comprises a photoresist. 
     
     
         219 . The material storage and dispensing package of  claim 217 , as coupled to a semiconductor manufacturing tool. 
     
     
         220 . The material storage and dispensing package of  claim 215 , wherein the connector further comprises a pressurized gas inlet, for pressure-assisted dispensing of material from the vessel through the dispensing assembly of the connector. 
     
     
         221 . A method of storage and dispensing of material, in which the material is disposed in a vessel, and a connector is coupled with the vessel, to form a containment package, wherein the connector includes a handle that is translatable between a first locking position in which pressure in the vessel is contained, and a second position in which the connector is removable from the vessel without difference in pressure between the vessel and an ambient environment of the package, said method including selectively depressurizing the vessel while the handle is in the first position, to enable the handle to be translated from the first locking position to the second position.