Film forming apparatus

Abstract

A film-forming apparatus of the invention is a film-forming apparatus that includes: a processing container that defines a chamber, a pedestal arranged in the chamber, on which a substrate to be processed can be placed, a showerhead provided opposite to the pedestal, which has a large number of gas-discharging holes, a gas-supplying mechanism that supplies a process gas into the chamber through the showerhead, and a showerhead-temperature controlling unit that controls a temperature of the showerhead.

1 . A film-forming apparatus comprising:
 a chamber in which a substrate to be processed is processed,   a stage arranged in the chamber, on which the substrate to be processed can be placed,   a heater buried in the stage, and   a showerhead provided opposite to the stage, which has a large number of gas-discharging holes,   a lid member mounted on an upper part of the chamber, which has an opening,   a showerhead-temperature controlling unit arranged in an upper part of the showerhead, which controls a temperature of the showerhead,   chamber gas passages formed at the chamber, which respectively supply a film-forming gas and a cleaning gas,   lid-member gas passages formed at the lid member, which respectively communicate with the chamber gas passages,   gas-introducing pipes connected to the showerhead, which respectively communicate with the chamber gas passages and the lid-member gas passages and supply the film-forming gas and the cleaning gas into the showerhead,   a plasma-generating unit for generating plasma of the film-forming gas in the chamber,   a discharging unit for exhausting the chamber,   a circular insulating member for insulating the showerhead from the chamber,   an infilling member for infilling a space surrounded by a periphery of the showerhead and a side wall of the chamber, for preventing plasma from being formed at the space,   a fixing member for fixing the infilling member, and   a gas-spring type of inverting mechanism that inverts the showerhead by turning the showerhead outwardly from the chamber.   
   
   
       2 . A film-forming apparatus according to  claim 2 , wherein
 the showerhead-temperature controlling unit includes:   an inside heater arranged correspondingly to the substrate to be processed, and   an outside heater arranged so as to surround the inside heater.   
   
   
       3 . A film-forming apparatus according to  claim 1 , further comprising
 another insulating member having insulating-member gas passages respectively connected to the gas-introducing pipes, and   a gas-introducing member having gas-introducing-member gas passages respectively connected to the insulating-member gas passages.   
   
   
       4 . A film-forming apparatus according to  claim 2 , further comprising
 another insulating member having insulating-member gas passages respectively connected to the gas-introducing pipes, and   a gas-introducing member having gas-introducing-member gas passages respectively connected to the insulating-member gas passages.   
   
   
       5 . A film-forming apparatus according to  claim 1 , further comprising
 an heat insulating member arranged above the heaters via an atmospheric air space.   
   
   
       6 . A film-forming apparatus according to claim further comprising
 an heat insulating member arranged above the heaters via an atmospheric air space.   
   
   
       7 . A film-forming apparatus according to  claim 3 , further comprising
 an heat insulating member arranged above the heaters via an atmospheric air space.   
   
   
       8 . A film-forming apparatus according to  claim 4 , further comprising
 an heat insulating member arranged above the heaters via an atmospheric air space.   
   
   
       9 . A film-forming apparatus according to  claim 1 , wherein
 the showerhead has:
 an upper plate, 
 a middle plate, and 
 a lower plate, 
   a first space is formed between the upper plate and the middle plate, and   a second space is formed between the middle plate and the lower plate.   
   
   
       10 . A film-forming apparatus according to  claim 2 , wherein
 the showerhead has:
 an upper plate, 
 a middle plate, and 
 a lower plate, 
   a first space is formed between the upper plate and the middle plate, and   a second space is formed between the middle plate and the lower plate.   
   
   
       11 . A film-forming apparatus according to  claim 3 , wherein
 the showerhead has:
 an upper plate, 
 a middle plate, and 
 a lower plate, 
   a first space is formed between the upper plate and the middle plate, and   a second space is formed between the middle plate and the lower plate.   
   
   
       12 . A film-forming apparatus according to  claim 4 , wherein
 the showerhead has:
 an upper plate, 
 a middle plate, and 
 a lower plate, 
   a first space is formed between the upper plate and the middle plate, and   a second space is formed between the middle plate and the lower plate.   
   
   
       13 . A film-forming apparatus according to  claim 1 , wherein
 the infilling member consists of quartz.